摘要:
A semiconductor processing system includes a processing chamber, a gas exhaust unit, a gas supply unit, a flow rate controller, a flow rate measuring unit for inspecting the flow rate controller, and a control unit for controlling the processing system. The flow rate measuring unit contains an inspection vessel, a pressure gauge, and a flow rate calculation unit, and the control unit is configured to purge the inspection vessel before or after flowing the processing gas into thereto. Further, an inspecting method of the flow rate controller in the semiconductor processing system includes the steps of flowing the processing gas to the inspection vessel, detecting an inner pressure of the inspection vessel, obtaining a gas flow rate of the flow rate controller, and performing a purge process on the inspection vessel.
摘要:
A switch for a vehicle includes: a first operating member provided on a mounting surface of the vehicle, the first operating member being operable by tilting; and a plurality of projections provided on the first operating member, the projections being operable by pushing, wherein the first operating member is shaped line symmetrically so that a central part of the first operating member is dented most; and the projection projects forward with respect to the central part of the first operating member, and the projection is uplifted along an outer wall part of the first operating member.
摘要:
There is provided a display device including: an electrophoretic display element including, plural types of particles, each of the respective plural types of particles being charged with the same polarity, differing in optical properties, and differing in either in migration speed and/or electric field threshold value for moving, a translucent display-side electrode, a first back-side electrode, and a second back-side electrode; and a voltage control section that controls the voltages applied to the display-side electrode, the first back-side electrode, and the second back-side electrode, such that the types of particles having the fastest migration speed from the plural types of particles, or the types of particles having the lowest threshold value from the plural types of particles, are moved to the first back-side electrode or to the second back-side electrode, and then the particles that moved to the first back-side electrode are moved to the display-side electrode.
摘要:
An electromagnet device has a movable iron piece having an end that is operable to contact and separate to and from a magnetic pole portion of an iron core. The movable iron piece rotates based on magnetization and demagnetization of a coil wound around the iron core. A tapered surface is formed on at least one end of an attraction surface of the movable iron piece, which attracts to and separates from the magnetic pole portion of the iron core. At least one contacting portion that is in flush with and continuous to the attraction surface and in contact with the magnetic pole portion of the iron core is arranged in a projecting manner on the tapered surface.
摘要:
A laser scanning unit is provided which can use an inexpensive and easily manufactured fθ lens and which can further ensure good precision in adjustment. The laser scanning unit can repeatedly scan focused light onto a scan line, and includes a multi-beam light source for emitting parallel light, first and second cylindrical lenses for focusing the parallel light in a sub-scanning direction and a main scanning direction, respectively, a polygon mirror for deflecting the focused light in the main scanning direction, and an fθ lens for focusing the deflected light on the scan line.
摘要:
An intergrated mirror for automobiles through which the driver of an automobile can confirm the situation of vehicles in the rear and side rear with a light burden in the movement of eyes or the recognition of the rear image when the driver changes the lane, for example. The integrated mirror (16) comprises an inside mirror section (18) reflecting the view of the rear part of the inside of the vehicle, an outside mirror section (17) reflecting the view of the outside in the rear of the vehicle, a coupling member (21) for coupling the inside mirror section and the outside mirror section such that their mirror surface become parallel to each other, and an attaching member (22) provided in an intermediate portion of the coupling member and fixed rotatably to the upper end of a front pillar (15) or the like.
摘要:
A magnetically sensitive element is integrated with an operation controlling element by film-forming process or bonding of film-shaped bodies. The operation controlling element is formed as a single layer or multilayers and contains a permanent magnet or a magnetic circuit forming member. A pickup coil may also be integrated thereto. The magnetically sensitive element is a magnetic element in which a giant Barkhausen jump phenomenon appears.
摘要:
A light irradiator used as a laser annealing apparatus is provided which includes a controller (9) which controls a solid-state laser (4) to make pulse-on operation by detecting that the angle of rotation of a rotating shaft (7a) becomes +β after the rotating direction of the rotating shaft (7a) changes from clockwise to counterclockwise and then make pulse-off operation by detecting that the angle of rotation become −β, while controlling the solid-state laser (4) to make the pulse-on operation by detecting that the angle of rotation becomes −β after the rotating direction changes from counterclockwise to clockwise and then make the pulse-off operation by detecting that the angle of rotation becomes +β. Further, the controller (9) controls a moving stage (3) to move at a constant velocity in a constant-velocity moving direction, and move over a predetermined distance in a predetermined-distance moving direction after a to-be-annealed object (2) is irradiated with the light beam on a range from one end thereof to the other end in the constant-velocity moving direction, thereby irradiating the whole surface of the to-be-irradiated object (2) with a uniform energy.
摘要:
A semiconductor apparatus that can limit the shifting of a semiconductor device when it is sealed with a sealing resin and can prevent bonding wires from being exposed at the surface of the sealing resin, and that can provide improved resistance to moisture and prevent deterioration of performance and reliability, potting resin structures are affixed to bonding wire mounting faces of a plurality of inner leads before they are sealed by a sealing resin, so that the tops of the potting resin structures are higher than the positions at which the bonding wires are mounted. With this arrangement, the shifting of the semiconductor device is halted by the potting resin structures, the bonding wires are not exposed at the surface of the sealing resin, and the potting resin structures and the sealing resin are closely attached, so that resistance to moisture is improved.
摘要:
A semiconductor chip package is produced using a lead frame which has an island where a plurality of through holes are formed corresponding to the electrodes of the semiconductor chip, respectively. After an insulating film is formed on the island, the semiconductor chip is fixed to one side of the island through an adhesive layer while aligning the electrodes of the semiconductor chip with the through holes of the island portion, respectively. After sealing the semiconductor chip with sealing resin, solder balls are formed on the other side of the island portion, the solder balls are connected to the electrodes of the semiconductor chip through the through holes of the island portion, respectively.