公开(公告)号：US4461347A

公开(公告)日：1984-07-24

申请号：US228739

申请日：1981-01-27

申请人： Howard M. Layton ,  William Fenton

发明人： Howard M. Layton ,  William Fenton

IPC分类号： F28D7/10 ,  F28F19/04 ,  F24H1/20 ,  H05B3/82

CPC分类号： F28F19/04 ,  F28D7/106 ,  Y10S138/03

摘要： A heat exchange assembly for raising a process fluid, such as ultra-pure, de-ionized water, to an elevated temperature without adversely affecting the quality thereof includes coaxially-arranged inner and outer pipes, the annular space therebetween defining a flow passage for the fluid to be heated. The inner pipe is formed of high-strength metal of good thermal conductivity and encloses a heat source, such as steam, circulating heated fluid or an electric heater. The inner pipe is ensheathed by an extruded heat-shrinkable plastic tube of non-reactive material, such as PTFE or polypropylene not exceeding 7 mils in thickness, which is shrunk-fit thereon to form one wall of the flow passage. The opposing wall of the passage is formed by the interior surface of the outer pipe which is also constituted by non-reactive plastic material such as PTFE or polypropylene. Terminations comprising all-plastic unions are provided at the ends of the inner and outer pipes to couple the passageway to inlet and outlet fitting for the process fluid. The outer pipe may be reinforced by a braided outer sleeve.

摘要翻译： 用于将过程流体例如超纯的去离子水升高到高温而不会不利地影响其质量的热交换组件包括同轴布置的内管和外管，其间的环形空间限定用于 要加热的液体 内管由具有良好导热性的高强度金属形成，并且包围热源，例如蒸汽，循环加热流体或电加热器。 内管由非反应性材料的挤出热收缩塑料管（例如聚四氟乙烯或不超过7密耳厚度的聚丙烯）接合，其被收缩配合在其上以形成流动通道的一个壁。 通道的相对壁由外管的内表面形成，其也由诸如PTFE或聚丙烯的非反应性塑料材料构成。 包括全塑性接头的终端设置在内管和外管的端部，以将通道连接到工艺流体的入口和出口接头。 外管可以通过编织的外套筒来加强。

公开(公告)号：US4575299A

公开(公告)日：1986-03-11

申请号：US664299

申请日：1984-10-24

申请人： Howard M. Layton ,  Kenneth Yocis

发明人： Howard M. Layton ,  Kenneth Yocis

IPC分类号： B65G49/04

CPC分类号： B65G49/0459 ,  Y10S134/902

摘要： A work transfer system conveying a work basket in a programmed sequence to the processing tanks of an assembly thereof placed at various positions on a work bench. The system acts to transfer the basket to a selected tank and to properly orient the basket with respect to this tank before lowering the basket therein for processing during a given dwell period, at the conclusion of which the basket is hoisted from the tank and transferred to another tank where the procedure is repeated. Running along the front of the bench is a rail on which a robot is driven to a position in the proximity of the selected tank, the robot supporting a hoist which can be raised or lowered. Cantilevered from the hoist and extending transversely across the bench is a hollow arm having a trolley therein provided with a turntable whose spindle projects upwardly to join the upper end of a loop which encircles the arm, the loop being provided at its lower end with a hand that engages the work basket. The trolley is driven fore or aft to carry the hand to a position generally in line with the selected tank therebelow. The turntable is driven to angle the loop relative to the arm and hence the hand, so as to properly orient the basket with respect to the selected tank.

