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公开(公告)号：US07354168B2
公开(公告)日：2008-04-08
申请号：US10848210
申请日：2004-05-18
申请人： Hubert Holderer , Andreas Heisler , Wolfgang Singer , Markus Weiss , Andreas Seifert , Frank Melzer , Heinz Mann , Jurgen Faltus , Berndt Warm , Stefan Dornheim
发明人： Hubert Holderer , Andreas Heisler , Wolfgang Singer , Markus Weiss , Andreas Seifert , Frank Melzer , Heinz Mann , Jurgen Faltus , Berndt Warm , Stefan Dornheim
CPC分类号： G03F7/70075 , G02B5/09 , G02B7/1821 , G02B7/1824 , G02B7/198 , G02B26/0833 , G03F7/70108 , G03F7/70141 , G03F7/70175 , G03F7/702
摘要： A facet mirror (10) is provided with a number of mirror facets (11), in which the mirror facets (11) respectively have a spherical or conical facet body (17) with a reflecting surface (12). The side of the facet body (17) averted from the reflecting surface (12) is mounted in a bearing device (15).
摘要翻译： 小面反射镜（10）设置有多个镜面（11），其中镜面（11）分别具有带有反射表面（12）的球形或圆锥形小面体（17）。 从反射面（12）避开的小面体（17）的一侧安装在轴承装置（15）中。
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公开(公告)号：US20050030653A1
公开(公告)日：2005-02-10
申请号：US10848210
申请日：2004-05-18
申请人： Hubert Holderer , Andreas Heisler , Wolfgang Singer , Markus Weiss , Andreas Seifert , Frank Melzer , Heinz Mann , Jurgen Faltus , Berndt Warm , Stefan Dornheim
发明人： Hubert Holderer , Andreas Heisler , Wolfgang Singer , Markus Weiss , Andreas Seifert , Frank Melzer , Heinz Mann , Jurgen Faltus , Berndt Warm , Stefan Dornheim
CPC分类号： G03F7/70075 , G02B5/09 , G02B7/1821 , G02B7/1824 , G02B7/198 , G02B26/0833 , G03F7/70108 , G03F7/70141 , G03F7/70175 , G03F7/702
摘要： Facet mirror having a number of mirror facets A facet mirror (10) is provided with a number of mirror facets (11), in which the mirror facets (11) respectively have a spherical or conical facet body (17) with a reflecting surface (12). The side of the facet body (17) averted from the reflecting surface (12) is mounted in a bearing device (15).
摘要翻译： 具有多个镜面的面镜具有多个镜面（11），其中镜面（11）分别具有球面或圆锥形小面体（17），其具有反射表面（11） 12）。 从反射面（12）避开的小面体（17）的一侧安装在轴承装置（15）中。
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公开(公告)号：US07090362B2
公开(公告)日：2006-08-15
申请号：US10841846
申请日：2004-05-07
申请人： Hubert Holderer , Andreas Heisler , Wolfgang Singer , Markus Weiss , Andreas Seifert , Frank Melzer , Heinz Mann
发明人： Hubert Holderer , Andreas Heisler , Wolfgang Singer , Markus Weiss , Andreas Seifert , Frank Melzer , Heinz Mann
CPC分类号： G03F7/70258 , G02B5/09 , G02B7/1821 , G02B7/1824 , G02B26/0816 , G03F7/70075 , G03F7/70141 , G03F7/702 , G03F7/70275
摘要： In a facet mirror with a number of mirror facets, wherein the mirror facets are provided with reflecting surfaces, the mirror facets are mounted jointly in a basic body via bearing devices. The mirror facets comprise mirror bodies contacting at the periphery with the bearing devices via a surface, line or point contact. The preferred field of use of the facet mirrors is a projection objective of a projection exposure machine in microlithography for fabricating semiconductor elements.
摘要翻译： 在具有多个镜面的小平面镜中，其中镜面设置有反射面，镜面通过轴承装置联合地安装在基体内。 镜面包括通过表面，线或点接触在外周与轴承装置接触的镜体。 小平面镜的优选使用领域是用于制造半导体元件的微光刻中的投影曝光机的投影物镜。
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公开(公告)号：US20050030656A1
公开(公告)日：2005-02-10
申请号：US10841846
申请日：2004-05-07
申请人： Hubert Holderer , Andres Heisler , Wolfgang Singer , Markus Weiss , Andreas Seifert , Frank Melzer , Heinz Mann
发明人： Hubert Holderer , Andres Heisler , Wolfgang Singer , Markus Weiss , Andreas Seifert , Frank Melzer , Heinz Mann
CPC分类号： G03F7/70258 , G02B5/09 , G02B7/1821 , G02B7/1824 , G02B26/0816 , G03F7/70075 , G03F7/70141 , G03F7/702 , G03F7/70275
摘要： In a facet mirror with a number of mirror facets, wherein the mirror facets are provided with reflecting surfaces, the mirror facets are mounted jointly in a basic body via bearing devices. The mirror facets comprise mirror bodies contacting at the periphery with the bearing devices via a surface, line or point contact. The preferred field of use of the facet mirrors is a projection objective of a projection exposure machine in microlithography for fabricating semiconductor elements.
