公开(公告)号：US12046446B2

公开(公告)日：2024-07-23

申请号：US17640279

申请日：2019-09-04

Applicant: Hitachi High-Tech Corporation

Inventor： Hiroyuki Chiba ,  Wei Chean Tan ,  Ryo Komatsuzaki ,  Hirofumi Sato

IPC: H01J37/22 ,  G06T7/70 ,  G06V10/22 ,  G06V10/24 ,  G06V10/774 ,  H01J37/244 ,  H01J37/28

CPC classification number: H01J37/222 ,  G06T7/70 ,  G06V10/22 ,  G06V10/245 ,  G06V10/774 ,  H01J37/244 ,  H01J37/28 ,  G06T2207/10061 ,  G06T2207/20081 ,  H01J2237/221 ,  H01J2237/24578 ,  H01J2237/2814

Abstract: A charged particle beam device 100 includes: an irradiation unit 110 configured to irradiate a sample S with a charged particle beam; a particle detection unit 130 configured to detect a particle caused by the irradiation of the sample with the charged particle beam; and a control unit 151 configured to generate an image of the sample based on an output from the particle detection unit, wherein the control unit 151 inputs the image of the sample S into models M1 and M2 for detecting a first structure 401 and a second structure 402, acquires a first detection result related to the first structure 401 and a second detection result related to the second structure 402 from the models M1 and M2, determines locations or regions of the first structure 401 and the second structure 402 based on the first detection result and the second detection result, and outputs an integration result image 203 representing the location or the region of the first structure 401 and the location or the region of the second structure 402.

公开(公告)号：US20220222775A1

公开(公告)日：2022-07-14

申请号：US17631538

申请日：2019-09-24

Applicant: Hitachi High-Tech Corporation

Inventor： Kazuo Ootsuga ,  Terutaka Nanri ,  Ryo Komatsuzaki ,  Hiroyuki Chiba

IPC: G06T3/40 ,  G06T7/00

Abstract: Provided is a sample observation apparatus including: a microscope that irradiates a sample with a probe, detects a signal from the sample, and outputs a detection signal; and a system that generates an image based on the detection signal received from the microscope. The system receives designation executed by a user for one or more trained models in a model database storing data of a plurality of trained models for estimating a high-quality image based on a low-quality image. The system generates and displays a current low-quality observation image based on the detection signal, and estimates and displays a high-quality image based on the current low-quality observation image according to each of the one or more trained models.

公开(公告)号：US11367588B2

公开(公告)日：2022-06-21

申请号：US17257408

申请日：2018-07-25

Applicant: Hitachi High-Tech Corporation

Inventor： Ryo Komatsuzaki ,  Atsushi Sawada

IPC: H01J37/26 ,  H01J37/28

Abstract: An object of the present invention is to provide a charged particle beam device capable of easily and quickly calling a function required by a user on a GUI. A charged particle beam device according to the invention presents an operation component that is recommended to be provided on a component set according to an operation history of the charged particle beam device (see FIG. 5).

公开(公告)号：US12051563B2

公开(公告)日：2024-07-30

申请号：US17637328

申请日：2019-09-04

Applicant: Hitachi High-Tech Corporation

Inventor： Ryo Komatsuzaki ,  Hiroyuki Chiba ,  Wei Chean Tan ,  Hirofumi Satou

IPC: H01J37/24 ,  H01J37/244 ,  H01J37/28

CPC classification number: H01J37/244 ,  H01J37/28 ,  H01J2237/2448

Abstract: A charged particle beam device 100 includes an irradiation unit 110 configured to irradiate a sample S with a charged particle beam, a detection unit 130 configured to output a signal caused by irradiating the sample S with the charged particle beam, a display unit 154 configured to output a condition selection interface for selecting one condition set from a plurality of condition sets, and a control unit 151 configured to execute an evaluation on an object of interest. The condition set includes information for specifying one learned model from a plurality of learned models, information for specifying one search condition from a plurality of search conditions including at least one of an irradiation condition and a detection condition, and information for specifying one analysis condition from a plurality of analysis conditions defining an operation of at least one of the irradiation unit 110 and the detection unit 130. The charged particle beam device 100 is configured to accept a selection of the condition set via the condition selection interface, irradiate a first region of the sample S with the charged particle beam based on the specified search condition and detect a first signal caused by the irradiation, transfer information that is based on the first signal to the specified learned model, acquire information that represents a second region of the sample S including a position of a candidate of the object of interest from the specified learned model, the second region being a part of the first region and smaller than the first region, irradiate the second region with the charged particle beam based on the specified analysis condition and detect a second signal caused by the irradiation, and input information that is based on the second signal to the control unit 151.

公开(公告)号：US11928801B2

公开(公告)日：2024-03-12

申请号：US17594342

申请日：2019-04-18

Applicant: Hitachi High-Tech Corporation

Inventor： Ryo Komatsuzaki

IPC: G06K9/00 ,  G06T5/00 ,  G06T5/50 ,  G06V10/764

CPC classification number: G06T5/50 ,  G06T5/002 ,  G06V10/764 ,  G06T2200/24 ,  G06T2207/20092

Abstract: With respect to a charged particle beam apparatus, provided is a technology capable of preventing a deterioration in image quality of a captured image. The charged particle beam apparatus includes an imaging device that irradiates a sample with a charged particle beam and forms an image from information of the sample and a computer. The computer stores each of images (scanned images) obtained by scanning the same area multiple times, classifies each of images into an image including a deteriorated image and an image not including the deteriorated image, and stores a target image obtained by performing image integration from the image not including the deteriorated image. The charged particle beam apparatus includes a database that stores data such as information obtained from an imaging device including the scanned image, classification results, and the target image. The charged particle beam apparatus obtains a target image having a high S/N and sharpness in which random noise is suppressed and a deterioration in image quality is prevented by performing the image integration on the scanned image that does not include the selected deteriorated image among the scanned images.

公开(公告)号：US11545334B2

公开(公告)日：2023-01-03

申请号：US17262422

申请日：2018-08-02

Applicant: Hitachi High-Tech Corporation

Inventor： Ryo Komatsuzaki

IPC: H01J37/20 ,  H01J37/22 ,  H01J37/244 ,  H01J37/302

Abstract: The invention provides a charged particle beam device that can accurately move a convergence point of a charged particle beam to a surface of a sample and facilitates a user to grasp a positional relation between the surface of the sample and the convergence point of the charged particle beam. The charged particle beam device according to the invention includes: an electron optics system configured to irradiate a sample table with a charged particle beam; a movable stage on which the sample table is to be placed; a sample chamber that accommodates the movable stage; a detector configured to detect a signal from a sample placed on the sample table; a camera configured to capture an image of the sample table and the sample; an extraction means configured to extract outer shape information relating to outer shapes of the sample table and the sample from the image captured by the camera; a control unit configured to control the movable stage based on the outer shape information; and a display unit configured to display an image relating to the outer shape information together with the image captured by the camera.