公开(公告)号：US20190295815A1

公开(公告)日：2019-09-26

申请号：US16291070

申请日：2019-03-04

Applicant: Hitachi High-Technologies Corporation

Inventor： Yasunori TAKASUGI ,  Satoru YAMAGUCHI ,  Kei SAKAI ,  Hideki ITAI ,  Yoshinori MOMONOI ,  Toshimasa KAMEDA ,  Yoshihiro KIMURA

IPC: H01J37/22 ,  H01J37/244 ,  H01J37/28 ,  H01J37/12

Abstract: Provided is a charged particle beam apparatus, aiming at obtaining an image and the like focused on the sample surface and the bottom while preventing the visual field deviation occurred when focusing on the sample surface and the bottom respectively. The charged particle beam apparatus forms a first image (301), which is based on detection of the first energy charged particles, based on an irradiation with a beam whose focus is adjusted on a sample surface side, forms a second image (304) which is based on detection of second energy charged particles having a relatively higher energy than the first energy and a third image (303) which is based on the detection of the first energy charged particles, based on the irradiation with a beam whose focus is adjusted on a bottom side of a pattern included in the sample, acquires a deviation between the first image and the third image, and composes the first image and the second image so as to correct the deviation.

公开(公告)号：US20190221400A1

公开(公告)日：2019-07-18

申请号：US16311492

申请日：2016-07-28

Applicant: Hitachi High-Technologies Corporation

Inventor： Toshimasa KAMEDA ,  Hiroya OHTA ,  Kenji TANIMOTO

IPC: H01J37/244 ,  H01J37/147 ,  H01J37/28

CPC classification number: H01J37/244 ,  H01J37/1474 ,  H01J37/28 ,  H01J2237/2446 ,  H01J2237/24475 ,  H01J2237/28

Abstract: The purpose of the present invention is to provide a charged particle beam device for detecting, with highly precise angular discrimination, charged particles emitted from a specimen. To achieve this purpose, proposed is a charged particle beam device provided with a scanning deflector for scanning on a specimen a charged particle beam emitted from a charged particle source, the charged particle beam device being provided with: a first detector for detecting charged particles obtained by scanning of the charged particle beam on a specimen, and a second detector placed between the first detector and the specimen, and supported so as to be able to move in the charged particle beam light axis direction.