SEMICONDUCTOR DEVICE
    2.
    发明申请
    SEMICONDUCTOR DEVICE 有权
    半导体器件

    公开(公告)号:US20170040335A1

    公开(公告)日:2017-02-09

    申请号:US15168349

    申请日:2016-05-31

    IPC分类号: H01L27/115

    摘要: A semiconductor device includes a substrate, a plurality of memory cell arrays, and an air gap structure. The substrate includes a cell region, a peripheral circuit region, and a boundary region. The boundary region is between the cell region and the peripheral circuit region. The plurality of memory cell arrays are on the cell region. The air gap structure includes a trench formed in the boundary region of the substrate. The air gap structure defines an air gap.

    摘要翻译: 半导体器件包括衬底,多个存储单元阵列和气隙结构。 基板包括单元区域,外围电路区域和边界区域。 边界区域在单元区域和外围电路区域之间。 多个存储单元阵列位于单元区域上。 气隙结构包括形成在基板的边界区域中的沟槽。 气隙结构限定气隙。