公开(公告)号：US20090000372A1

公开(公告)日：2009-01-01

申请号：US11814308

申请日：2006-02-20

申请人： Masahiro Matsumoto ,  Hiroshi Nakano ,  Masamichi Yamada ,  Keiji Hanzawa ,  Izumi Watanabe ,  Keiichi Nakada ,  Yasuhiro Kanamaru

发明人： Masahiro Matsumoto ,  Hiroshi Nakano ,  Masamichi Yamada ,  Keiji Hanzawa ,  Izumi Watanabe ,  Keiichi Nakada ,  Yasuhiro Kanamaru

IPC分类号： G01F1/69

CPC分类号： G01F15/006 ,  G01F1/6845 ,  G01F1/692

摘要： Conventional thermal flow measurement devices lack consideration for automobiles in severe environments. A detection element of the thermal flow measurement device according to the present invention is structured by the provision of a planar substrate made of a material having good thermal conductivity, such as silicon or ceramic, with a thin-walled portion (diaphragm). On the surface of the thin-walled portion, the detection element comprises a heat element as a heater heated to a temperature being different to a predetermined extent from the temperature of the air flow to be measured, temperature-detecting resistors as temperature-detecting means on both sides of the heat element, wiring portions formed of electrical conductors that draw signal lines from the heat element and the temperature-detecting resistors and that have a melting point of 2000° C. or higher, and pads.

摘要翻译： 传统的热流测量装置在恶劣环境中缺乏汽车的考虑。 根据本发明的热流测量装置的检测元件通过提供由具有良好导热性的材料（例如硅或陶瓷）制成的具有薄壁部分（隔膜）的平面基板构成。 在薄壁部分的表面上，检测元件包括作为加热器的加热元件加热到与待测量的空气流的温度不同的温度，作为温度检测装置的温度检测电阻器 在加热元件的两侧，由从导热元件和温度检测电阻器吸引信号线并且具有2000℃或更高熔点的电导体形成的布线部分和焊盘。

公开(公告)号：US20070125169A1

公开(公告)日：2007-06-07

申请号：US10580112

申请日：2003-11-20

申请人： Hiroshi Nakano ,  Masamichi Yamada ,  Masahiro Matsumoto ,  Izumi Watanabe ,  Keiji Hanzawa ,  Keiichi Nakada

发明人： Hiroshi Nakano ,  Masamichi Yamada ,  Masahiro Matsumoto ,  Izumi Watanabe ,  Keiji Hanzawa ,  Keiichi Nakada

IPC分类号： G01F1/68

CPC分类号： G01F1/6965 ,  G01F1/6845

摘要： A thermal air flowmeter having excellent temperature characteristics and improved measurement accuracy. The thermal air flowmeter comprises a temperature sensor disposed in a casing of the air flowmeter, a computing unit for correcting a flow rate detection voltage from a measuring element by using the temperature sensor, and heating temperature control means disposed in a temperature control circuit for performing temperature control of a heating resistor to vary a temperature rise of the heating resistor relative to an air temperature depending on the air temperature. Flow rate detection errors of the thermal air flowmeter caused by an overall temperature change and a temperature change on an intake passage wall surface can be corrected simultaneously and a thermal air flowmeter having superior measurement accuracy can be realized.

摘要翻译： 具有优异的温度特性和改进的测量精度的热空气流量计。 热空气流量计包括设置在空气流量计的壳体中的温度传感器，用于通过使用温度传感器校正来自测量元件的流量检测电压的计算单元，以及设置在温度控制电路中的加热温度控制装置，用于执行 加热电阻器的温度控制以根据空气温度改变加热电阻器相对于空气温度的温度升高。 可以同时校正由总体温度变化和进气通道壁面上的温度变化引起的热空气流量计的流量检测误差，并且可以实现具有优异的测量精度的热空气流量计。

