公开(公告)号：US20220334172A1

公开(公告)日：2022-10-20

申请号：US17634809

申请日：2019-09-06

Applicant: Hitachi High-Tech Corporation

Inventor： Kouichi HAYAKAWA ,  Masami TAKANO ,  Kazuhiro UEDA ,  Masayoshi ISHIKAWA ,  Yasuhiro YOSHIDA

IPC: G01R31/28 ,  H01L21/66

Abstract: An objective of the present invention is to provide a system which can infer the cause of a recipe error and present a correction candidate for the recipe error. A recipe information presentation system or recipe error inference system according to the present invention: causes a learner to learn a correspondence between a recipe and an error originating from the recipe; and acquires from the learner an inference result as to whether the error occurs when a new recipe is used (refer to FIG. 1).

公开(公告)号：US20230122653A1

公开(公告)日：2023-04-20

申请号：US17908731

申请日：2020-03-31

Applicant: Hitachi High-Tech Corporation

Inventor： Yasuhiro YOSHIDA ,  Masayoshi ISHIKAWA ,  Kouichi HAYAKAWA ,  Masami TAKANO ,  Fumihiro SASAJIMA

IPC: G06F11/07 ,  G06F11/34

Abstract: An error cause estimation device comprises a feature value generation unit for using data transmitted from the outside to generate feature values suitable for a machine learning model; a model database having a plurality of error prediction models, for determining whether an error has occurred using the feature values as input data; a model evaluation unit for evaluating the performance of an error prediction model by comparing a prediction result of the error prediction model and an actually measured error; a model selection unit for selecting from the model database an error prediction model for which an evaluation value calculated by the model evaluation unit is greater than or equal to a preset defined value; and an error prediction model generation unit for generating a new error prediction model with respect to the measured error when no corresponding error prediction model has been selected by the model selection unit.