Inspection Device and Inspection Method
    1.
    发明申请
    Inspection Device and Inspection Method 有权
    检验装置及检验方法

    公开(公告)号:US20140225606A1

    公开(公告)日:2014-08-14

    申请号:US14177965

    申请日:2014-02-11

    Applicant: Hitachi, Ltd.

    Abstract: Provided are an inspection device and an inspection method capable of achieving improved magnetic field sensitivity by using a magnetic thin film of a small film thickness. A light-emitting unit 1 emits light of a first wavelength for acquiring magnetic field inspection information and a second wavelength for acquiring inspection object surface information. A selection unit 6 selects information from an inspection object 4 and information from a magnetophotonic crystal film 3 acquired by light irradiation performed by an irradiation unit 2. An image generation unit 9 generates image data based on the magnetic field inspection information acquired with the first wavelength and the inspection object surface information acquired with the second wavelength selected by the selection unit. Each of the generated image data is displayed on a display unit 10.

    Abstract translation: 提供能够通过使用薄膜厚度的磁性薄膜来实现提高的磁场灵敏度的检查装置和检查方法。 发光单元1发射用于获取磁场检查信息的第一波长的光和用于获取检查对象表面信息的第二波长。 选择单元6从检查对象4中选择信息和通过照射单元2进行的光照射而获得的来自磁光子晶体膜3的信息。图像生成单元9基于以第一波长获取的磁场检查信息来生成图像数据 以及由选择单元选择的用第二波长获取的检查对象面信息。 所生成的图像数据中的每一个显示在显示单元10上。

    DEFECT INSPECTION DEVICE AND DEFECT INSPECTION METHOD

    公开(公告)号:US20170328864A1

    公开(公告)日:2017-11-16

    申请号:US15528013

    申请日:2014-11-28

    Applicant: HITACHI, LTD.

    CPC classification number: G01N27/9046 G01N27/83

    Abstract: A defect inspection device configured to measure a surface shape of an inspection target using light applied to the inspection target via a spatial light phase modulator based on an interference state of reflected light from the inspection target obtained via the spatial light phase modulator, to measure magnetic field distribution of a surface of the inspection target magnetized by an excitation device for magnetizing the inspection target using light applied to the inspection target via the spatial light phase modulator based on an interference state of reflected light from the inspection target obtained via the spatial light phase modulator, and to separate data of a magnetic field specific portion which exists on the surface of the inspection target from magnetic field distribution data which is a measurement result of magnetic field distribution of the inspection target based on surface shape data which is a measurement result of the surface shape of the inspection target, to suppress deterioration of measurement accuracy of magnetic field distribution generated by the surface shape of the inspection target and to improve defect detection accuracy.

    X-RAY ENERGY SPECTRUM MEASUREMENT METHOD, X-RAY ENERGY SPECTRUM MEASUREMENT APPARATUS, AND X-RAY CT APPARATUS
    4.
    发明申请
    X-RAY ENERGY SPECTRUM MEASUREMENT METHOD, X-RAY ENERGY SPECTRUM MEASUREMENT APPARATUS, AND X-RAY CT APPARATUS 有权
    X射线能量光谱测量方法,X射线能量谱测量装置和X射线CT装置

    公开(公告)号:US20150301202A1

    公开(公告)日:2015-10-22

    申请号:US14687948

    申请日:2015-04-16

    Applicant: Hitachi, Ltd.

    CPC classification number: G01T1/36 A61B6/032 A61B6/482 A61B6/583 G01N23/046

    Abstract: Provided is an X-ray energy spectrum estimation method capable of reproducing, with high precision, information on an attenuation path to which an X-ray is irradiated, and performing, with high precision, reconstruction of an X-ray CT image by enabling high-precision estimation of spectrum of energy released from an X-ray source device. An energy spectrum estimation device (92) normalizes a response function, and calculates a modified efficiency matrix from the normalized response function, a detection efficiency matrix, and a measurement-system correction coefficient. The energy spectrum estimation device then calculates a particular result in accordance with a Bayesian estimation equation, without divergence, with use of the calculated modified efficiency matrix, the normalized modified efficiency matrix, and an attenuation characteristic curve obtained by a measurement circuit (30). The energy spectrum (92) calculates an X-ray energy spectrum by dividing, by the normalized modified efficiency matrix, the particular result obtained by the Bayesian estimation equation.

    Abstract translation: 本发明提供能够高精度地再现X射线照射的衰减路径上的信息,以高精度进行X射线CT图像重建的X射线能谱估计方法, - 从X射线源装置释放的能量谱的精确估计。 能量谱估计装置(92)对响应函数进行归一化,并根据归一化响应函数,检测效率矩阵和测量系统校正系数来计算修正效率矩阵。 能谱估计装置然后利用计算出的修正效率矩阵,归一化修正效率矩阵和由测量电路(30)获得的衰减特性曲线,根据贝叶斯估计方程而不发散地计算特定结果。 能谱(92)通过归一化修正效率矩阵除以由贝叶斯估计方程获得的特定结果来计算X射线能谱。

    FLUOROSCOPIC IMAGE CAPTURING APPARATUS
    5.
    发明公开

    公开(公告)号:US20240151659A1

    公开(公告)日:2024-05-09

    申请号:US18281699

    申请日:2022-03-01

    Applicant: HITACHI, LTD.

    Inventor: Hiroyuki TAKAGI

    CPC classification number: G01N23/043 G01N2223/3032 G01N2223/406

    Abstract: In a fluoroscopic image capturing apparatus, an internal structure of a specimen can be appropriately evaluated. To provide a fluoroscopic image capturing apparatus 1 including: a timing control device 13 configured to output an irradiation timing signal S1 in synchronization with a drive timing signal S4 for driving a specimen 31 or a timing signal S5 as a detection result of an operation of the specimen 31; electromagnetic wave generation units 22 and 23 configured to irradiate, in synchronization with the irradiation timing signal Si, the specimen 31 with a pulsed electromagnetic wave beam B1 having a wavelength with which the electromagnetic wave beam B1 is transmitted through the specimen 31; and an electromagnetic wave detection device 41 configured to receive the electromagnetic wave beam B1 transmitted through the specimen 31.

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