公开(公告)号：US09835439B2

公开(公告)日：2017-12-05

申请号：US15061283

申请日：2016-03-04

申请人： Helmut Fischer GmbH Institut fur Elektronik und Messtechnik

发明人： Helmut Fischer

IPC分类号： G01B5/02 ,  G01B11/06 ,  G01B21/04 ,  G01B5/00 ,  G05B19/401

CPC分类号： G01B11/06 ,  G01B5/0004 ,  G01B21/047 ,  G05B19/401 ,  G05B2219/37008

摘要： The invention relates to a method for the electric control of a measurement stand (11) having a drive movement of at least one measurement probe (26) from an initial position (31) into a measurement position (32), in particular for the measurement of the thickness of thin layers in which a motor (34) is controlled for the drive movement of the measurement probe (26), said motor (34) moving a ram (23), to which the measurement probe (26) is fastened, back and forth via a drive device (35) at least for the implementation of a measurement, wherein before a first measurement with the measurement probe (26), a learning routine is carried out, and for the subsequent implementation of one or more measurements, the measurement probe (26) is transferred from the initial position (31) into the measurement position (32), and the drive path of the measurement probe (26) from the initial position (31) into the measurement position (32) is divided into a fast speed and, before the setting of the measurement probe (26) on the measurement object (14), a slow speed, wherein the number of pulses for the fast speed is reduced by the number of pulses for the slow speed, originating from the total number of the determined pulses of the drive path and the number of pulses for the drive path at the fast speed is a multiple of the number of pulses of the drive path at the slow speed.

公开(公告)号：US09772205B2

公开(公告)日：2017-09-26

申请号：US14617349

申请日：2015-02-09

申请人： Helmut Fischer GmbH Institut fur Elektronik und Messtechnik

发明人： Helmut Fischer

IPC分类号： G01B7/06 ,  G01D11/30 ,  G01B5/06

CPC分类号： G01D11/30 ,  G01B5/061 ,  G01B7/06 ,  G01B7/105

摘要： A method for electrically activating a measurement stand with a movement of at least one measuring probe (26) from a starting position (31) into a measuring position (32) and also a measurement stand for supporting a measuring probe, in particular for measuring the thickness of thin layers, in which a motor (34) is activated by a control arrangement (25), which moves a ram (23) up and down via a drive arrangement (35), wherein a retainer (24) is provided on the ram (23), to which retainer the measuring probe (26) can be fastened, in which a freewheel is activated between the drive arrangement (35) and the ram (33) as soon as the measuring probe (26) or retainer (23) is set down in the measuring position (32) on an item to be measured (14) and the movement of the drive arrangement (35) is decoupled from the vertical movement of the ram (23), wherein a movement speed of the at least one measuring probe (14) from the starting position (31) into the measuring position (32) is reduced by mechanical damping or electrical damping before the measuring position (32) is reached.

公开(公告)号：US20160258739A1

公开(公告)日：2016-09-08

申请号：US15061283

申请日：2016-03-04

申请人： Helmut Fischer GmbH Institut fur Elektronik und Messtechnik

发明人： Helmut Fischer

IPC分类号： G01B11/06

CPC分类号： G01B11/06 ,  G01B5/0004 ,  G01B21/047 ,  G05B19/401 ,  G05B2219/37008

摘要： The invention relates to a method for the electric control of a measurement stand (11) having a drive movement of at least one measurement probe (26) from an initial position (31) into a measurement position (32), in particular for the measurement of the thickness of thin layers in which a motor (34) is controlled for the drive movement of the measurement probe (26), said motor (34) moving a ram (23), to which the measurement probe (26) is fastened, back and forth via a drive device (35) at least for the implementation of a measurement, wherein before a first measurement with the measurement probe (26), a learning routine is carried out, and for the subsequent implementation of one or more measurements, the measurement probe (26) is transferred from the initial position (31) into the measurement position (32), and the drive path of the measurement probe (26) from the initial position (31) into the measurement position (32) is divided into a fast speed and, before the setting of the measurement probe (26) on the measurement object (14), a slow speed, wherein the number of pulses for the fast speed is reduced by the number of pulses for the slow speed, originating from the total number of the determined pulses of the drive path and the number of pulses for the drive path at the fast speed is a multiple of the number of pulses of the drive path at the slow speed.

摘要翻译： 本发明涉及一种用于对具有至少一个测量探针（26）从初始位置（31）到测量位置（32）的驱动运动的测量台（11）的电气控制的方法，特别是用于测量 其中电动机（34）被控制用于测量探针（26）的驱动运动的薄层的厚度，所述电动机（34）移动测量探头（26）紧固到其上的压头（23） 至少用于执行测量的驱动装置（35）来回移动，其中在用测量探针（26）进行第一次测量之前，执行学习程序，并且为了随后实施一个或多个测量， 测量探针（26）从初始位置（31）转移到测量位置（32），测量探头（26）从初始位置（31）到测量位置（32）的驱动路径被分割 进入一个快速的速度，在设置之前的mea 测量对象（14）上的确认探测器（26）是一个慢速，其中用于快速速度的脉冲数减少了慢速的脉冲数，源自驱动器的确定脉冲的总数 路径和驱动路径的快速脉冲数是驱动路径的慢速脉冲数的倍数。