公开(公告)号：US07225669B2

公开(公告)日：2007-06-05

申请号：US11283778

申请日：2005-11-22

申请人： Masahiro Matsumoto ,  Masamichi Yamada ,  Hiroshi Nakano ,  Izumi Watanabe ,  Keiji Hanzawa ,  Keiichi Nakada

发明人： Masahiro Matsumoto ,  Masamichi Yamada ,  Hiroshi Nakano ,  Izumi Watanabe ,  Keiji Hanzawa ,  Keiichi Nakada

IPC分类号： G01F1/68

CPC分类号： G01F1/6845 ,  F02D41/187 ,  G01F1/692 ,  G01F1/696 ,  G01F1/699

摘要： A heating resistance flow rate measuring apparatus which can use a power source of an ECU in an automobile without requiring an expensive protective circuit and regulator. Heating of temperature detecting resistors themselves causes temperature changes on the windward and leeward sides, and these temperature changes depend on the amounts of heat generated by the temperature detecting resistors. The amounts of heat generated by the temperature detecting resistors depend on a voltage value of the ECU power source applied to the temperature detecting resistors, and an error is caused in a sensor output depending on a variation in the voltage of the ECU power source. Based on the finding that suppressing the amount of heat generated by the temperature detecting resistors is effective in avoiding the sensor output error caused depending on a variation in the output voltage of the ECU power source, means for suppressing the amount of heat generated by the temperature detecting resistors is disposed.

摘要翻译： 一种能够在汽车中使用ECU的电源而不需要昂贵的保护电路和调节器的加热电阻流量测量装置。 温度检测电阻本身的加热引起迎风侧风和背风侧的温度变化，这些温度变化取决于温度检测电阻产生的热量。 由温度检测电阻器产生的热量取决于施加到温度检测电阻器的ECU电源的电压值，并且根据ECU电源的电压变化在传感器输出中引起误差。 基于这样的发现，抑制由温度检测电阻产生的热量对于避免根据ECU电源的输出电压的变化而导致的传感器输出误差是有效的，用于抑制由温度产生的热量的装置 设置检测电阻器。

公开(公告)号：US06973826B2

公开(公告)日：2005-12-13

申请号：US11052754

申请日：2005-02-09

申请人： Masahiro Matsumoto ,  Masamichi Yamada ,  Hiroshi Nakano ,  Izumi Watanabe ,  Keiji Hanzawa ,  Keiichi Nakada

发明人： Masahiro Matsumoto ,  Masamichi Yamada ,  Hiroshi Nakano ,  Izumi Watanabe ,  Keiji Hanzawa ,  Keiichi Nakada

IPC分类号： G01F1/698 ,  F02D41/18 ,  G01F1/68 ,  G01F1/684 ,  G01F1/692 ,  G01F1/696 ,  G01F1/699

CPC分类号： G01F1/6845 ,  F02D41/187 ,  G01F1/692 ,  G01F1/696 ,  G01F1/699

摘要： A heating resistance flow rate measuring apparatus which can use a power source of an ECU in an automobile without requiring an expensive protective circuit and regulator. Heating of temperature detecting resistors themselves causes temperature changes on the windward and leeward sides, and these temperature changes depend on the amounts of heat generated by the temperature detecting resistors. The amounts of heat generated by the temperature detecting resistors depend on a voltage value of the ECU power source applied to the temperature detecting resistors, and an error is caused in a sensor output depending on a variation in the voltage of the ECU power source. Based on the finding that suppressing the amount of heat generated by the temperature detecting resistors is effective in avoiding the sensor output error caused depending on a variation in the output voltage of the ECU power source, means for suppressing the amount of heat generated by the temperature detecting resistors is disposed.