摘要翻译： 在具有多个镜面的小平面镜中，其中镜面设置有反射面，镜面通过轴承装置联合地安装在基体内。 镜面包括通过表面，线或点接触在外周与轴承装置接触的镜体。 小平面镜的优选使用领域是用于制造半导体元件的微光刻中的投影曝光机的投影物镜。
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公开(公告)号：US20070206301A1
公开(公告)日：2007-09-06
申请号：US11695626
申请日：2007-04-03
IPC分类号： G02B5/08
CPC分类号： B82Y10/00 , G02B7/1824 , G03F7/70166 , G03F7/702 , G03F7/70825
摘要： In a method for the production of a facetted mirror 24 having a plurality of mirror facets 12 and 12′, which have mirror surfaces 15 and are fitted into reception bores 22, 22′ of a support plate 16, the mirror facets 12, 12′ are made in a first method step. At least one of the mirror facets is fitted into the associated reception bore of the support plate in a second method step, after which the ACTUAL position of the optical axis of at least one mirror surface of an associated mirror facet 12, 12′ fitted into the support plate is respectively determined in a third step and compared with a SET position of a predetermined optical axis. Knowing the measured values determined for the at least one mirror facet 12, 12′ in the third method step, reprocessing of the mirror facet and/or of the reception bore is subsequently carried out in a further method step if there is an angular deviation between the ACTUAL position and the SET position.
摘要翻译： 在制造具有多个镜面12和12'的分面镜24的方法中，其具有镜面15并被装配到支撑板16的接收孔22,22'中，镜面12,12' 在第一方法步骤中制成。 在第二方法步骤中，至少一个镜面被安装到支撑板的相关联的接收孔中，之后将相关镜面12,12'的至少一个镜面的光轴的ACTUAL位置嵌入 分别在第三步骤中确定支撑板并与预定光轴的SET位置进行比较。 了解在第三方法步骤中对于至少一个镜面12,12'确定的测量值，随后在另外的方法步骤中进行镜面和/或接收孔的再处理，如果在第二方法步骤之间存在角度偏差 ACTUAL位置和SET位置。
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公开(公告)号：US07802891B2
公开(公告)日：2010-09-28
申请号：US12338049
申请日：2008-12-18
IPC分类号： G02B5/08
CPC分类号： B82Y10/00 , G02B7/1824 , G03F7/70166 , G03F7/702 , G03F7/70825
摘要： A faceted mirror apparatus includes a support plate having a plurality of stepped reception bores into which are fitted the base portions of respective ones of a plurality of mirror facets having mirrored surfaces. An outer surface of each of the facets bears on an inner wall to provide a stable alignment of the optical axes of the mirrored surfaces such that the apparatus generates a beam of rays from impinging rays.
摘要翻译： 分面镜装置包括具有多个阶梯式接收孔的支撑板，其中装配有具有镜面的多个镜面中相应的一个的基部。 每个小面的外表面承载在内壁上以提供镜面的光轴的稳定对准，使得该装置从入射光线产生射线。
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公开(公告)号：US07246909B2
公开(公告)日：2007-07-24
申请号：US10936317
申请日：2004-09-08
IPC分类号： G02B5/08
CPC分类号： B82Y10/00 , G02B7/1824 , G03F7/70166 , G03F7/702 , G03F7/70825
摘要： In a method for the production of a facetted mirror 24 having a plurality of mirror facets 12 and 12′, which have mirror surfaces 15 and are fitted into reception bores 22, 22′ of a support plate 16, the mirror facets 12, 12′ are made in a first method step. At least one of the mirror facets is fitted into the associated reception bore of the support plate in a second method step, after which the ACTUAL position of the optical axis of at least one mirror surface of an associated mirror facet 12, 12′ fitted into the support plate is respectively determined in a third step and compared with a SET position of a predetermined optical axis. Knowing the measured values determined for the at least one mirror facet 12, 12′ in the third method step, reprocessing of the mirror facet and/or of the reception bore is subsequently carried out in a further method step if there is an angular deviation between the ACTUAL position and the SET position.
