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公开(公告)号:US07354168B2
公开(公告)日:2008-04-08
申请号:US10848210
申请日:2004-05-18
申请人: Hubert Holderer , Andreas Heisler , Wolfgang Singer , Markus Weiss , Andreas Seifert , Frank Melzer , Heinz Mann , Jurgen Faltus , Berndt Warm , Stefan Dornheim
发明人: Hubert Holderer , Andreas Heisler , Wolfgang Singer , Markus Weiss , Andreas Seifert , Frank Melzer , Heinz Mann , Jurgen Faltus , Berndt Warm , Stefan Dornheim
CPC分类号: G03F7/70075 , G02B5/09 , G02B7/1821 , G02B7/1824 , G02B7/198 , G02B26/0833 , G03F7/70108 , G03F7/70141 , G03F7/70175 , G03F7/702
摘要: A facet mirror (10) is provided with a number of mirror facets (11), in which the mirror facets (11) respectively have a spherical or conical facet body (17) with a reflecting surface (12). The side of the facet body (17) averted from the reflecting surface (12) is mounted in a bearing device (15).
摘要翻译: 小面反射镜(10)设置有多个镜面(11),其中镜面(11)分别具有带有反射表面(12)的球形或圆锥形小面体(17)。 从反射面(12)避开的小面体(17)的一侧安装在轴承装置(15)中。
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公开(公告)号:US20050030653A1
公开(公告)日:2005-02-10
申请号:US10848210
申请日:2004-05-18
申请人: Hubert Holderer , Andreas Heisler , Wolfgang Singer , Markus Weiss , Andreas Seifert , Frank Melzer , Heinz Mann , Jurgen Faltus , Berndt Warm , Stefan Dornheim
发明人: Hubert Holderer , Andreas Heisler , Wolfgang Singer , Markus Weiss , Andreas Seifert , Frank Melzer , Heinz Mann , Jurgen Faltus , Berndt Warm , Stefan Dornheim
CPC分类号: G03F7/70075 , G02B5/09 , G02B7/1821 , G02B7/1824 , G02B7/198 , G02B26/0833 , G03F7/70108 , G03F7/70141 , G03F7/70175 , G03F7/702
摘要: Facet mirror having a number of mirror facets A facet mirror (10) is provided with a number of mirror facets (11), in which the mirror facets (11) respectively have a spherical or conical facet body (17) with a reflecting surface (12). The side of the facet body (17) averted from the reflecting surface (12) is mounted in a bearing device (15).
摘要翻译: 具有多个镜面的面镜具有多个镜面(11),其中镜面(11)分别具有球面或圆锥形小面体(17),其具有反射表面(11) 12)。 从反射面(12)避开的小面体(17)的一侧安装在轴承装置(15)中。
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