摘要翻译： 一种能够在汽车中使用ECU的电源而不需要昂贵的保护电路和调节器的加热电阻流量测量装置。 温度检测电阻本身的加热引起迎风侧风和背风侧的温度变化，这些温度变化取决于温度检测电阻产生的热量。 由温度检测电阻器产生的热量取决于施加到温度检测电阻器的ECU电源的电压值，并且根据ECU电源的电压变化在传感器输出中引起误差。 基于这样的发现，抑制由温度检测电阻产生的热量对于避免根据ECU电源的输出电压的变化而导致的传感器输出误差是有效的，用于抑制由温度产生的热量的装置 设置检测电阻器。

公开(公告)号：US07337661B2

公开(公告)日：2008-03-04

申请号：US11352212

申请日：2006-02-13

申请人： Masamichi Yamada ,  Masahiro Matsumoto ,  Hiroshi Nakano ,  Izumi Watanabe ,  Keiichi Nakada

发明人： Masamichi Yamada ,  Masahiro Matsumoto ,  Hiroshi Nakano ,  Izumi Watanabe ,  Keiichi Nakada

IPC分类号： G01F1/68

CPC分类号： G01F1/692 ,  G01F1/698

摘要： A low-cost thermal flow meter that has good temperature characteristics and little variations. The thermal flow meter includes a sensor element including a heat-generating resistor and at least two temperature-measuring resistors disposed downstream and upstream. The sensor element is positioned in the flow of a measured medium. It also includes an adjusting means for adjusting a excess temperature (ΔTh=Th−Ta) of the heat-generating resistor, which is the difference between the temperature (Ta) of the measured medium and the temperature (Th) of the heat-generating resistor. The adjusting means adjusts the excess temperature (ΔTh) of the heat-generating resistor depending on the temperature of the measured medium such that the excess temperature becomes smaller as the temperature of the measured medium increases.

摘要翻译： 一种低成本的热流量计，具有良好的温度特性和较小的变化。 热流量计包括传感器元件，其包括发热电阻器和设置在下游和上游的至少两个温度测量电阻器。 传感器元件位于测量介质的流动中。 还包括用于调节发热电阻器的过温度（DeltaTh = Th-Ta）的调节装置，其是测量介质的温度（Ta）与发热量的测量温度（Th）之差 电阻。 调节装置根据测量介质的温度来调节发热电阻器的过温度（DeltaTh），使得过量温度随着测量介质温度的升高而变小。

公开(公告)号：US20060220662A1

公开(公告)日：2006-10-05

申请号：US11353937

申请日：2006-02-15

申请人： Hiroshi Nakano ,  Masahiro Matsumoto ,  Masamichi Yamada ,  Keiichi Nakada ,  Izumi Watanabe

发明人： Hiroshi Nakano ,  Masahiro Matsumoto ,  Masamichi Yamada ,  Keiichi Nakada ,  Izumi Watanabe

IPC分类号： G01R27/08

CPC分类号： G01C9/00 ,  G01F1/6845 ,  G01F1/69 ,  G01P15/008

摘要： A highly accurate physical quantity sensor which can ensure reliability in strength and reduce resistance changes caused by stresses. Assuming, with respect to stress σ imposed on a substrate in a predetermined direction (e.g., direction in which maximum stress is imposed), a parallel direction to be a horizontal direction and a perpendicular direction to be a vertical direction, each of resistors of the sensor has a horizontal resistance component Rl and a vertical resistance component Rt. When a ratio of a piezoresistance coefficient πl of the horizontal resistance component Rl, which is provided when the stress imposed on the substrate is applied to the horizontal resistance component Rl, to a piezoresistance coefficient πt of the vertical resistance component Rt, which is provided when the stress is applied to the vertical resistance component Rt, is πl:πt=−n:1 (n:integer), a resistance value ratio of the vertical resistance component Rt to the horizontal resistance component Rl is set substantially equal to the ratio of the piezoresistance coefficient πl to πt.

