公开(公告)号：US20230386781A1

公开(公告)日：2023-11-30

申请号：US18203430

申请日：2023-05-30

Applicant: Hitachi High-Tech Corporation

Inventor： Zhao JINYU ,  Ayumi DOI ,  Aoi YAMAUCHI ,  Shuichiro TAKAHASHI

IPC: H01J37/244 ,  H01J37/28 ,  H03G3/30 ,  G01N23/2251

CPC classification number: H01J37/244 ,  H01J37/28 ,  H03G3/3036 ,  G01N23/2251 ,  H01J2237/2448 ,  H01J2237/24495 ,  H03G2201/103

Abstract: To correct a difference in signal intensity due to a difference in hardware, for example, temporal deterioration of the hardware in the same device, or a difference in signal intensity between different devices. An adjustment method according to the disclosure specifies an amplification gain with which the same detection signal intensity as that of a comparison target is obtained by comparing correspondence relationships between the detection signal intensity and the amplification gain at different time points in the same charged particle beam device or among different charged particle beam devices.

公开(公告)号：US20240240937A1

公开(公告)日：2024-07-18

申请号：US18559162

申请日：2021-05-28

Applicant: Hitachi High-Tech Corporation

Inventor： Aoi YAMAUCHI ,  Ayumi DOI ,  Makoto SUZUKI ,  Shuuichirou TAKAHASHI ,  Masaki SUGIE

IPC: G01B15/00

CPC classification number: G01B15/00

Abstract: Provided is a depth measurement system comprising a plurality of depth measurement devices which each calculate a depth index value indicating the relative depth of a pattern on a sample, wherein: the plurality of depth measurement devices are classified into one reference device 1001 and an other correction target device 1002; the depth measurement devices each execute a depth measurement recipe for measuring the depth of a predetermined pattern in a measurement subject so as to calculate the depth index value of the predetermined pattern on the basis of a measurement value extracted from an obtained electronic image; and the correction target device stores a correction coefficient associated with the depth measurement recipe and outputs the depth index value of the predetermined pattern which has been corrected using a mathematical model to which the correction coefficient is applied.