摘要翻译： 一种工件传送系统，其将编程序列中的工作篮输送到放置在工作台上的各种位置的组件的处理罐。 在给定的停留期间，将篮子转移到选定的储罐并使篮子相对于该罐正确定向，然后将篮子下降到其中以进行处理，在结束时，将篮子从罐中提升并转移到 另一个坦克，其中重复该过程。 沿着工作台前方行驶的轨道是机器人被驱动到所选择的箱体附近的位置的轨道，机器人支撑可以升高或降低的升降机。 悬挂在起重机上并横向延伸穿过工作台的是中空臂，其中具有手推车，其中具有转台，其转轴向上突出以连接围绕臂的环的上端，该环在其下端设置有一个手 从事工作篮。 手推车前后驱动将手放置在与所选择的水槽大体一致的位置。 转盘被驱动以相对于手臂，因此相对于手环转动环，从而使篮子相对于所选择的罐适当地定向。

公开(公告)号：US4827954A

公开(公告)日：1989-05-09

申请号：US640113

申请日：1984-08-13

申请人： Howard M. Layton

发明人： Howard M. Layton

IPC分类号： B65G49/04

CPC分类号： B65G49/0459 ,  Y10S134/902 ,  Y10S700/90

摘要： A work transfer system conveying a work basket in a programmed sequence to the processing tanks of an assembly thereof at various positions on a work bench. The system acts to transfer the basket to a selected tank and to properly orient the basket with respect to this tank before lowering the basket therein for processing for a given dwell period, at the conclusion of which the basket is hoisted from the tank and transferred to another tank where the procedure is repeated. Running parallel to the front side of the bench is a rail on which a robot rides, the robot supporting a hoist carriage which can be raised or lowered. Cantilevered from the carriage is a main arm articulated by an elbow shaft to a forearm that extends over the bench. The forearm is joined by a hand shaft depending therefrom to a hand that engages the handle of the work basket. A main arm motor acts to rotate the elbow shaft and thereby swing the forearm to a position generally aligning the basket with a selected tank therebelow. A forearm motor acts to turn the hand to properly orient the basket with respect to this tank before it is lowered therein by the hoist carriage.

摘要翻译： 一种工作传送系统，其将编程序列中的工作篮输送到工作台上的各种位置的组件的处理罐。 该系统将篮子转移到选定的储罐，并且在将篮子放在其中以便在给定的停留时间内进行处理之前相对于该罐正确地定向篮子，在结束时，将篮子从罐中提升并转移到 另一个坦克，其中重复该过程。 平行于工作台前侧的平行轨道是机器人骑行的轨道，机器人支撑可升起或降低的起重滑架。 从托架悬臂是一个主臂，由肘轴铰接到在工作台上延伸的前臂。 前臂由一根手轴连接在一起，从而与手工接合到工作筐的手柄上。 主臂马达用于旋转肘轴，从而使前臂摆动到将篮子与选定的储罐大致对准的位置。 前臂马达用来转动手把篮子相对于这个坦克正确定位，然后由起重机托架下降。

公开(公告)号：US4493333A

公开(公告)日：1985-01-15

申请号：US494383

申请日：1983-05-13

申请人： Howard M. Layton

发明人： Howard M. Layton

IPC分类号： B65G49/04 ,  B08B3/04

CPC分类号： B65G49/0459 ,  Y10S134/902 ,  Y10S700/90

摘要： A mechanized work transfer system in which a robot assembly riding on a horizontal rail and driven by an external motor acts to convey a basket carrying work along a row of processing stages on a work bench. The assembly includes a robot provided with an elevator operated by an internal motor which serves to lower the basket at each stage on the work bench and to deposit it into a processing tank for a predetermined dwell period, after which the basket is hoisted out of the tank and transferred to another stage where the procedure is repeated. To render the assembly substantially immune to corrosive vapors emanating from the tanks, the robot housing is sectioned into left and right compartments, the left compartment being reserved for those moving and stationary components which can be fabricated of corrosion-resistant materials. The right compartment is reserved for the internal motor and other metal components which are vulnerable to corrosive vapors, this compartment being purged by a gas to prevent the entry of vapors therein.

