公开(公告)号：US20150041944A1

公开(公告)日：2015-02-12

申请号：US14479885

申请日：2014-09-08

申请人： Hong-ki KIM ,  Ho-Kyu KANG ,  June-taeg LEE ,  Jae-Hee CHOI

发明人： Hong-ki KIM ,  Ho-Kyu KANG ,  June-taeg LEE ,  Jae-Hee CHOI

IPC分类号： H01L27/146 ,  H01L23/00

CPC分类号： H01L27/14636 ,  H01L23/564 ,  H01L27/14618 ,  H01L27/14621 ,  H01L27/14632 ,  H01L27/14638 ,  H01L27/1464 ,  H01L27/14687 ,  H01L2224/48095 ,  H01L2224/48227 ,  H01L2924/13091 ,  H01L2924/00014 ,  H01L2924/00

摘要： Image sensor, fabricating method thereof, and device comprising the image sensor are provided, which comprises a substrate in which a photoelectric transformation device is formed, an interconnection structure formed on the substrate and including multiple intermetal dielectric layers and multiple metal interconnections placed in the multiple intermetal dielectric layers, the interconnection structure defining a cavity aligned corresponding to the photoelectric transformation device, a moisture absorption barrier layer conformally formed on a top of the interconnection structure and in the cavity; and a light guide unit formed on the moisture absorption barrier layer and including light transmittance material filling the cavity, wherein the moisture absorption barrier layer is formed with a uniform thickness on both sides and a bottom of the cavity and on a top surface of the multiple intermetal dielectric layer.

摘要翻译： 提供了图像传感器及其制造方法以及包括图像传感器的装置，其包括形成有光电转换装置的基板，形成在基板上的互连结构，并且包括多个金属间介电层和多个金属互连 金属间电介质层，所述互连结构限定对应于所述光电转换装置对准的空腔;保形地形成在所述互连结构的顶部和所述空腔中的吸湿阻挡层; 以及导光单元，其形成在吸湿阻挡层上并且包括填充空腔的透光材料，其中吸湿阻挡层在空腔的两侧和底部以及多个顶部表面上形成均匀的厚度 金属间电介质层。