公开(公告)号：US06639340B1

公开(公告)日：2003-10-28

申请号：US09549209

申请日：2000-04-13

申请人： Hong Qiu ,  Koji Sumi ,  Souichi Moriya ,  Masato Shimada ,  Tsutomu Nishiwaki

发明人： Hong Qiu ,  Koji Sumi ,  Souichi Moriya ,  Masato Shimada ,  Tsutomu Nishiwaki

IPC分类号： H01L4108

CPC分类号： H01L41/0805 ,  H01L41/0973 ,  H01L41/1875 ,  H01L41/318

摘要： Provided is a method for manufacturing a piezoelectric element that has excellent piezoelectric characteristics and can be made into a thicker film. A piezoelectric thin film is crystallized by a process in which piezoelectric precursor films 4021 through 4025 containing the metal elements of a piezoelectric ceramic are coated with a material, dried, pyrolyzed, and then heat-treated under prescribed conditions in a diffusion furnace. With this method, a piezoelectric thin film can be made into a thicker film without initiating cracking.

摘要翻译： 提供一种压电元件的制造方法，该压电元件具有优异的压电特性，并且可以制成较厚的膜。 压电薄膜通过将包含压电陶瓷的金属元素的压电前体膜4021至4025涂覆材料干燥，热解，然后在扩散炉中在规定条件下进行热处理的方法结晶化。 利用该方法，可以将压电薄膜制成较厚的膜而不引起开裂。

公开(公告)号：US06411017B1

公开(公告)日：2002-06-25

申请号：US09296279

申请日：1999-04-22

申请人： Hong Qiu ,  Kouji Sumi ,  Tsutomu Nishikawa ,  Souichi Moriya

发明人： Hong Qiu ,  Kouji Sumi ,  Tsutomu Nishikawa ,  Souichi Moriya

IPC分类号： H01L4108

CPC分类号： B41J2/1629 ,  B41J2/14233 ,  B41J2/161 ,  B41J2/1623 ,  B41J2/1628 ,  B41J2/1645 ,  B41J2/1646 ,  B41J2002/14387 ,  B41J2202/03 ,  B41J2202/11 ,  H01L41/0805 ,  H01L41/1876 ,  H01L41/318

摘要： A piezoelectric device having a crystallized piezoelectric film between a lower and an upper electrode, wherein the crystal axis of the columnar crystal grain with the (001) orientation in the crystal forming the piezoelectric film is inclined by a predetermined angle relative to the normal direction of the lower electrode face, thereby improving the electric/mechanic converting function under low voltage conditions.

摘要翻译： 一种在下电极和上电极之间具有结晶化压电膜的压电器件，其中在形成压电膜的晶体中具有（001）取向的柱状晶粒的晶轴相对于法向方向倾斜预定角度 下电极面，从而提高低电压条件下的电/机械转换功能。

公开(公告)号：US06502928B1

公开(公告)日：2003-01-07

申请号：US09361982

申请日：1999-07-28

申请人： Masato Shimada ,  Shinri Sakai ,  Yoshinao Miyata ,  Souichi Moriya

发明人： Masato Shimada ,  Shinri Sakai ,  Yoshinao Miyata ,  Souichi Moriya

IPC分类号： B41J2045

CPC分类号： B41J2/1629 ,  B41J2/14233 ,  B41J2/161 ,  B41J2/1631 ,  B41J2/1632 ,  B41J2/1645 ,  B41J2/1646 ,  B41J2002/14419 ,  B41J2002/14491 ,  B41J2202/03 ,  B41J2202/11

摘要： An ink jet recording head includes pressure generating chambers communicating with associated nozzle orifices and piezoelectric elements provided in a one-to-one correspondence with the pressure generating chambers. Each of the piezoelectric elements includes a lower electrode provided in an area corresponding to the pressure generating chamber via an insulating layer, a piezoelectric layer provided on the lower electrode, and an upper electrode provided on a surface of the piezoelectric layer. Each of the piezoelectric elements includes an active part provided in an area facing the pressure generating chamber to be driven substantially, and an inactive part not to be driven even having the piezoelectric layer continued from the active part.

