公开(公告)号：US20130322737A1

公开(公告)日：2013-12-05

申请号：US13905164

申请日：2013-05-30

Applicant: Hitachi High-Technologies Corporation

Inventor： Shinya MURAKAMI ,  Chie SHISHIDO ,  Takashi HIROI ,  Taku NINOMIYA ,  Tsuyoshi MINAKAWA ,  Atsushi MIYAMOTO

IPC: G06T7/00

CPC classification number: G06T7/001 ,  G06T2207/10061 ,  G06T2207/30148

Abstract: A defect inspection method comprising: picking up an image of a subject under inspection to thereby acquire an inspection image; extracting multiple templates corresponding to multiple regions, respectively from design data of the subject under inspection; finding a first misregistration amount between the inspection image and the design data using a first template as any one template selected from among the plural templates; finding a second misregistration amount between the inspection image and the design data using a second template other than the first template, the second template being selected from among the plural templates, and the first misregistration-amount; and converting the design data, misregistration thereof being corrected using the first misregistration-amount, and the second misregistration-amount, into a design data image, and comparing the design data image with the inspection image to thereby detect a defect of the subject under inspection.

Abstract translation: 一种缺陷检查方法，包括：拾取检查对象的图像，从而获取检查图像; 从被检查对象的设计数据分别提取与多个区域对应的多个模板; 使用第一模板在所述多个模板中选择任何一个模板，在所述检查图像和所述设计数据之间找到第一重合失调量; 使用除了第一模板之外的第二模板，从多个模板中选择第二模板和第一重合失调量，在检查图像和设计数据之间找到第二对准不足量; 并且将设计数据，其使用第一重合失调量和第二重合失调量进行校正的重新配准转换成设计数据图像，并将设计数据图像与检查图像进行比较，从而检测被检查对象的缺陷 。

公开(公告)号：US20160063690A1

公开(公告)日：2016-03-03

申请号：US14761154

申请日：2014-01-27

Applicant: HITACHI HIGH-TECHNOLOGIES CORPORATION

Inventor： Hiroyuki USHIBA ,  Tsuyoshi MINAKAWA

IPC: G06T7/00 ,  G06K9/00 ,  G01N21/88 ,  G01N21/956 ,  G01N21/95

CPC classification number: G06T7/001 ,  G01N21/8851 ,  G01N21/9501 ,  G01N21/956 ,  G01N21/95607 ,  G01N2021/8887 ,  G06K9/00 ,  G06T2207/30148 ,  H01L21/0337 ,  H01L22/12

Abstract: A pattern evaluation device of the present invention includes a model estimation unit that estimates a model caused by a manufacturing method on the basis of an inspection image, a deformation amount estimation unit that estimates a deformation amount of the inspection image by using the estimated model, a reference data deformation unit that deforms reference data by using the estimated deformation amount, and an evaluation unit that performs an evaluation process by comparing the reference data which is deformed by the reference data deformation unit with the inspection image.

Abstract translation: 本发明的图案评价装置包括：模型估计单元，其基于检查图像估计由制造方法引起的模型;变形量估计单元，其使用所估计的模型来估计检查图像的变形量; 参考数据变形单元，其使用估计的变形量使参考数据变形;以及评估单元，其通过将由参考数据变形单元变形的参考数据与检查图像进行比较来执行评估处理。