Thin film magnetic head having upper core layer with narrow track width
    2.
    发明授权
    Thin film magnetic head having upper core layer with narrow track width 失效
    薄膜磁头具有磁道宽度窄的上芯层

    公开(公告)号:US06400527B1

    公开(公告)日:2002-06-04

    申请号:US09437888

    申请日:1999-11-09

    IPC分类号: G11B531

    摘要: To provide a thin film magnetic head having an upper core layer whose dimensions are controlled with high precision, which can yield high density recording on a magnetic recording medium, and a production process of the same, an upper core layer is formed on a first, second and third insulation layers and a gap layer, and has a narrow tip region, a connecting portion and a body portion, in which the tip region is connected via the gap layer to a lower core layer on a head surface facing a magnetic recording medium, the connecting portion is connected to the tip region in a nearly identical width, and is formed on a lower region of a first sloping region and an inclined plane K, and the body portion extends wider from the connecting portion and covers part of a coil layer. In a thin film magnetic head having a dual coil layer structure, a third insulation layer having a third apex and a third sloping region is formed to cover a second coil layer, and the third apex is located on a second plane region, and the top of a second insulation layer and the third sloping region establish a first pocket region P1.

    摘要翻译: 为了提供具有高精度地控制尺寸的上芯层的薄膜磁头,其可以在磁记录介质上产生高密度记录及其制造方法,上芯层形成在第一, 第二和第三绝缘层和间隙层,并且具有窄的尖端区域,连接部分和主体部分,其中尖端区域经由间隙层连接到面对磁记录介质的头表面上的下芯层 连接部分以几乎相同的宽度连接到尖端区域,并且形成在第一倾斜区域和倾斜平面K的下部区域上,并且主体部分从连接部分延伸得更宽并覆盖线圈的一部分 层。 在具有双线圈层结构的薄膜磁头中,形成具有第三顶点和第三倾斜区域的第三绝缘层以覆盖第二线圈层,并且第三顶点位于第二平面区域上,并且顶部 并且所述第三倾斜区域建立第一袋区域P1。

    SUBSTRATE BONDED MEMS SENSOR
    3.
    发明申请
    SUBSTRATE BONDED MEMS SENSOR 有权
    基板结合MEMS传感器

    公开(公告)号:US20100072563A1

    公开(公告)日:2010-03-25

    申请号:US12560645

    申请日:2009-09-16

    IPC分类号: H01L29/84

    CPC分类号: B81B7/007 B81B2207/097

    摘要: A MEMS sensor includes a first substrate; a second substrate; a movable electrode portion and a fixed electrode portion which are arranged between the first substrate and the second substrate, wherein: conductive supporting portions of the movable electrode portion and the fixed electrode portion are, respectively, fixedly secured to a surface of the first substrate via a first insulating layer; a second insulating layer, a lead layer buried into the second insulating layer, and connection electrode portions that are electrically connected to the lead layer to be individually connected to the conductive supporting portions are provided on a surface of the second substrate; a metallic connection layer is formed on the surface of one of the respective conductive supporting portions; one of the respective connection electrode portions and the metallic connection layer are bonded together by eutectic bonding or diffusion bonding; and, at least each of the connection electrode portions has a thickness of about 4 μm or smaller.

    摘要翻译: MEMS传感器包括第一基板; 第二基板; 布置在所述第一基板和所述第二基板之间的可移动电极部分和固定电极部分,其中:所述可动电极部分和所述固定电极部分的导电支撑部分分别固定地固定到所述第一基板的表面, 第一绝缘层; 第二绝缘层,埋入第二绝缘层中的引线层和与导电层电连接以连接到导电支撑部分的连接电极部分设置在第二基板的表面上; 在各个导电支撑部分之一的表面上形成金属连接层; 各个连接电极部分和金属连接层中的一个通过共晶接合或扩散接合结合在一起; 并且至少每个连接电极部分具有约4μm或更小的厚度。

    Perpendicular magnetic recording head with inverted trapezoidal main magnetic pole layer
    5.
    发明授权
    Perpendicular magnetic recording head with inverted trapezoidal main magnetic pole layer 失效
    带倒梯形主磁极层的垂直磁记录头

    公开(公告)号:US06697221B2

    公开(公告)日:2004-02-24

    申请号:US10024965

    申请日:2001-12-18

    IPC分类号: G11B539

    摘要: A perpendicular magnetic recording head includes an auxiliary magnetic pole layer exposed at a surface facing a recording medium, a main magnetic pole layer deposited on the auxiliary magnetic pole layer with an insulating layer therebetween, a coil layer for applying a recording magnetic field to the auxiliary magnetic pole layer and the main magnetic pole layer, and a connecting layer placed on the auxiliary magnetic pole layer toward the back from the surface facing the recording medium. At the surface facing the recording medium, the upper base of the main magnetic pole layer is wider than the lower base so that the width in the track width direction of the main magnetic pole layer gradually increases with distance from the auxiliary magnetic pole layer. A method for making such a perpendicular magnetic recording head is also disclosed.

    摘要翻译: 垂直磁记录头包括在面向记录介质的表面上暴露的辅助磁极层,沉积在其上具有绝缘层的辅助磁极层上的主磁极层,用于向辅助磁极层施加记录磁场的线圈层 磁极层和主磁极层,以及从面向记录介质的表面朝向辅助磁极层的连接层。 在面对记录介质的表面上,主磁极层的上基底比下基底宽,使得主磁极层的磁道宽度方向上的宽度随着与辅助磁极层的距离而逐渐增加。 还公开了一种用于制造这种垂直磁记录头的方法。