公开(公告)号：US20060207320A1

公开(公告)日：2006-09-21

申请号：US11352212

申请日：2006-02-13

申请人： Masamichi Yamada ,  Masahiro Matsumoto ,  Hiroshi Nakano ,  Izumi Watanabe ,  Keiichi Nakada

发明人： Masamichi Yamada ,  Masahiro Matsumoto ,  Hiroshi Nakano ,  Izumi Watanabe ,  Keiichi Nakada

IPC分类号： G01F1/68

CPC分类号： G01F1/692 ,  G01F1/698

摘要： A low-cost thermal flow meter that has good temperature characteristics and little variations. The thermal flow meter includes a sensor element including a heat-generating resistor and at least two temperature-measuring resistors disposed downstream and upstream. The sensor element is positioned in the flow of a measured medium. It also includes an adjusting means for adjusting a excess temperature (ΔTh=Th−Ta) of the heat-generating resistor, which is the difference between the temperature (Ta) of the measured medium and the temperature (Th) of the heat-generating resistor. The adjusting means adjusts the excess temperature (ΔTh) of the heat-generating resistor depending on the temperature of the measured medium such that the excess temperature becomes smaller as the temperature of the measured medium increases.

摘要翻译： 一种低成本的热流量计，具有良好的温度特性和较小的变化。 热流量计包括传感器元件，其包括发热电阻器和设置在下游和上游的至少两个温度测量电阻器。 传感器元件位于测量介质的流动中。 它还包括调节装置，用于调节发热电阻器的过热温度（DeltaTh = Th-Ta），该温度是测量介质的温度（Ta）与发热量之间的温度（Th）之差 电阻。 调节装置根据测量介质的温度来调节发热电阻器的过温度（DeltaTh），使得过量温度随着测量介质温度的升高而变小。

公开(公告)号：US07555944B2

公开(公告)日：2009-07-07

申请号：US11353937

申请日：2006-02-15

申请人： Hiroshi Nakano ,  Masahiro Matsumoto ,  Masamichi Yamada ,  Keiichi Nakada ,  Izumi Watanabe

发明人： Hiroshi Nakano ,  Masahiro Matsumoto ,  Masamichi Yamada ,  Keiichi Nakada ,  Izumi Watanabe

IPC分类号： G01F1/68

CPC分类号： G01C9/00 ,  G01F1/6845 ,  G01F1/69 ,  G01P15/008

摘要： A highly accurate physical quantity sensor which can ensure reliability in strength and reduce resistance changes caused by stresses. Assuming, with respect to stress σ imposed on a substrate in a predetermined direction (e.g., direction in which maximum stress is imposed), a parallel direction to be a horizontal direction and a perpendicular direction to be a vertical direction, each of resistors of the sensor has a horizontal resistance component Rl and a vertical resistance component Rt. When a ratio of a piezoresistance coefficient πl of the horizontal resistance component Rl, which is provided when the stress imposed on the substrate is applied to the horizontal resistance component Rl, to a piezoresistance coefficient πt of the vertical resistance component Rt, which is provided when the stress is applied to the vertical resistance component Rt, is πl:πt=−n:1 (n:integer), a resistance value ratio of the vertical resistance component Rt to the horizontal resistance component Rl is set substantially equal to the ratio of the piezoresistance coefficient πl to πt.

摘要翻译： 一种高精度的物理量传感器，可以确保强度的可靠性，并减少由应力引起的阻力变化。 假设相对于在预定方向（例如，施加最大应力的方向）施加在基板上的应力σ，作为水平方向的平行方向和垂直方向的垂直方向，每个电阻器 传感器具有水平电阻分量R1和垂直电阻分量Rt。 当将施加在基板上的应力所提供的水平电阻分量R1的压阻系数pil与施加到水平电阻分量R1的比率相加到垂直电阻分量Rt的压阻系数凹坑时， 应力被施加到垂直电阻分量Rt，即pil：pit = -n：1（n：整数），垂直电阻分量Rt与水平电阻分量R1的电阻值比基本上等于 压阻系数pil到坑。

