公开(公告)号：US20230386781A1

公开(公告)日：2023-11-30

申请号：US18203430

申请日：2023-05-30

Applicant: Hitachi High-Tech Corporation

Inventor： Zhao JINYU ,  Ayumi DOI ,  Aoi YAMAUCHI ,  Shuichiro TAKAHASHI

IPC: H01J37/244 ,  H01J37/28 ,  H03G3/30 ,  G01N23/2251

CPC classification number: H01J37/244 ,  H01J37/28 ,  H03G3/3036 ,  G01N23/2251 ,  H01J2237/2448 ,  H01J2237/24495 ,  H03G2201/103

Abstract: To correct a difference in signal intensity due to a difference in hardware, for example, temporal deterioration of the hardware in the same device, or a difference in signal intensity between different devices. An adjustment method according to the disclosure specifies an amplification gain with which the same detection signal intensity as that of a comparison target is obtained by comparing correspondence relationships between the detection signal intensity and the amplification gain at different time points in the same charged particle beam device or among different charged particle beam devices.