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公开(公告)号：US4574264A
公开(公告)日：1986-03-04
申请号：US552201
申请日：1983-11-15
摘要： A thin film oxygen sensor with a microheater incorporates an oxide semiconductor and has an integral structure of a sensor portion and a heater portion, wherein a porous catalyst layer is formed on a surface of the sensor portion, and a thickness and an average pore diameter of the catalyst layer are determined such that a ratio of the thickness to the average pore diameter falls within a range of 50 to 3,000. The oxygen sensor has good reproducibility, high stability, and high sensitivity for changing a resistance in response to a change in an oxygen content in an atmosphere. The oxygen sensor can be manufactured at low cost and has a compact construction.
摘要翻译： 具有微加热器的薄膜氧传感器结合有氧化物半导体，并且具有传感器部分和加热器部分的整体结构，其中在传感器部分的表面上形成多孔催化剂层，并且其厚度和平均孔径为 确定催化剂层，使得厚度与平均孔径的比率落在50至3,000的范围内。 氧传感器响应于大气中氧含量的变化而具有良好的再现性，高稳定性和高灵敏度。 氧传感器可以低成本制造，结构紧凑。
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公开(公告)号：US4661234A
公开(公告)日：1987-04-28
申请号：US812907
申请日：1985-12-23
IPC分类号： G01N27/419 , G01N27/12 , G01N27/406 , G01N27/409 , G01N27/58
CPC分类号： G01N27/4065
摘要： An air-fuel ratio sensor comprising a limiting electric current type oxygen sensor portion, having a sequential stacking on a porous substrate of a first electrode with high gas permeability, a solid electrolytic thin film having a specific crystal orientation, a thickness of 0.1 to 30 .mu.m, and good crystallinity. The limiting electric current type oxygen sensor portion and second electrode with a high gas permeability, is arranged and connected in parallel with a resistive type oxygen sensor portion having interdigital electrodes formed on one or both major surfaces of an oxide semiconductor thin film, the resistance of which changes in accordance with oxygen partial pressure. The air-fuel ratio sensor also has a sensor heater formed on one surface of the porous substrate around the sensor portions. The overall structure of the sensor is coated with a porous ceramic coating to which a catalyst is added.
摘要翻译： 一种空燃比传感器，包括极限电流型氧传感器部分，其具有顺序堆叠在具有高透气性的第一电极的多孔基底上，具有特定结晶取向的固体电解薄膜，厚度为0.1至30 微米，结晶度好。 具有高透气性的极限电流型氧传感器部分和第二电极被布置和并联连接到具有形成在氧化物半导体薄膜的一个或两个主表面上的交叉指状电极的电阻型氧传感器部分， 其根据氧分压而变化。 空燃比传感器还具有形成在传感器部分周围的多孔基材的一个表面上的传感器加热器。 传感器的整体结构涂覆有添加有催化剂的多孔陶瓷涂层。
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公开(公告)号：US4595485A
公开(公告)日：1986-06-17
申请号：US775741
申请日：1985-09-13
IPC分类号： G01N27/41 , G01N27/404 , G01N27/406 , G01N27/409 , G01N27/56
CPC分类号： G01N27/4065
摘要： A limiting electric current type oxygen sensor comprising a first electrode of a gas-permeable film, a thin solid electrolyte film which is crystallized along one direction to decrease resistance and which has a thickness falling in the range between 0.1 .mu.m and 30 .mu.m, and a second electrode of a gas-permeable film sequentially formed on an electrically insulating substrate. This limiting electric current type oxygen sensor is also provided with a porous coating layer or a dense coating layer. The porous coating layer made of Al.sub.2 O.sub.3, SiO.sub.2, spinnel, SiC, Si.sub.3 N.sub.4 and etc., has a porosity of not more than 30% and a thickness of not less than 1 .mu.m, and serves as a gas diffusion flow rate-determining portion. The dense coating layer serves to control a gas permeation path such that either the first electrode or the substrate is used as the gas diffusion flow rate-determining portion.
摘要翻译： 一种限制电流型氧传感器，包括透气膜的第一电极，沿一个方向结晶以降低电阻并且具有落在0.1μm至30μm之间的厚度的薄固体电解质膜， 以及依次形成在电绝缘基板上的透气膜的第二电极。 该极限电流型氧传感器还设置有多孔涂层或致密涂层。 由Al2O3，SiO2，尖晶石，SiC，Si3N4等制成的多孔涂层的孔隙率不大于30％，厚度不小于1μm，用作气体扩散流速确定部分 。 致密涂层用于控制气体渗透路径，使得第一电极或基板用作气体扩散流速确定部分。
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4.发明授权Apparatus with polarographic sensor to detect concentrations of plurality of gas components 失效具有极谱法传感器以检测多个气体成分浓度的装置
公开(公告)号：US4576705A
公开(公告)日：1986-03-18
申请号：US613969
申请日：1984-05-24
IPC分类号： G01N27/41 , G01N27/406 , G01N27/48 , G01N33/00
CPC分类号： G01N27/4065
摘要： An apparatus for detecting concentrations of a plurality of gas components has a single polarographic sensor capable of detecting an oxygen concentration and a composite concentration of oxygen gas, carbon dioxide gas and steam. A first voltage is applied to the polarographic sensor which then measures only the oxygen concentration, or a second voltage is applied to the sensor which then measures only the composite concentration of oxygen gas, carbon dioxide gas and steam. The first and second voltages are applied to the sensor in a time division manner. Upon application of first and second voltages in such a time division manner, corresponding currents flowing through the sensor are detected to obtain signals corresponding to the oxygen concentration and the composite concentration of oxygen gas, carbon dioxide gas and steam. The signal corresponding to the oxygen concentration is subtracted by an operational amplifier from the signal corresponding to the composite concentration of oxygen gas, carbon dioxide gas and steam, thereby obtaining a signal representing a composite concentration of carbon dioxide gas and steam.
