-
公开(公告)号:US11640897B2
公开(公告)日:2023-05-02
申请号:US16641870
申请日:2017-09-04
IPC分类号: H01J37/28 , H01J37/141 , H01J37/20 , H01J37/244
摘要: The present invention provides a charged particle beam apparatus capable of efficiently reducing the effect of a residual magnetic field when SEM observation is performed. The charged particle beam apparatus according to the present invention includes a first mode for passing a direct current to a second coil after turning off a first coil, and a second mode for passing an alternating current to the second coil after turning off the first coil.
-
公开(公告)号:US11430630B2
公开(公告)日:2022-08-30
申请号:US16641035
申请日:2017-09-04
IPC分类号: H01J37/28 , H01J37/141 , H01J37/20 , H01J37/30
摘要: The present invention realizes a composite charged particle beam apparatus capable of suppressing a leakage magnetic field from a pole piece forming an objective lens of an SEM with a simple structure. The charged particle beam apparatus according to the present invention obtains an ion beam observation image while passing a current to a first coil constituting the objective lens, and performs an operation of reducing the image shift by passing a current to a second coil with a plurality of current values, and determines a current to be passed to the second coil based on a difference between the operations.
-