摘要:
A transfer robot (5) for thin substrate capable of efficiently detecting the stored state of thin substrates and an inspection method for thin substrate capable of accurately detecting the stored state of thin substrates; the robot (5), comprising an inspection camera (1) for detecting the stored state of the thin substrates (3) in a storage cassette (2), wherein the plurality of thin substrates (3) stored in the storage cassette (2) are carried out from the storage cassette (2) by the robot.
摘要:
The present invention provides a cable processor capable of supplying cables to a plurality of hands attached to a forward end portion of an arm without increasing the size of a joint portion of a robot and further without causing a problem of the breaking of wire at the time of operating the robot. There is provided a cable processor of a robot for accommodating a cable such as an air pipe or electric wire inside an arm of the robot, and the cable processor comprises: a casing portion (20) for accommodating the cable (21), arranged in a joint drive portion of the robot, wherein the casing portion (21) is provided with rollers (23), which are arranged on an inner wall of the casing portion (21), rotating round a drive shaft of the joint portion.
摘要:
A gear unit includes an inner shaft and an outer shaft concentrically arranged to make up two concentric output shafts; and a first and a second input shaft extending in a direction orthogonal to the output shafts and operatively connected to the inner shaft and the outer shaft, respectively. The inner shaft includes an inner gear attached thereto and the outer shaft includes an outer gear attached thereto. The inner gear and the outer gear are arranged in a mutually-opposing relationship. The first input shaft and the second input shaft are spaced apart from each other by a specified distance along an axial direction of the output shafts. The first input shaft includes a first input gear meshing with the inner gear and the second input shaft includes a second input gear meshing with the outer gear.
摘要:
A hand 1 is constituted by a hand base 4 serving as a base portion, a rocking hand 3 disposed to be superposed on the hand base 4 and serving to support a substrate 2, and a rocking mechanism 5 provided between the hand base 4 and the rocking hand 3 and serving to support the rocking hand 3 to be tiltable and movable in parallel with respect to the hand base 4.
摘要:
A transfer robot (5) for thin substrate capable of efficiently detecting the stored state of thin substrates and an inspection method for thin substrate capable of accurately detecting the stored state of thin substrates; the robot (5), comprising an inspection camera (1) for detecting the stored state of the thin substrates (3) in a storage cassette (2), wherein the plurality of thin substrates (3) stored in the storage cassette (2) are carried out from the storage cassette (2) by the robot.
摘要:
A transfer robot (5) for thin substrate capable of efficiently detecting the stored state of thin substrates and an inspection method for thin substrate capable of accurately detecting the stored state of thin substrates; the robot (5), comprising an inspection camera (1) for detecting the stored state of the thin substrates (3) in a storage cassette (2), wherein the plurality of thin substrates (3) stored in the storage cassette (2) are carried out from the storage cassette (2) by the robot.