摘要翻译： 一种机械化工作传送系统，其中骑在水平导轨上并由外部电动机驱动的机器人组件用于将沿着一排处理阶段的工作台运送在工作台上。 该组件包括机器人，该机器人具有由内部马达操作的电梯，该电梯用于在工作台上的每个阶段降低篮子并将其沉积到处理槽中达预定的停留时间，此后将篮子从 并转移到另一个重复程序的阶段。 为了使组件基本上免于从罐发出的腐蚀性蒸汽，机器人壳体被分成左右隔室，左隔室被保留用于可由耐腐蚀材料制成的移动和固定部件。 右室是为内部电机和其他易受腐蚀性蒸汽影响的金属部件而预留的，这个隔间被气体吹扫，以防止蒸汽进入其中。

公开(公告)号：US5238477A

公开(公告)日：1993-08-24

申请号：US947924

申请日：1992-09-21

申请人： Howard M. Layton

发明人： Howard M. Layton

IPC分类号： B01D39/20 ,  B01D46/52

CPC分类号： B01D46/521 ,  B01D39/2034 ,  B01D46/10

摘要： A submicron particle filter unit of the Hepa type adapted to be interposed between a source of pressurized gas and a work-processing region to provide an environment therefor free of particles and other contaminants. The membrane of the unit is fabricated from a continuous, elongated, porous metal sheet accordion-folded to define a uniform series of pleats forming a media pack having an entry and an exit face, the pack being clamped with gaskets between the side plates of a frame or welded or otherwise joined thereto. Pressurized gas from the source applied to the entry face of the pack is filtered therethrough to yield at its exit face a laminar flow of gas which creates a clean environment for the work-producing region.

摘要翻译： 适于插入加压气体源和加工区域之间的Hepa型亚微米粒子过滤器单元，以提供不含颗粒和其它污染物的环境。 该单元的膜由一种连续的，细长的，多孔的多孔金属薄片制成，折叠式折叠以确定形成具有入口和出口面的介质包的均匀系列的褶皱，该包装在垫片的侧板之间被夹紧 框架或焊接或以其他方式连接到其上。 来自施加到包装入口面的源的加压气体被过滤通过，从而在其出口处产生气流的层流，为工作区域产生清洁的环境。

公开(公告)号：US5899001A

公开(公告)日：1999-05-04

申请号：US858490

申请日：1997-05-19

申请人： Howard M. Layton

发明人： Howard M. Layton

IPC分类号： F26B21/00 ,  F26B21/02 ,  H01L21/00 ,  F26B21/06

CPC分类号： H01L21/67034 ,  F26B21/003 ,  F26B21/02

摘要： A system adapted to dry microelectronic, optical or other critical parts which in the course of their processing are rendered wet and become contaminated unless fully dried. The system includes an upright drying chamber having an inlet at its lower end and an outlet at its upper end, the parts to be dried being supported in a work zone between the inlet and outlet. Coupled to the inlet of the drying chamber is an input chamber having a blower therein which blows heated gas into the drying chamber through a filter unit covering the inlet thereto The blower creates a negative pressure in the input chamber and a positive pressure in the drying chamber in which the filtered heated gas acts to evaporate moisture from the parts in the work zone. Surrounding the drying chamber and communicating with the input chamber is an annular duct which due to the negative pressure in the input chamber draws heated moist gas from the outlet of the drying chamber into the input chamber for recirculation in the drying chamber in a toroidal flow patterns Because the heated gas flowing through the annular duct envelopes the drying chamber, it acts to maintain this chamber at a uniform operating temperature to promote uniform drying of the parts.

摘要翻译： 一种适于干燥微电子，光学或其他关键部件的系统，其在处理过程中变湿并变得污染，除非完全干燥。 该系统包括立式干燥室，其下端具有入口，其上端具有出口，待干燥的部件被支撑在入口和出口之间的工作区域中。 耦合到干燥室的入口是具有鼓风机的输入室，其中通过覆盖入口的过滤器单元将加热的气体吹入干燥室。鼓风机在输入室中产生负压，并在干燥室中产生正压 其中过滤的加热气体用于蒸发来自工作区域中的部件的水分。 围绕干燥室并与输入室连通的是环形管道，其由于输入室中的负压将加热的湿气从干燥室的出口吸入输入室，以在环形流动模式中在干燥室中再循环 因为流过环形管道的加热气体包围干燥室，所以它用于将该室保持在均匀的工作温度以促进部件的均匀干燥。

