公开(公告)号：US20050064609A1

公开(公告)日：2005-03-24

申请号：US10968895

申请日：2004-10-21

申请人： Hideki Nagaoka ,  Aya Morokata ,  Norikazu Sasaki ,  Kazushige Shimura ,  Kenetsu Mizusawa ,  Akira Obi ,  Masaaki Abe

发明人： Hideki Nagaoka ,  Aya Morokata ,  Norikazu Sasaki ,  Kazushige Shimura ,  Kenetsu Mizusawa ,  Akira Obi ,  Masaaki Abe

IPC分类号： G01F1/00 ,  G01F25/00 ,  H01L21/00 ,  B05C11/00

CPC分类号： H01L21/67253

摘要： A semiconductor processing system includes a processing chamber, a gas exhaust unit, a gas supply unit, a flow rate controller, a flow rate measuring unit for inspecting the flow rate controller, and a control unit for controlling the processing system. The flow rate measuring unit contains an inspection vessel, a pressure gauge, and a flow rate calculation unit, and the control unit is configured to purge the inspection vessel before or after flowing the processing gas into thereto. Further, an inspecting method of the flow rate controller in the semiconductor processing system includes the steps of flowing the processing gas to the inspection vessel, detecting an inner pressure of the inspection vessel, obtaining a gas flow rate of the flow rate controller, and performing a purge process on the inspection vessel.

摘要翻译： 半导体处理系统包括处理室，排气单元，气体供应单元，流量控制器，用于检查流量控制器的流量测量单元，以及用于控制处理系统的控制单元。 流量测量单元包括检查容器，压力计和流量计算单元，并且控制单元构造成在将处理气体流入其中之前或之后吹扫检查容器。 此外，半导体处理系统中的流量控制器的检查方法包括以下步骤：将处理气体流到检查容器，检测检查容器的内部压力，获得流量控制器的气体流量，以及执行 检查船上的吹扫过程。

公开(公告)号：US08025320B2

公开(公告)日：2011-09-27

申请号：US11826606

申请日：2007-07-17

申请人： Jiro Inoue ,  Aya Morokata

发明人： Jiro Inoue ,  Aya Morokata

IPC分类号： E05C3/06

CPC分类号： E05B85/26 ,  E05B81/20 ,  Y10S292/23 ,  Y10T292/1047 ,  Y10T292/1082 ,  Y10T292/243

摘要： A latch is disposed turnably on a side door and becomes in a state of engaging with a striker disposed on a vehicle body. A ratchet engages with the latch by an engaging operation, and releases the engaging state by a disengaging operation. An open lever performs a door opening operation by the opening operation of an operating handle. A lever member is in contact with the latch in the engaging state, and excessively oscillates the latch in the direction of a closing operation, by which the engaging state between the latch and the ratchet is released during the time from the opening operation of the operating handle to the disengaging operation of the ratchet.

摘要翻译： 闩锁可转动地设置在侧门上并变成与设置在车体上的撞针接合的状态。 棘轮通过接合操作与闩锁接合，并且通过分离操作释放接合状态。 打开的杠杆通过操作手柄的打开操作执行开门操作。 杠杆构件在接合状态下与闩锁接触，并且使闩锁在关闭操作的方向上过度地摆动，由此在操作的打开操作期间释放闩锁和棘轮之间的接合状态 处理棘轮的分离操作。

公开(公告)号：US20080088137A1

公开(公告)日：2008-04-17

申请号：US11826417

申请日：2007-07-16

申请人： Jiro Inoue ,  Aya Morokata

发明人： Jiro Inoue ,  Aya Morokata

IPC分类号： E05C19/00 ,  G06F17/00

CPC分类号： E05B81/20 ,  E05B81/86 ,  Y10S292/23 ,  Y10T292/1047 ,  Y10T292/1082 ,  Y10T292/243 ,  Y10T292/57

摘要： A latch mechanism holds a door body in a half-closed state or a fully-closed state with respect to a vehicle body. An open lever connected to an operating handle on the door body releases the half-closed state or the fully-closed state. A release assisting unit triggered by the opening operation of the operating handle assists the release of the half-closed state or the fully-closed state of the door body. A charging device charges a portion of a driving current supplied to a driving source of a lock mechanism between the operating handle and the latch mechanism, and supplies a charged driving current to the release assisting unit.

摘要翻译： 闩锁机构将门体相对于车身保持在半闭状态或完全关闭状态。 连接到门体上的操作手柄的打开杆释放半封闭状态或完全关闭状态。 由操作手柄的打开操作触发的释放辅助单元有助于门体的半封闭状态或完全关闭状态的释放。 充电装置对提供给操作手柄和闩锁机构之间的锁定机构的驱动源的驱动电流的一部分充电，并将充电的驱动电流提供给释放辅助单元。

公开(公告)号：US07735883B2

公开(公告)日：2010-06-15

申请号：US11826417

申请日：2007-07-16

申请人： Jiro Inoue ,  Aya Morokata

发明人： Jiro Inoue ,  Aya Morokata

IPC分类号： E05C9/00

CPC分类号： E05B81/20 ,  E05B81/86 ,  Y10S292/23 ,  Y10T292/1047 ,  Y10T292/1082 ,  Y10T292/243 ,  Y10T292/57

摘要： A latch mechanism holds a door body in a half-closed state or a fully-closed state with respect to a vehicle body. An open lever connected to an operating handle on the door body releases the half-closed state or the fully-closed state. A release assisting unit triggered by the opening operation of the operating handle assists the release of the half-closed state or the fully-closed state of the door body. A charging device charges a portion of a driving current supplied to a driving source of a lock mechanism between the operating handle and the latch mechanism, and supplies a charged driving current to the release assisting unit.

摘要翻译： 闩锁机构将门体相对于车身保持在半闭状态或完全关闭状态。 连接到门体上的操作手柄的打开杆释放半封闭状态或完全关闭状态。 由操作手柄的打开操作触发的释放辅助单元有助于门体的半封闭状态或完全关闭状态的释放。 充电装置对提供给操作手柄和闩锁机构之间的锁定机构的驱动源的驱动电流的一部分充电，并将充电的驱动电流提供给释放辅助单元。

公开(公告)号：US20080088138A1

公开(公告)日：2008-04-17

申请号：US11826606

申请日：2007-07-17

申请人： Jiro Inoue ,  Aya Morokata

发明人： Jiro Inoue ,  Aya Morokata

IPC分类号： E05C19/00 ,  G06F17/00

CPC分类号： E05B85/26 ,  E05B81/20 ,  Y10S292/23 ,  Y10T292/1047 ,  Y10T292/1082 ,  Y10T292/243

摘要： A latch is disposed turnably on a side door and becomes in a state of engaging with a striker disposed on a vehicle body. A ratchet engages with the latch by an engaging operation, and releases the engaging state by a disengaging operation. An open lever performs a door opening operation by the opening operation of an operating handle. A lever member is in contact with the latch in the engaging state, and excessively oscillates the latch in the direction of a closing operation, by which the engaging state between the latch and the ratchet is released during the time from the opening operation of the operating handle to the disengaging operation of the ratchet.

摘要翻译： 闩锁可转动地设置在侧门上并变成与设置在车体上的撞针接合的状态。 棘轮通过接合操作与闩锁接合，并且通过分离操作释放接合状态。 打开的杠杆通过操作手柄的打开操作执行开门操作。 杠杆构件在接合状态下与闩锁接触，并且使闩锁在关闭操作的方向上过度地摆动，由此在操作的打开操作期间释放闩锁和棘轮之间的接合状态 处理棘轮的分离操作。