公开(公告)号：US20060070436A1

公开(公告)日：2006-04-06

申请号：US11283778

申请日：2005-11-22

申请人： Masahiro Matsumoto ,  Masamichi Yamada ,  Hiroshi Nakano ,  Izumi Watanabe ,  Keiji Hanzawa ,  Keiichi Nakada

发明人： Masahiro Matsumoto ,  Masamichi Yamada ,  Hiroshi Nakano ,  Izumi Watanabe ,  Keiji Hanzawa ,  Keiichi Nakada

IPC分类号： G01F1/68

CPC分类号： G01F1/6845 ,  F02D41/187 ,  G01F1/692 ,  G01F1/696 ,  G01F1/699

摘要： A heating resistance flow rate measuring apparatus which can use a power source of an ECU in an automobile without requiring an expensive protective circuit and regulator. Heating of temperature detecting resistors themselves causes temperature changes on the windward and leeward sides, and these temperature changes depend on the amounts of heat generated by the temperature detecting resistors. The amounts of heat generated by the temperature detecting resistors depend on a voltage value of the ECU power source applied to the temperature detecting resistors, and an error is caused in a sensor output depending on a variation in the voltage of the ECU power source. Based on the finding that suppressing the amount of heat generated by the temperature detecting resistors is effective in avoiding the sensor output error caused depending on a variation in the output voltage of the ECU power source, means for suppressing the amount of heat generated by the temperature detecting resistors is disposed.

摘要翻译： 一种能够在汽车中使用ECU的电源而不需要昂贵的保护电路和调节器的加热电阻流量测量装置。 温度检测电阻本身的加热引起迎风侧风和背风侧的温度变化，这些温度变化取决于温度检测电阻产生的热量。 由温度检测电阻器产生的热量取决于施加到温度检测电阻器的ECU电源的电压值，并且根据ECU电源的电压变化在传感器输出中引起误差。 基于这样的发现，抑制由温度检测电阻产生的热量对于避免根据ECU电源的输出电压的变化而导致的传感器输出误差是有效的，用于抑制由温度产生的热量的装置 设置检测电阻器。

公开(公告)号：US07721599B2

公开(公告)日：2010-05-25

申请号：US11814308

申请日：2006-02-20

申请人： Masahiro Matsumoto ,  Hiroshi Nakano ,  Masamichi Yamada ,  Keiji Hanzawa ,  Izumi Watanabe ,  Keiichi Nakada ,  Yasuhiro Kanamaru

发明人： Masahiro Matsumoto ,  Hiroshi Nakano ,  Masamichi Yamada ,  Keiji Hanzawa ,  Izumi Watanabe ,  Keiichi Nakada ,  Yasuhiro Kanamaru

IPC分类号： G01F1/68

CPC分类号： G01F15/006 ,  G01F1/6845 ,  G01F1/692

摘要： Conventional thermal flow measurement devices lack consideration for automobiles in severe environments. A detection element of the thermal flow measurement device according to the present invention is structured by the provision of a planar substrate made of a material having good thermal conductivity, such as silicon or ceramic, with a thin-walled portion (diaphragm). On the surface of the thin-walled portion, the detection element comprises a heat element as a heater heated to a temperature being different to a predetermined extent from the temperature of the air flow to be measured, temperature-detecting resistors as temperature-detecting means on both sides of the heat element, wiring portions formed of electrical conductors that draw signal lines from the heat element and the temperature-detecting resistors and that have a melting point of 2000° C. or higher, and pads.

摘要翻译： 传统的热流测量装置在恶劣环境中缺乏汽车的考虑。 根据本发明的热流测量装置的检测元件通过提供由具有良好导热性的材料（例如硅或陶瓷）制成的具有薄壁部分（隔膜）的平面基板构成。 在薄壁部分的表面上，检测元件包括作为加热器的加热元件加热到与待测量的空气流的温度不同的温度，作为温度检测装置的温度检测电阻器 在加热元件的两侧，由从导热元件和温度检测电阻器吸引信号线并且具有2000℃或更高熔点的电导体形成的布线部分和焊盘。