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公开(公告)号：US20230175978A1
公开(公告)日：2023-06-08
申请号：US17913553
申请日：2020-04-02
发明人： Toshifumi HONDA , Yuta URANO , Eiji ARIMA , Hiromichi YAMAKAWA , Shunichi MATSUMOTO , Hisaaki KANAI
CPC分类号： G01N21/9501 , G01N21/47 , G01N2201/10
摘要： A defect inspection apparatus includes an illumination unit configured to irradiate a surface of a sample with a linear illumination spot; a condensing detection unit configured to condense reflected light of the illumination spot and to control a polarization state of the incident light to form an optical image; and a sensor unit configured to output the optical image and including an array-shaped light receiving portion and an antireflection film at a position conjugate with the illumination spot, in which the condensing detection unit includes a polarization control unit configured to increase light incident efficiency to the sensor unit. The normal line of the light receiving surface of the sensor unit is inclined from the optical axis of the condensing detection unit by 10 degrees or more and less than 80 degrees. The light condensing detection unit increases the optical magnification in the lateral direction of the illumination spot.
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公开(公告)号：US20230142646A1
公开(公告)日：2023-05-11
申请号：US17916629
申请日：2020-04-10
CPC分类号： G01N21/9501 , G01N21/94 , G01N21/8806 , G01N2021/8809
摘要： This illumination optical system comprises a laser light source 301, 401, 501, a light collection optical system 311, 411, 511, and a support structure 312, 412 that is able to secure the laser light source and the light collection optical system, wherein the light from the laser light source is focused onto an object to be inspected 307, 407, 507. The light collection optical system comprises a cylindrical mirror 306, 406, 506, and at least one cylindrical lens 304, 404a, 404b, 404c, 504a, 504b, 504c. The cylindrical mirror is an optical element that collects light in a first direction, and the cylindrical lens is an optical element that collects light in a second direction perpendicular to the first direction. The focal distance of the cylindrical lens to the object to be inspected is greater than the focal distance of the cylindrical mirror to the object to be inspected.
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公开(公告)号：US20210025829A1
公开(公告)日：2021-01-28
申请号：US17070692
申请日：2020-10-14
发明人： Toshifumi HONDA , Shunichi MATSUMOTO , Masami MAKUUCHI , Yuta URANO , Keiko OKA
IPC分类号： G01N21/88 , G01N21/47 , G01N21/956
摘要： A defect inspection apparatus includes: an illumination unit configured to illuminate an inspection object region of a sample with light emitted from a light source; a detection unit configured to detect scattered light in a plurality of directions, which is generated from the inspection object region; a photoelectric conversion unit configured to convert the scattered light detected by the detection unit into an electrical signal; and a signal processing unit configured to process the electrical signal converted by the photoelectric conversion unit to detect a defect in the sample. The detection unit includes a lens array configured to divide an image to form a plurality of images on the photoelectric conversion unit. The signal processing unit is configured to synthesize electrical signals corresponding to the plurality of formed images to detect a defect in the sample.
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公开(公告)号：US20230160835A1
公开(公告)日：2023-05-25
申请号：US17922853
申请日：2020-06-09
发明人： Eiji ARIMA , Toshifumi HONDA , Shunichi MATSUMOTO
CPC分类号： G01N21/9501 , G01N21/47 , G01B11/0608 , G06T7/0006 , G06T7/70 , G01N2201/0636 , G01N2201/06113 , G06T2207/30148
摘要： An object of the invention is to provide a defect inspection device capable of correcting image forming position deviation due to displacement of a sample surface in a Z direction while enabling image forming detection from a direction not orthogonal to a longitudinal direction of illumination. The detect inspection device according to the invention is configured to determine on which lens in a lens array scattered light is incident according to a detection elevation angle of the scattered light from a sample, and an image position of the scattered light having a small elevation angle is corrected more than an image position of the scattered light having a large elevation angle (see FIG. 19).
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公开(公告)号：US20240096667A1
公开(公告)日：2024-03-21
申请号：US18272859
申请日：2021-01-29
发明人： Hiromichi YAMAKAWA , Toshifumi HONDA , Yuta URANO , Shunichi MATSUMOTO , Masaya YAMAMOTO , Eiji ARIMA
CPC分类号： H01L21/67288 , G01N21/9501 , G06T7/60 , G06T7/70 , G01N2201/103 , G01N2201/1087 , G01N2201/121 , H04N23/67
摘要： A defect inspection device in which an optical axis of a detection optical system is inclined with respect to a surface of a sample, and an imaging sensor is inclined with respect to the optical axis, a height variation amount of an illumination spot in a normal direction of the surface of the sample is calculated based on an output of a height measuring unit, a deviation amount of the focusing position with respect to the light receiving surface in an optical axis direction of the detection optical system is calculated based on the height variation amount of the illumination spot, the deviation amount of the focusing position being generated accompanying a height variation of the illumination spot, and the focus actuator is controlled based on the deviation amount of the focusing position, and scattered light intensities at the same coordinates of the sample are added.
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公开(公告)号：US20220317058A1
公开(公告)日：2022-10-06
申请号：US17597319
申请日：2019-07-24
摘要： This defect inspection device for emitting illumination light onto a moving and rotating sample and inspecting for sample defects by scanning the sample in a spiral shape or concentric circle shapes comprises: an illumination and detection unit comprising an emission optical system and a detection optical system; a rotary stage for rotating the sample; a rectilinear stage for rectilinearly moving the rotary stage; and a controller for controlling the illumination and detection unit, rotary stage, and rectilinear stage. On the linear path of the rectilinear stage are a scanning start position where illumination light is emitted onto the sample and scanning is started and a sample delivery position where movement of the sample to the scanning start position starts. When the sample arrives at the scanning start position, the defect inspection device starts emitting the illumination light onto the sample without waiting for the rotation speed of the rotary stage to rise to a specified rotation speed for scanning and raises the rotation speed of the rotary stage to the specified rotation speed while scanning the sample.
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