摘要翻译： 喷墨记录头包括与相关联的喷嘴孔和与压力发生室一一对应地设置的压电元件连通的压力产生室。 每个压电元件包括​​经由绝缘层设置在与压力发生室对应的区域中的下电极，设置在下电极上的压电层和设置在压电层表面上的上电极。 每个压电元件包括​​设置在面向压力发生室的区域中的有源部分，以基本上被驱动，并且即使压电层从有源部分继续而不被驱动的非活动部分。

公开(公告)号：US06336717B1

公开(公告)日：2002-01-08

申请号：US09326699

申请日：1999-06-07

申请人： Masato Shimada ,  Shinri Sakai ,  Souichi Moriya ,  Yoshinao Miyata ,  Yutaka Furuhata

发明人： Masato Shimada ,  Shinri Sakai ,  Souichi Moriya ,  Yoshinao Miyata ,  Yutaka Furuhata

IPC分类号： B41J2045

CPC分类号： B41J2/1629 ,  B41J2/14233 ,  B41J2/161 ,  B41J2/1623 ,  B41J2/1631 ,  B41J2/1632 ,  B41J2/1645 ,  B41J2/1646 ,  B41J2002/14419 ,  B41J2002/14491 ,  B41J2202/03 ,  B41J2202/11

摘要： An ink jet recording head comprises a pressure generating chamber communicating with a nozzle opening, and a piezoelectric element a lower electrode provided on an area facing the pressure generating chamber via an insulating layer, a piezoelectric layer provided on the lower electrode, and an upper electrode provided on the piezoelectric layer. At least both ends of the lower electrode in a width direction thereof are positioned within the area facing the pressure generating chamber, and the piezoelectric layer covers sides of both ends of the lower electrode in the width direction thereof.

摘要翻译： 喷墨记录头包括与喷嘴开口连通的压力产生室，以及压电元件，经由绝缘层设置在面向压力发生室的区域上的下电极，设置在下电极上的压电层和上电极 设置在压电层上。 下电极的宽度方向的至少两端位于面向压力发生室的区域内，压电层覆盖下电极的宽度方向的两端侧。

公开(公告)号：US06698096B2

公开(公告)日：2004-03-02

申请号：US09964495

申请日：2001-09-28

申请人： Souichi Moriya ,  Qiu Hong ,  Kouji Sumi

发明人： Souichi Moriya ,  Qiu Hong ,  Kouji Sumi

IPC分类号： B23P1700

CPC分类号： B41J2/1646 ,  B41J2/161 ,  B41J2/1628 ,  B41J2/1629 ,  B41J2/1642 ,  B41J2/1645 ,  B41J2002/14387 ,  H01L41/0805 ,  H01L41/0973 ,  H01L41/318 ,  Y10T29/49002 ,  Y10T29/49117 ,  Y10T29/49401

摘要： A method for manufacturing a piezoelectric film element with increased durability is disclosed. The method of manufacturing the piezoelectric film element includes the steps of thermally treating a first film, and thermally treating a second film formed over the first film; whereby a dislocation layer is formed in the second film in a vicinity of an interface between the first film and the second film. Additionally, an ink-jet recording head including a pressure room substrate, a pressure room, and a piezoelectric film element is disclosed. The method of manufacturing the ink-jet recording head includes the steps of forming a pressure room in a pressure room substrate and manufacturing a piezoelectric film element at a position which makes it possible to press the pressure room.

