Phase change material electronic memory structure and method for forming
    1.
    发明授权
    Phase change material electronic memory structure and method for forming 失效
    相变材料电子记忆体结构及其形成方法

    公开(公告)号:US06605821B1

    公开(公告)日:2003-08-12

    申请号:US10142494

    申请日:2002-05-10

    IPC分类号: H01L2902

    摘要: The invention includes an electronic memory structure. The electronic memory structure includes a substrate. A substantially planar first conductor is formed adjacent to the substrate. An interconnection layer is formed adjacent to the first conductor. A phase change material element is formed adjacent to the interconnection layer. The interconnection layer includes a conductive interconnect structure extending from the first conductor to the phase change material element. The interconnect structure includes a first surface physically connected to the first conductor. The interconnect structure further includes a second surface attached to the phase change material element. The second surface area of the second surface is substantially smaller than a first surface area of the first surface. A substantially planar second conductor is formed adjacent to the phase change material element.

    摘要翻译: 本发明包括电子存储器结构。 电子存储器结构包括基板。 基本上平面的第一导体形成为与基板相邻。 互连层与第一导体相邻地形成。 在互连层附近形成相变材料元件。 互连层包括从第一导体延伸到相变材料元件的导电互连结构。 互连结构包括物理地连接到第一导体的第一表面。 互连结构还包括附接到相变材料元件的第二表面。 第二表面的第二表面积基本上小于第一表面的第一表面积。 形成与相变材料元件相邻的基本平坦的第二导体。