公开(公告)号：US20230260739A1

公开(公告)日：2023-08-17

申请号：US18012478

申请日：2020-07-13

申请人： Hitachi High-Tech Corporation

发明人： Keisuke TANUMA ,  Masato KAMIO ,  Hironori ITABASHI ,  Hiroki KANNAMI ,  Yusuke SEKI ,  Takumi UEZONO ,  Mitsuhiro NAKAMURA

IPC分类号： H01J37/153 ,  H01J37/28 ,  H01J37/147

CPC分类号： H01J37/153 ,  H01J37/28 ,  H01J37/1474 ,  H01J2237/1536

摘要： It is aimed to properly correct the various types of distortion without a reduction in observation throughput. The present disclosure provides a charged particle beam device that obtains an image by irradiating a specimen with a charged particle beam and includes: a deflection coil that scans the charged particle beam on the specimen; a D/A converter that converts a digital scan waveform into an analog scan waveform and outputs the analog scan waveform to the deflection coil to drive the deflection coil; and a scan waveform generation unit that generates a digital scan waveform and outputs the digital scan waveform to the D/A converter, in which the scan waveform generation unit has a basic LUT that stores parameters for correcting the digital scan waveform and includes a correction circuit that corrects a distortion characteristic of the deflection coil

公开(公告)号：US20220415609A1

公开(公告)日：2022-12-29

申请号：US17778320

申请日：2019-11-21

申请人： Hitachi High-Tech Corporation

发明人： Takumi UEZONO ,  Tadanobu TOBA ,  Hironori ITABASHI ,  Masato KAMIO

IPC分类号： H01J37/26 ,  H01J37/285

摘要： A scanning electron microscope includes a management computer that generates an irradiation control command of an electron beam, a control block that generates a control signal on the basis of the irradiation control command, and a beam irradiation control device that controls an irradiation direction of the electron beam on the basis of the control signal. The management computer generates the irradiation control command on the basis of a scan type selected by a user and scan parameters set by the use