公开(公告)号：US4466454A

公开(公告)日：1984-08-21

申请号：US443894

申请日：1982-11-23

申请人： Howard M. Layton

发明人： Howard M. Layton

IPC分类号： B65G49/04 ,  B08B3/04

CPC分类号： B65G49/0459 ,  Y10S134/902 ,  Y10S700/90

摘要： An automatic work transfer system for conveying a basket carrying work through a row of processing stages at a work station in any desired sequence. The basket is lowered into a tank at each stage and oriented therein for processing for a predetermined dwell period, at the conclusion of which the basket is hoisted out of the tank and transferred to the next stage where the procedure is repeated. The system includes a supporting rail laterally displaced from the row of stages and parallel thereto. Riding on the rail is a robot provided with a pair of vertical shafts supported on an elevator. Cantilevered from the shafts are a pair of arms which extend over the stages, the ends of the arms being pivotally connected to a cross piece. Depending from the center of the cross piece is a rod terminating in a hand adapted to engage the handle of the basket. Thus when the robot advances on the rail the hand is then shifted along a horizontal X-axis to a position in general alignment with a selected stage, when the elevator is operated the hand is raised or lowered with respect to the selected stage along a vertical Y-axis normal to the X-axis; and when the shafts are simultaneously rotated, the hand swings, but without rotation, relative to a Y-axis perpendicular both to the X and Y axis to orient the basket with respect to the stage. Separately controllable X, Y and Z motors are subject to programmed instructions appropriate to the processing to be carried out.

摘要翻译： 一种自动工作传送系统，用于以任何期望的顺序，在工位上传送一篮子搬运工作通过一排处理阶段。 将篮子在每个阶段下降到罐中并定向在其中以进行预定的停留时间处理，结束时，将篮子从罐中提出并转移到重复该过程的下一个阶段。 该系统包括从行级并且平行于其的横向偏移的支撑轨道。 骑在轨道上的是机器人，它设有一对支撑在电梯上的垂直轴。 从轴悬伸的是一对臂，其延伸越过台阶，臂的端部枢转地连接到横梁上。 取决于十字件的中心是杆，其终止于适于接合篮的手柄的手中。 因此，当机器人在轨道上行进时，手沿着水平X轴移动到与所选阶段大体对准的位置，当电梯操作时，手相对于所选择的台沿垂直方向升高或降低 Y轴垂直于X轴; 并且当轴同时旋转时，手相对于垂直于X和Y轴的Y轴摆动但不旋转以使篮相对于平台定向。 单独控制的X，Y和Z电机受制于适合要进行处理的程序指令。

公开(公告)号：US5158586A

公开(公告)日：1992-10-27

申请号：US817329

申请日：1992-01-06

申请人： Howard M. Layton

发明人： Howard M. Layton

IPC分类号： B01D39/20 ,  B01D46/52

CPC分类号： B01D46/521 ,  B01D39/2034 ,  B01D46/10

摘要： A submicron particle filter unit of the Hepa type adapted to be interposed between a source of pressurized gas and a work-processing region to provide an environment therefor free of particles and other contaminants. The membrane of the unit is fabricated from a continuous, elongated, porous metal sheet accordion-folded to define a uniform series of pleats forming a media pack having an entry and an exit face, the pack being clamped with gaskets between the side plates of a frame or welded or otherwise joined thereto. Pressurized gas from the source applied to the entry face of the pack is filtered therethrough to yield at its exit face a laminar flow of gas which creates a clean environment for the work-producing region.

