公开(公告)号：US20170316915A1

公开(公告)日：2017-11-02

申请号：US15487561

申请日：2017-04-14

Applicant: Hitachi High-Technologies Corporation

Inventor： Nobuhiro OKAI ,  Natsuki TSUNO ,  Naomasa SUZUKI ,  Tomoyasu SHOJO

IPC: H01J37/244 ,  H01J37/14 ,  H01J37/20 ,  H01J37/28

CPC classification number: H01J37/244 ,  H01J37/14 ,  H01J37/20 ,  H01J37/28 ,  H01J2237/10 ,  H01J2237/2448 ,  H01J2237/2449 ,  H01J2237/24495 ,  H01J2237/2809

Abstract: Provided is a charged particle beam apparatus which includes a charged particle source, a sample table on which a sample is placed, a charged particle beam optical system that includes an objective lens and emits a charged particle beam emitted from the charged particle source onto the sample, a plurality of detectors which detect secondary particles emitted from the sample when being irradiated with the charged particle beam, and a rotation member which magnetically, electrically, or mechanically changes a detected azimuth angle of the secondary particles emitted from the sample.