摘要翻译： 用于检测多个气体组分的浓度的装置具有能够检测氧浓度和氧气，二氧化碳气体和蒸汽的复合浓度的单个极谱传感器。 将第一电压施加到极谱传感器，其然后仅测量氧浓度，或者将第二电压施加到传感器，然后传感器仅测量氧气，二氧化碳气体和蒸汽的复合浓度。 以时分方式将第一和第二电压施加到传感器。 以这种时分方式施加第一和第二电压时，检测流过传感器的对应电流，以获得对应于氧浓度和氧气，二氧化碳气体和蒸汽的复合浓度的信号。 对应于氧浓度的信号由运算放大器从对应于氧气，二氧化碳气体和蒸汽的复合浓度的信号中减去，从而获得表示二氧化碳气体和蒸汽的复合浓度的信号。
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公开(公告)号：US4500412A
公开(公告)日：1985-02-19
申请号：US404900
申请日：1982-08-03
IPC分类号： G01N27/12 , G01N27/407 , G01N27/413 , H05B3/14 , G01N27/58
CPC分类号： G01N27/4071 , G01N27/12
摘要： A sensor which has an insulating substrate on which is formed a heater layer for heating the sensor on a part thereof and which is operated above a predetermined temperature. The heater layer is made of a material which has a thickness of 0.2 .mu.m to 20 .mu.m and which is made of platinum, rhodium, palladium or a mixture thereof. The insulating substrate is made of alumina, quartz, spinel, magnesia, zirconia, or mixtures thereof. A heater protective layer having a thickness of 0.01 .mu.m to 500 .mu.m is made of materials based on alumina, silica, spinel, magnesia, zirconia or mixtures thereof.
摘要翻译： 一种具有绝缘基板的传感器，其上形成有加热器层，用于在其一部分上加热传感器并在预定温度以上运行。 加热器层由厚度为0.2μm至20μm的材料制成，并由铂，铑，钯或其混合物制成。 绝缘基板由氧化铝，石英，尖晶石，氧化镁，氧化锆或其混合物制成。 厚度为0.01μm〜500μm的加热器保护层由基于氧化铝，二氧化硅，尖晶石，氧化镁，氧化锆或其混合物的材料制成。
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6.发明授权
公开(公告)号：US4510036A
公开(公告)日：1985-04-09
申请号：US457888
申请日：1983-01-14
IPC分类号： G01N27/41 , G01N27/406 , G01N27/409 , G01N27/58
CPC分类号： G01N27/4065
摘要： The invention provides a limiting electric current type oxygen sensor with a microheater, having: an oxygen ionic conductor; an anode and a cathode respectively formed on two major surfaces of the oxygen ionic conductor; an insulating film which has a porosity of not less than 0.2 [%], an average pore diameter of not less than 140 [.ANG.], and a thickness between 0.2 [.mu.m] and 10 [.mu.m], and which is formed on one of the anode and the cathode so as to regulate a flow rate of oxygen gas and to provide electrical insulation; and the microheater formed on the insulating film. The oxygen ionic conductor is electrically insulated from the microheater through the insulating film. The invention also provides a limiting electric current type oxygen concentration detecting device having the limiting electric current type oxygen sensor and a constant temperature control circuit.
摘要翻译： 本发明提供一种具有微加热器的极限电流型氧传感器，具有：氧离子导体; 分别形成在氧离子导体的两个主表面上的阳极和阴极; 绝缘膜的孔隙率不小于0.2 [％]，平均孔径不小于140 [ANGSTROM]，厚度在0.2μm和10μm之间，并且形成在 阳极和阴极之一，以调节氧气的流量并提供电绝缘; 和形成在绝缘膜上的微加热器。 氧离子导体通过绝缘膜与微加热器电绝缘。 本发明还提供一种具有极限电流型氧传感器和恒温控制电路的极限电流型氧浓度检测装置。
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公开(公告)号：US4524264A
公开(公告)日：1985-06-18
申请号：US493698
申请日：1983-05-11
CPC分类号： G05D23/2401 , G05D23/1904
摘要： A temperature control apparatus detects an actual temperature of an object (e.g., sensor) to be controlled, and compares the actual temperature with a preset target temperature to obtain a difference therebetween, thereby keeping a heater temperature constant. The temperature control apparatus has a temperature rise rate limiter for controlling a temperature rise rate of the object to be controlled so as not to exceed a predetermined temperature rise rate. The object may thus not be damaged by thermal strain which results from a high temperature rise rate.
