COATING STRUCTURE AND SURFACE PROCESSING METHOD
    5.
    发明申请
    COATING STRUCTURE AND SURFACE PROCESSING METHOD 审中-公开
    涂层结构与表面处理方法

    公开(公告)号:US20110020655A1

    公开(公告)日:2011-01-27

    申请号:US12933577

    申请日:2009-03-18

    IPC分类号: C23C4/10 B32B18/00 B32B9/00

    摘要: A high temperature component (2) has an intermediate layer (3) formed by a spraying on a surface in part thereof and comprised of an oxide ceramics set containing a glass, and an environment resistant coat (4) formed on a surface of the intermediate layer (3) and comprised of a coating material having a heat resistance and a water vapor wall-thinning resistance. The oxide ceramics set is a set of kinds of oxide ceramics adapted to be unchanged in crystalline phase, or isometric in cubic volume even when phase-changed, within a temperature range from a room temperature to 1,400 degrees C., the set of kinds of oxide ceramics having a coefficient of thermal expansion between a coefficient of thermal expansion of an SiC series ceramics matrix composite constituting the high temperature component (2) and a coefficient of thermal expansion of the coating material constituting the environment resistant coat (4).

    摘要翻译: 高温部件(2)具有中间层(3),该中间层(3)通过喷涂在其表面上而形成,并且由含有玻璃的氧化物陶瓷组构成,并且在中间层 层(3),并且由具有耐热性和耐水蒸气壁变薄性的涂层材料构成。 氧化物陶瓷组是一组氧化物陶瓷,其在结晶相中不变,或即使相变,也可以在室温至1400℃的温度范围内立方体积的等轴立方体。 构成高温成分(2)的SiC系陶瓷基复合体的热膨胀系数与构成耐环境涂层(4)的涂料的热膨胀系数的热膨胀系数的氧化物陶瓷。

    RACK AND PINION MECHANISM, VACUUM PROCESSING APPARATUS, METHOD OF DRIVING AND CONTROLLING RACK AND PINION MECHANISM, DRIVE CONTROL PROGRAM, AND RECORDING MEDIUM
    8.
    发明申请
    RACK AND PINION MECHANISM, VACUUM PROCESSING APPARATUS, METHOD OF DRIVING AND CONTROLLING RACK AND PINION MECHANISM, DRIVE CONTROL PROGRAM, AND RECORDING MEDIUM 审中-公开
    机架和机构机构,真空加工设备,驱动和控制机架和机构的方法,驱动控制程序和记录介质

    公开(公告)号:US20110253953A1

    公开(公告)日:2011-10-20

    申请号:US13133228

    申请日:2009-12-09

    申请人: Yasutomo Tanaka

    发明人: Yasutomo Tanaka

    IPC分类号: B66F3/02 F16H35/06

    摘要: The present invention provides a rack and pinion mechanism which avoids collision between respective tooth tops of a rack gear and a pinion gear due to a phase shift between the rack gear and the pinion gear with a simple mechanism and meshes the rack gear and the pinion gear smoothly.The rack and pinion mechanism includes a rack gear 16 fixed to a stage 20 moving on a carrying track 7 while loading a carried object thereon and a plurality of pinion gears 17 connected to a drive source 13. At least two of the pinion gears are synchronized and rotate to mesh with the rack gear in sequence, whereby the rack gear is delivered from the pinion gear in the current process to the pinion gear in the subsequent process, so that the stage is carried. The rack and pinion mechanism includes detection means that detects a phase difference of the pinion gear and a controller 25 which has a storage part 27, storing the detected phase difference, and controls the phase difference of the pinion gear in the subsequent process based on the phase difference of the pinion gear in the current process.

    摘要翻译: 本发明提供了一种齿条齿轮机构,其以简单的机构避免齿条和小齿轮的各个齿顶之间的碰撞,由齿条和小齿轮之间的相移,并啮合齿条和小齿轮 顺利。 齿条齿轮机构包括固定到载物轨道7上的载物轨道7上固定的载物架齿轮16,以及连接到驱动源13上的多个小齿轮17。至少两个小齿轮是同步的 并依次旋转以与齿条啮合,由此在随后的过程中,齿轮在当前过程中从小齿轮传递到小齿轮,从而承载载物台。 齿条齿轮机构包括检测小齿轮的相位差的检测装置和具有存储检测出的相位差的存储部27的控制器25,并且在后续处理中基于小齿轮的相位差来控制小齿轮的相位差 当前工艺中小齿轮的相位差。