公开(公告)号：US09823208B2

公开(公告)日：2017-11-21

申请号：US15084976

申请日：2016-03-30

Applicant: Hitachi High-Tech Science Corporation

Inventor： Masafumi Watanabe ,  Takehiro Yamaoka

IPC: G01R31/26 ,  G01N27/04 ,  G01N27/02 ,  G01N17/00 ,  G01Q60/30 ,  G01L1/10 ,  G01L1/22 ,  G01L1/20

CPC classification number: G01N27/041 ,  G01L1/10 ,  G01L1/20 ,  G01L1/22 ,  G01N17/00 ,  G01N27/02 ,  G01Q60/30

Abstract: A method includes: removing at least a part of an oxide formed on a surface of the sample by relatively scanning the surface of the sample in X and Y directions parallel to the surface while bringing a probe into contact with the surface of the sample; detecting a signal by bringing the probe into contact with the surface of the sample from which at least a part of the oxide is removed at a predetermined detection position in the X direction or the Y direction while a bias voltage is applied to the sample; calculating a spreading resistance value based on the signal; and retracting the probe to keep the probe relatively away from the surface in a Z direction perpendicular to the surface while relatively moving the probe to a next detection position to start scanning the sample from the next detection position.

公开(公告)号：US20160290945A1

公开(公告)日：2016-10-06

申请号：US15084976

申请日：2016-03-30

Applicant: Hitachi High-Tech Science Corporation

Inventor： Masafumi Watanabe ,  Takehiro Yamaoka

IPC: G01N27/04 ,  G01Q60/00

CPC classification number: G01N27/041 ,  G01L1/10 ,  G01L1/20 ,  G01L1/22 ,  G01N17/00 ,  G01N27/02 ,  G01Q60/30

Abstract: A method includes: removing at least a part of an oxide formed on a surface of the sample by relatively scanning the surface of the sample in X and Y directions parallel to the surface while bringing a probe into contact with the surface of the sample; detecting a signal by bringing the probe into contact with the surface of the sample from which at least a part of the oxide is removed at a predetermined detection position in the X direction or the Y direction while a bias voltage is applied to the sample; calculating a spreading resistance value based on the signal; and retracting the probe to keep the probe relatively away from the surface in a Z direction perpendicular to the surface while relatively moving the probe to a next detection position to start scanning the sample from the next detection position.

Abstract translation: 一种方法包括：通过在使样本与样品的表面接触的同时在与所述表面平行的X和Y方向上相对扫描所述样品的表面来除去形成在所述样品表面上的至少一部分氧化物; 通过使所述探针与所述样品的表面接触来检测信号，所述样品的表面在X方向或Y方向上的预定检测位置处除去所述氧化物的至少一部分，同时向所述样品施加偏置电压; 基于该信号计算扩展电阻值; 并且使所述探针缩回以使所述探针在垂直于所述表面的Z方向上相对远离所述表面远离所述探针，同时相对地将所述探针移动到下一个检测位置以开始从所述下一个检测位置扫描所述样品。