摘要翻译： 公开了一种制造具有增加的耐久性的压电薄膜元件的方法。 制造压电膜元件的方法包括热处理第一膜并热处理形成在第一膜上的第二膜的步骤; 由此在第二膜中在第一膜和第二膜之间的界面附近形成位错层。 此外，公开了一种包括压力室基板，压力室和压电膜元件的喷墨记录头。 制造喷墨记录头的方法包括以下步骤：在压力室基板中形成压力室，并在压力室的压力位置制造压电膜元件。

公开(公告)号：US06767084B2

公开(公告)日：2004-07-27

申请号：US10091443

申请日：2002-03-07

申请人： Souichi Moriya ,  Hiroyuki Kamei ,  Masami Murai ,  Kazuhiko Fujimori

发明人： Souichi Moriya ,  Hiroyuki Kamei ,  Masami Murai ,  Kazuhiko Fujimori

IPC分类号： B41J2045

CPC分类号： B41J2/14233 ,  B41J2/14274 ,  B41J2002/14241 ,  B41J2002/14491

摘要： Disclosed are an ink-jet recording head capable of preventing destruction of a piezoelectric element relatively readily and securely and an ink-jet recording apparatus. In the ink-jet recording head including a passage-forming substrate having a pressure generating chamber communicating with a nozzle orifice defined therein and a piezoelectric element provided on a region of the passage-forming substrate via a vibration plate, the region corresponding to the pressure generating chamber, a sealing member defining a piezoelectric element holding portion securing a space not to hinder a movement of the piezoelectric element is provided, the sealing member being joined onto a side of the piezoelectric element of the passage-forming substrate, and at least one sealed portion as a space provided in a member other than the sealing member, communicating with the piezoelectric element holding portion and shielded from outside air is provided, thus volume of the piezoelectric element holding portion is substantially expanded to prevent an increase in humidity of the piezoelectric element.

摘要翻译： 公开了能够相对容易且可靠地防止压电元件破坏的喷墨记录头和喷墨记录装置。 在包括具有与限定在其中限定的喷嘴孔连通的压力产生室的通道形成基板和经由振动板设置在通道形成基板的区域上的压电元件的喷墨记录头中， 提供了一种限定压电元件保持部分的密封构件，该压电元件保持部分固定不妨碍压电元件移动的空间，密封构件被连接到通道形成衬底的压电元件的一侧，并且至少一个 密封部分设置在与密封构件以外的部件中设置的与压电元件保持部分连通并且被外部空气屏蔽的空间，因此压电元件保持部分的体积基本上膨胀以防止压电体的湿度增加 元件。

公开(公告)号：US06328433B1

公开(公告)日：2001-12-11

申请号：US09235488

申请日：1999-01-22

申请人： Souichi Moriya ,  Qiu Hong ,  Kouji Sumi

发明人： Souichi Moriya ,  Qiu Hong ,  Kouji Sumi

IPC分类号： B41J2045

CPC分类号： B41J2/1646 ,  B41J2/161 ,  B41J2/1628 ,  B41J2/1629 ,  B41J2/1642 ,  B41J2/1645 ,  B41J2002/14387 ,  H01L41/0805 ,  H01L41/0973 ,  H01L41/318 ,  Y10T29/49002 ,  Y10T29/49117 ,  Y10T29/49401

摘要： A piezoelectric film element with structural characteristics such that cracks are not generated in the manufacturing of the piezoelectric film and a thicker piezoelectric film is possible without such cracks. The piezoelectric film element includes a dislocation layer, that is, a layer in which atoms in the crystals are partly defective, which is caused by lattice defects. In the process for forming the piezoelectric film, when a sol is turned into a gel by thermal treatment and when crystal grains of the sol grow, a lattice arrangement over the surfaces of the crystal grains is disturbed moderately. Accordingly, when the piezoelectric film is formed over the gel, the dislocation layer is formed in the piezoelectric film.

摘要翻译： 具有如下结构特征的压电薄膜元件，即使在压电薄膜的制造中也不产生裂纹，也可以在没有这样的龟裂的情况下形成较厚的压电薄膜。 压电膜元件包括位错层，即由晶格缺陷引起的晶体中的原子部分缺陷的层。 在形成压电膜的过程中，当通过热处理将溶胶变成凝胶并且当溶胶的晶粒生长时，晶粒表面上的晶格排列受到适度的干扰。 因此，当在凝胶上形成压电膜时，在压电膜中形成位错层。