摘要翻译： 适于插入加压气体源和加工区域之间的Hepa型亚微米粒子过滤器单元，以提供不含颗粒和其它污染物的环境。 该单元的膜由一种连续的，细长的，多孔的多孔金属薄片制成，折叠式折叠以确定形成具有入口和出口面的介质包的均匀系列的褶皱，该包装在垫片的侧板之间被夹紧 框架或焊接或以其他方式连接到其上。 来自施加到包装入口面的源的加压气体被过滤通过，从而在其出口处产生气流的层流，为工作区域产生清洁的环境。

公开(公告)号：US5105557A

公开(公告)日：1992-04-21

申请号：US667635

申请日：1991-03-11

申请人： Jozsef T. Vadasz ,  Howard M. Layton

发明人： Jozsef T. Vadasz ,  Howard M. Layton

IPC分类号： F26B3/347 ,  F26B5/02 ,  F26B7/00 ,  F26B17/34 ,  F26B23/08 ,  G02B3/00 ,  H01L21/00 ,  H01L21/304

CPC分类号： H01L21/67034 ,  F26B5/02 ,  F26B7/00

摘要： A system for drying microelectronic, optical and other parts which are rendered wet in the course of their processing, the system functioning rapidly to dry these parts so that they are free of contaminants. The system includes a drying chamber having a work zone in which the wet parts are held in a removable carrier resting on a stand, the work zone being heated to promote evaporation. Flowing through the work zone and passing over the wet parts is a gaseous stream which entrains vapors emitted from the parts and discharges the vapors from the chamber. To accelerate the evaporative process, a vibration generator is operatively coupled to the stand or to a vibration coupling device to impart vibrations thereto which are transmitted to the wet parts in the carrier, causing liquid drops on the surfaces of the parts to fractionate into droplets or to otherwise disperse and spread the liquid over a larger area, thereby greatly increasing the aggregate exposed surface area of the liquid.

摘要翻译： 用于干燥在其加工过程中变湿的微电子，光学和其它部件的系统，该系统快速地干燥这些部件，使得它们不含污染物。 该系统包括具有工作区域的干燥室，其中湿部件保持在可移动的托架上，搁置在支架上，工作区域被加热以促进蒸发。 流过工作区域并通过湿部件是气流，其夹带从部件排出的蒸气并将蒸气从室排出。 为了加速蒸发过程，振动发生器可操作地联接到支架或振动耦合装置以向其传递振动，其传递到载体中的湿部，导致部件表面上的液滴分馏成液滴或 否则将液体分散并扩散在较大的区域上，从而大大增加了液体的聚集露出表面积。

公开(公告)号：US5048201A

公开(公告)日：1991-09-17

申请号：US552165

申请日：1990-07-13

申请人： Howard M. Layton

发明人： Howard M. Layton

IPC分类号： F26B21/00 ,  H01L21/00

CPC分类号： H01L21/67034 ,  F26B21/003

摘要： A system for drying microelectronic, optical and other parts that in the course of their processing are rendered wet with solvents or other liquids, which if not fully evaporated from the parts will contaminate and impair their quality. The system includes an open-ended drying chamber having a work zone intermediate its sides in which the parts to be dried are supported for exposure to a gas stream. One end of the chamber defines a gas inlet to admit the gas stream which sweeps the entire chamber. Coupled to the drying chamber is a pressure chamber in which a submicron particle filter unit of the Hepa type producing a relatively low pressure drop is disposed to cover the gas inlet. Gas fed into the pressure chamber and heated to an elevated temperature imposes a distributed pressure on the entry face of the filter unit and passes therethrough to yield at its exit face a laminar stream of hot gas that subjects the parts in the work zone to a substantially uniform drying action, so that all parts being treated are fully dried.

摘要翻译： 用于干燥微电子，光学和其他部件的系统在其加工过程中被溶剂或其他液体弄湿，如果不完全蒸发部件会污染并损害其质量。 该系统包括开放式干燥室，其具有位于其两侧之间的工作区，待干燥部分被支撑以暴露于气流中。 室的一端限定了气体入口以允许吹扫整个室的气流。 耦合到干燥室的是压力室，其中设置产生相对低压降的Hepa型亚微米颗粒过滤器单元以覆盖气体入口。 进入压力室并加热到高温的气体在过滤器单元的进入面上施加分布的压力，并将其通过，从而在其出口面产生层流的热气体，其使工作区域中的部件基本上 均匀的干燥作用，使被处理的所有部分完全干燥。