公开(公告)号：US20060086185A1

公开(公告)日：2006-04-27

申请号：US11105586

申请日：2005-04-14

申请人： Hiroshi Tanaka ,  Hiroshi Ishikawa ,  Kenji Nagata ,  Masaaki Ono ,  Tsutomu Miyashita ,  Sumio Yamada ,  Nobuko Ono

发明人： Hiroshi Tanaka ,  Hiroshi Ishikawa ,  Kenji Nagata ,  Masaaki Ono ,  Tsutomu Miyashita ,  Sumio Yamada ,  Nobuko Ono

IPC分类号： G01P15/125 ,  G01P15/00

CPC分类号： B81B7/0048 ,  B81B3/0072 ,  B81B2201/0235 ,  G01D11/30 ,  G01P1/023 ,  G01P15/0802 ,  G01P15/123 ,  G01P15/18 ,  G01P2015/0842

摘要： An acceleration sensor with reduced noise that resolves the problem of stress arising from a difference in thermal expansion coefficients is provided. The acceleration sensor detects acceleration in three-axis directions in a three-dimensional coordinate system, and includes a frame having four sides that is integrally formed by a semiconductor substrate; a weight portion that is positioned within the frame; and four beam portions, corresponding with each of the four sides, one end of which is connected to the weight portion to support the weight portion and the other end of which is connected to the center of the corresponding side of the four sides, wherein a detection element that detects flexure of the beam portions that corresponds to the acceleration acting on the weight portion is formed on each of the four beam portions; a pair of joint portions that are formed with a gap there between are formed on each of the four sides of the frame; and the gap between the pair of joint portions formed on one side has a predetermined length with the center of the one side as the point of symmetry.

摘要翻译： 提供了一种降低噪声的加速度传感器，其解决了由热膨胀系数差引起的应力问题。 加速度传感器在三维坐标系中检测三轴方向的加速度，并且包括具有由半导体基板一体形成的四个侧面的框架; 位于框架内的重物部分; 以及四个梁部分，其对应于四个侧面中的每一个，其一端连接到配重部分，以支撑重物部分，另一端连接到四个侧面的相应侧部的中心，其中， 在所述四个梁部分中的每一个上形成检测对应于作用在所述配重部分上的加速度的梁部分的挠曲的检测元件; 在框架的四个侧面上形成有形成有间隙的一对接合部， 在一侧形成的一对接合部之间的间隙以一侧的中心为对称点，具有规定的长度。

公开(公告)号：US20060130584A1

公开(公告)日：2006-06-22

申请号：US11227202

申请日：2005-09-16

申请人： Masaaki Ono ,  Nobuko Ono ,  Hiroshi Ishikawa ,  Hiroshi Tanaka ,  Sumio Yamada

发明人： Masaaki Ono ,  Nobuko Ono ,  Hiroshi Ishikawa ,  Hiroshi Tanaka ,  Sumio Yamada

IPC分类号： G01P15/00

CPC分类号： G01P15/18 ,  G01P1/023 ,  G01P15/123 ,  G01P2015/084 ,  H01L2224/45144 ,  H01L2224/48091 ,  H01L2224/48465 ,  H01L2924/00014 ,  H01L2924/00

摘要： A structure with superior shock resistance is proposed for a parasol-type acceleration sensor. The acceleration sensor comprises a support portion the lower end of which is fixed to a substrate; a beam portion on which a detection element for applying changes to an output signal in correspondence with strain caused by acceleration acting on the detection element is formed, one end of the beam portion being connected to the top part of the support portion; a suspended weight connected to the other end of the beam portion; and a stopper substrate with a window portion through which, in order to guide an output signal of the detection element via a pad that is formed on the upper end face of the support portion, a conductor lead that is connected to the pad passes. Overswing of the weight is limited by means of the stopper substrate.

摘要翻译： 提出了一种具有优异抗冲击性的结构，用于遮阳式加速度传感器。 加速度传感器包括其下端固定到基板的支撑部分; 一个梁部分，其上形成有用于施加的检测元件对应于由作用在检测元件上的加速度引起的应变而变化的输出信号，梁部分的一端连接到支撑部分的顶部; 连接到所述梁部分的另一端的悬挂重物; 以及具有窗口部分的止动基板，为了通过形成在支撑部分的上端面上的焊盘引导检测元件的输出信号，与焊盘连接的导体引线通过。 通过止动器基板限制重量的超越。

公开(公告)号：US20060016261A1

公开(公告)日：2006-01-26

申请号：US11185020

申请日：2005-07-20

申请人： Hiroshi Tanaka ,  Masanori Yachi ,  Masaaki Ono ,  Nobuko Ono

发明人： Hiroshi Tanaka ,  Masanori Yachi ,  Masaaki Ono ,  Nobuko Ono

IPC分类号： G01P15/08

CPC分类号： G01C19/5607

摘要： An angular velocity sensor is manufactured by simple method and has reduced size and height, and includesa base portion formed by piezoelectric single crystal and having length in the Y-axis direction and thickness in Z-axis direction; and four beams each having length in Y-axis direction vertical to the X- and Z-axis directions that are arranged side by side in X-axis direction and formed by piezoelectric single crystal integrally with the base portion, wherein four beams are grouped in two pairs with one in each pair used as drive beam and the other a counterbalance, the drive beams are provided with drive electrodes adapted to oscillate the beams in the X-axis direction and Y-axis sensing electrodes adapted to detect the rotation angle applied around the Y-axis, and the other beams serving as counterbalances are provided with X-axis sensing electrodes adapted to detect the rotation angle applied around the X-axis.

摘要翻译： 角速度传感器通过简单的方法制造并具有减小的尺寸和高度，并且包括由压电单晶形成并且在Y轴方向上的长度和Z轴方向上的厚度的基部; 并且在X轴方向上并排设置并且与基部一体地形成压电单晶的四个沿Y轴方向的长度在X轴方向和Z轴方向上的四个光束，其中四个光束被分组在 两对，每对中使用一对作为驱动光束，另一对用作平衡物，驱动光束设置有适于在X轴方向上振荡光束的驱动电极，以及适于检测施加在周围的旋转角度的Y轴感测电极 Y轴和用作平衡的其他光束设置有用于检测围绕X轴施加的旋转角度的X轴感测电极。