公开(公告)号：US10162021B2

公开(公告)日：2018-12-25

申请号：US14905132

申请日：2013-08-02

Applicant: Hitachi, Ltd.

Inventor： Ryuzo Kawabata ,  Akihiko Kandori ,  Taro Osabe ,  Seiichi Suzuki ,  Yuudai Kamada

IPC: G01R33/26 ,  G01N24/00 ,  H01S3/091

Abstract: A magnetic measurement device has a magnetic sensor including a glass cell having alkali metal gas encapsulated therein that is configured to detect a magnetic field using a magneto-optical characteristic of spin-polarized alkali metal. A laser light source is configured to generate pump light introduced into the magnetic sensor and a coil provided in the same magnetically shielded space as the magnetic sensor is configured to apply a static magnetic field and a RF magnetic field to the magnetic sensor. A signal processor is configured to perform lock-in detection of a light detection signal transmitted through the glass cell of the magnetic sensor, control an intensity of the static magnetic field and a frequency of the RF magnetic field generated by the coil according to a lock-in detection output, and obtain a measurement signal reflecting a magnetic field intensity of an object to be measured in the magnetically shielded space.

公开(公告)号：US09366735B2

公开(公告)日：2016-06-14

申请号：US13827062

申请日：2013-03-14

Applicant: Hitachi, Ltd.

Inventor： Ryuzo Kawabata ,  Akihiko Kandori ,  Taro Osabe ,  Seiichi Suzuki ,  Yudai Kamada

IPC: G01R33/26

CPC classification number: G01R33/26

Abstract: Stable magnetic field measurement is enabled without collapse of polarization or fluctuation of intensity of a laser beam incident on a glass cell of an optical pumping magnetic sensor. Excitation light generated with a light source, having optimized light intensity and polarized wave, through frequency stabilization, intensity control and polarized-wave control, is introduced via a polarized wave holding optical fiber to a magnetic sensor provided in a magnetic shield, and magnetic field measurement is performed by optical pumping using magneto-optical properties of spin-polarized alkali metal. The magnetic sensor has a structure where a lens, a polarization optical device, the glass cell and a photodetector, are integrally accommodated in a non-magnetic case.

Abstract translation: 能够进行稳定的磁场测量，而不会使入射在光泵送磁传感器的玻璃电池上的激光束的偏振或强度波动。 通过频率稳定，强度控制和极化波控制，通过偏振波保持光纤将具有优化的光强度和极化波的光源产生的激发光引入设置在磁屏蔽中的磁传感器，并且磁场 通过使用自旋极化碱金属的磁光性质的光泵浦进行测量。 磁传感器具有将透镜，偏振光学装置，玻璃电池和光电检测器一体地容纳在非磁性壳体中的结构。

公开(公告)号：US20140346515A1

公开(公告)日：2014-11-27

申请号：US14372750

申请日：2012-11-19

Applicant: Hitachi, Ltd.

Inventor： Itaru Yanagi ,  Masahiko Ando ,  Toshiyuki Mine ,  Taro Osabe ,  Tomoyuki Ishii

IPC: H01L29/786 ,  H01L29/66

CPC classification number: H01L29/78675 ,  B82Y10/00 ,  G01N33/48721 ,  H01L29/0673 ,  H01L29/4908 ,  H01L29/66757 ,  H01L29/66787 ,  H01L29/7613 ,  H01L29/78648

Abstract: Detection accuracy of a semiconductor device for detecting various kinds of substances including biological matter such as DNA is to be increased. This semiconductor device includes: a channel region CH placed on a first surface of a silicon oxide film 110; source/drain regions placed on both sides of the channel region CH; a gate electrode G placed on the first surface at a distance from the channel region CH, the gate electrode G being located to face a side surface xz1 of the channel region CH; an insulating film Z located between the channel region CH and the gate electrode G; and a pore P extending parallel to the side surface xz1 of the channel region CH, the pore P being perpendicular to the first surface. A test object such as DNA 200 is introduced into the pore P, and field changes caused by the test object in an inversion layer 10 formed in the side surface xz1 of the channel region CH is detected as changes in the current flowing between the source/drain regions.

Abstract translation: 检测用于检测各种物质（包括生物物质如DNA）的半导体器件的检测精度将被增加。 该半导体器件包括：放置在氧化硅膜110的第一表面上的沟道区CH; 源极/漏极区域放置在沟道区域CH的两侧; 栅极电极G位于与沟道区域CH一定距离的第一表面上，栅电极G位于沟道区域CH的侧表面xz1处; 位于沟道区域CH和栅电极G之间的绝缘膜Z; 以及平行于沟道区域CH的侧表面xz1延伸的孔P，孔P垂直于第一表面。 将诸如DNA 200的测试对象引入到孔P中，并且检测由形成在沟道区CH的侧表面xz1中的反型层10中由被测试物引起的场变化，作为源极/ 漏区。