摘要翻译： 在制造具有多个镜面12和12'的分面镜24的方法中，其具有镜面15并被装配到支撑板16的接收孔22,22'中，镜面12,12' 在第一方法步骤中制成。 在第二方法步骤中，至少一个镜面被安装到支撑板的相关联的接收孔中，之后将相关联的镜面12,12'的至少一个镜面的光轴的ACTUAL位置嵌入 分别在第三步骤中确定支撑板并与预定光轴的SET位置进行比较。 了解在第三方法步骤中对于至少一个镜面12,12'确定的测量值，随后在另外的方法步骤中进行镜面和/或接收孔的再处理，如果在第二方法步骤之间存在角度偏差 ACTUAL位置和SET位置。
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公开(公告)号：US20090097142A1
公开(公告)日：2009-04-16
申请号：US12338049
申请日：2008-12-18
CPC分类号： B82Y10/00 , G02B7/1824 , G03F7/70166 , G03F7/702 , G03F7/70825
摘要： A faceted mirror apparatus includes a support plate having a plurality of stepped reception bores into which are fitted the base portions of respective ones of a plurality of mirror facets having mirrored surfaces. An outer surface of each of the facets bears on an inner wall to provide a stable alignment of the optical axes of the mirrored surfaces such that the apparatus generates a beam of rays from impinging rays.
摘要翻译： 分面镜装置包括具有多个阶梯式接收孔的支撑板，其中装配有具有镜面的多个镜面中相应的一个的基部。 每个小面的外表面承载在内壁上以提供镜面的光轴的稳定对准，使得该装置从入射光线产生射线。
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公开(公告)号：US20050111067A1
公开(公告)日：2005-05-26
申请号：US10936317
申请日：2004-09-08
CPC分类号： B82Y10/00 , G02B7/1824 , G03F7/70166 , G03F7/702 , G03F7/70825
摘要： In a method for the production of a facetted mirror 24 having a plurality of mirror facets 12 and 12′, which have mirror surfaces 15 and are fitted into reception bores 22, 22′ of a support plate 16, the mirror facets 12, 12′ are made in a first method step. At least one of the mirror facets is fitted into the associated reception bore of the support plate in a second method step, after which the ACTUAL position of the optical axis of at least one mirror surface of an associated mirror facet 12, 12′ fitted into the support plate is respectively determined in a third step and compared with a SET position of a predetermined optical axis. Knowing the measured values determined for the at least one mirror facet 12, 12′ in the third method step, reprocessing of the mirror facet and/or of the reception bore is subsequently carried out in a further method step if there is an angular deviation between the ACTUAL position and the SET position.
摘要翻译： 在制造具有多个镜面12和12'的分面镜24的方法中，其具有镜面15并被装配到支撑板16的接收孔22,22'中，镜面12,12' 在第一方法步骤中制成。 在第二方法步骤中，至少一个镜面被安装到支撑板的相关联的接收孔中，之后将相关联的镜面12,12'的至少一个镜面的光轴的ACTUAL位置嵌入 分别在第三步骤中确定支撑板并与预定光轴的SET位置进行比较。 了解在第三方法步骤中对于至少一个镜面12,12'确定的测量值，随后在另外的方法步骤中进行镜面和/或接收孔的再处理，如果在第二方法步骤之间存在角度偏差 ACTUAL位置和SET位置。
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公开(公告)号：US06836530B2
公开(公告)日：2004-12-28
申请号：US10163262
申请日：2002-06-05
申请人： Wolfgang Singer , Markus Weiss , Bernd Kleemann , Karlfried Osterried , Johannes Wangler , Frank Melzer , Andreas Heisler , Vadim Yevgenyevich Banine
发明人： Wolfgang Singer , Markus Weiss , Bernd Kleemann , Karlfried Osterried , Johannes Wangler , Frank Melzer , Andreas Heisler , Vadim Yevgenyevich Banine
IPC分类号： G21K500
CPC分类号： G03F7/70158 , G03F7/702 , G21K1/06
摘要： There is provided an illumination system for wavelengths of ≦100 nm, having an object plane and a field plane. The illumination system includes a grating element having a plurality of gratings, and a diaphragm. The diaphragm is arranged after the grating element in a beam path from the object plane to the field plane.
摘要翻译： 提供了具有物体平面和场平面的<= 100nm波长的照明系统。 照明系统包括具有多个光栅的光栅元件和隔膜。 隔膜设置在从物体平面到场平面的光束路径中的光栅元件之后。
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