公开(公告)号：US5277215A

公开(公告)日：1994-01-11

申请号：US7163

申请日：1993-01-21

申请人： Hidehiro Yanagawa ,  Hiroyuki Nishiuchi ,  Masakazu Shimada ,  Mitsuhiro Hirano ,  Tomoshi Taniyama ,  Kazumi Nikaido ,  Yoshikazu Hisajima ,  Michio Sato

发明人： Hidehiro Yanagawa ,  Hiroyuki Nishiuchi ,  Masakazu Shimada ,  Mitsuhiro Hirano ,  Tomoshi Taniyama ,  Kazumi Nikaido ,  Yoshikazu Hisajima ,  Michio Sato

IPC分类号： C30B25/14 ,  H01L21/00 ,  H01L21/677 ,  F04B37/14

CPC分类号： H01L21/67757 ,  C23C16/45561 ,  C30B25/14 ,  H01L21/67017 ,  Y10T137/0396 ,  Y10T137/2705 ,  Y10T137/86187

摘要： A plurality of airtight chambers are connected through blocking means, which can communicate or shut off the chambers, and at least one of the airtight chambers is used as a processing chamber. One of the adjacent airtight chambers is replaced by a replacement gas, and the replacement gas is supplied to the other of the adjacent airtight chambers. When pressure difference or pressure in the two adjacent airtight chambers is below a predetermined value, the adjacent two airtight chambers are communicated, and pressure in the two airtight chambers is equalized.

摘要翻译： 多个气密室通过阻挡装置连接，可以连通或关闭室，并且至少一个气密室用作处理室。 相邻的气密室中的一个被替换气体代替，并且替换气体被供应到相邻气密室中的另一个。 当两个相邻气密室中的压力差或压力低于预定值时，相邻的两个气密室连通，两个气密室中的压力相等。