摘要翻译： 温度控制装置检测要控制的物体（例如传感器）的实际温度，并将实际温度与预设目标温度进行比较以获得其间的差值，从而保持加热器温度恒定。 温度控制装置具有温度上升速率限制器，用于控制要控制的物体的升温速率，使其不超过预定的温度上升率。 因此，由于高的升温速率导致的热应变，物体不会受到损伤。
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公开(公告)号：US4869094A
公开(公告)日：1989-09-26
申请号：US214548
申请日：1988-07-01
CPC分类号： G01M15/104 , G01N1/2258 , G01N1/2247 , G01N1/2252
摘要： A gas sampling valve is provided with a small opening for gas sampling and a gas flow channel communicating therewith and is adapted to sample a gas in the gas flow passage by operating a valve for opening and closing the small opening, wherein at least one detector for detecting the concentration of oxygen or combustion gas is disposed in the gas flow passage, whereby the concentration of oxygen, an air excess ratio, the combustion efficiency, or the like can be measured without using a separate analyzer.
摘要翻译： 气体采样阀设置有用于气体取样的小开口和与其连通的气流通道，并且适于通过操作用于打开和关闭小开口的阀来对气体流动通道中的气体进行采样，其中至少一个检测器 检测氧气或燃烧气体的浓度设置在气体流路中，由此可以在不使用单独的分析器的情况下测量氧浓度，空气过剩率，燃烧效率等。
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公开(公告)号：US5520789A
公开(公告)日：1996-05-28
申请号：US364749
申请日：1994-12-27
IPC分类号： G01N27/41 , G01N27/406 , G01N27/407 , G01N27/409
CPC分类号： G01N27/4075
摘要： A gas sensor using an ionic conductor has a thin-film gas detection portion on an alumina substrate. The gas detection portion comprises a zirconia ionic conductor layer, a pair of platinum electrodes provided with the ionic conductor layer interposed therebetween, and a pair of junction layers positioned between the ionic conductor layer and each electrode and formed in a state in which the substances of the ionic conductor layers and the electrodes are mixed therein.The gas sensor using an ionic conductor is formed by sequentially forming a first electrode, a first junction layer, an ionic conductor layer, a second junction layer, and a second electrode by a physical vapor deposition method on a substrate, wherein the first and second junction layers are formed to be in a state in which the substances of the ionic conductor layers and the electrodes are both present.
摘要翻译： 使用离子导体的气体传感器在氧化铝基板上具有薄膜气体检测部。 气体检测部分包括氧化锆离子导体层，设置有介于其间的离子导体层的一对铂电极和位于离子导体层与每个电极之间的一对接合层，并且形成在其中物质 离子导体层和电极混合在一起。 使用离子导体的气体传感器通过在基板上通过物理气相沉积法依次形成第一电极，第一接合层，离子导体层，第二接合层和第二电极而形成，其中第一和第二 接合层形成为处于离子导体层和电极的物质都存在的状态。
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公开(公告)号：US5480535A
公开(公告)日：1996-01-02
申请号：US174126
申请日：1993-12-27
IPC分类号： G01N27/407 , G01N27/417 , G01N27/41 , G01N27/409
CPC分类号： G01N27/4071 , G01N27/417
摘要： A thin film mutilayered air-fuel ratio sensor having a sensor element including a first electrode formed on a porous substrate, a first solid electrolyte and a third electrode formed on the first electrode in this order, in such a manner that the first electrode is completely covered by the first solid electrolyte inclusive of its surroundings, and that the first solid electrolyte is completely covered by the third electrode inclusive of its surroundings, a second solid electrolyte and a fourth electrode and formed on the third electrode in this order, in such a manner that the peripheral portion of the third electrode is left uncovered by the second solid electrolyte and the fourth electrode and thereby left exposed. The first electrode, the third electrode, and the fourth electrode are made of a gas-permeable porous platinum, and the first solid electrolyte and the second solid electrolyte are made of a gas-permeable dense solid electrolyte having oxygen ion conductivity. The sensor has far improved performance as compared to the conventional ones and can be made compact.
摘要翻译： 一种具有传感器元件的薄膜多层空气燃料比传感器，其传感器元件包括形成在多孔基材上的第一电极，第一固体电解质和形成在第一电极上的第三电极，以使得第一电极完全 被包围其周围的第一固体电解质覆盖，并且第一固体电解质被包括其周围的第三电极完全覆盖，第二固体电解质和第四电极，并且以这种顺序形成在第三电极上 使得第三电极的周边部分不被第二固体电解质和第四电极覆盖，从而露出。 第一电极，第三电极和第四电极由透气性多孔铂制成，第一固体电解质和第二固体电解质由具有氧离子传导性的透气性致密固体电解质构成。 该传感器与常规传感器相比具有非常好的性能，并且可以使其紧凑。
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