公开(公告)号：US20230139507A1

公开(公告)日：2023-05-04

申请号：US17918144

申请日：2020-05-19

Applicant: Hitachi High-Tech Corporation

Inventor： Shiano ONO ,  Yuuji KASAI ,  Shuichi NAKAGAWA ,  Toshihiko SHIMIZU

IPC: H01J37/20 ,  H01J37/16

Abstract: The present invention provides a charged particle beam device (1) capable of attenuating intrinsic vibrations of an ion pump (104) which is connected to a lens barrel (101), regardless of the length of the lens barrel (101). A charged particle beam device (1) according to the present invention comprises: a lens barrel (101) for irradiating a sample (108) with a charged particle beam (106); an ion pump (104) which is connected to the lens barrel (101) and which evacuates the air inside the lens barrel (101); and a support member (117), one end of which is connected to the ion pump (104), and the other end of which is connected the lens barrel (101). The support member (117) includes a viscoelastic body (118) which is provided substantially parallel to the central axis (114) of the lens barrel (101).

公开(公告)号：US20230010272A1

公开(公告)日：2023-01-12

申请号：US17783788

申请日：2019-12-16

Applicant: Hitachi High-Tech Corporation

Inventor： Shinichi MURAKAMI ,  Tomoyo SASAKI ,  Yuuji KASAI ,  Yuzuru MIZUHARA ,  Wen LI

IPC: H01J37/04 ,  H01J37/28 ,  H01J37/24

Abstract: Provided is a charged particle beam device with low blanking noise and improved signal detection accuracy. As means therefor, a charged particle beam device is configured by: a stage where a sample is mountable; a charged particle gun performing charged particle emission to the sample; a voltage source; a first switching circuit to which a voltage is supplied from the voltage source; a second switching circuit having one end connected to a ground; a third switching circuit having one end connected to the ground; a fourth switching circuit to which a voltage is supplied from the voltage source; a first blanking electrode connected to the first switching circuit and the second switching circuit; a second blanking electrode facing the first blanking electrode and connected to the third switching circuit and the fourth switching circuit; and a control circuit controlling the first switching circuit, the second switching circuit, the third switching circuit, and the fourth switching circuit.