Thin film transistor array substrate, method for manufacturing the same and system for inspecting the substrate
    1.
    发明授权
    Thin film transistor array substrate, method for manufacturing the same and system for inspecting the substrate 有权
    薄膜晶体管阵列基板及其制造方法以及检查基板的系统

    公开(公告)号:US07863620B2

    公开(公告)日:2011-01-04

    申请号:US12574915

    申请日:2009-10-07

    IPC分类号: H01L29/76 H01L21/00

    摘要: Disclosed is a thin film transistor substrate and a system for inspecting the same. The thin film transistor substrate comprises gate wiring formed on an insulation substrate and including gate lines, and gate electrodes and gate pads connected to the gate lines; a gate insulation layer covering the gate wiring; a semiconductor layer formed over the gate insulation layer; data wiring formed over the gate insulation layer and including data pads; a protection layer covering the data wiring; auxiliary pads connected to the data pads through contact holes formed in the protection layer; and a pad auxiliary layer formed protruding a predetermined height under the data pads. The inspection system for determining whether a thin film transistor substrate is defective, in which the thin film transistor substrate comprises gate wiring including gate lines, gate electrodes and gate pads, and data wiring including source electrodes and drain electrodes, includes a probe pin for contacting the gate pads or data pads and transmitting a corresponding signal, wherein a contact tip at a distal end of the probe pin for contacting the gate pads or the data pads is rounded, and a radius of the rounded contact tip is 2 μm or less, or the rounded contact tip is coated with gold (Au).

    摘要翻译: 公开了一种薄膜晶体管基板及其检查系统。 薄膜晶体管基板包括形成在绝缘基板上并包括栅极线的栅极布线,以及连接到栅极线的栅电极和栅极焊盘; 覆盖栅极布线的栅极绝缘层; 形成在所述栅绝缘层上的半导体层; 数据布线形成在栅极绝缘层上并包括数据焊盘; 覆盖数据线的保护层; 辅助焊盘通过形成在保护层中的接触孔连接到数据焊盘; 以及在数据焊盘下方突出预定高度形成的焊盘辅助层。 用于确定薄膜晶体管基板是否缺陷的检查系统,其中薄膜晶体管基板包括包括栅极线,栅电极和栅极焊盘的栅极布线,以及包括源电极和漏电极的数据布线,包括用于接触的探针 所述栅极焊盘或数据焊盘并传输相应的信号,其中用于接触所述栅极焊盘或所述数据焊盘的所述探针的远端处的接触尖端是圆形的,并且所述圆形接触尖端的半径为2μm或更小, 或圆形接触尖端涂有金(Au)。

    Thin film transistor array substrate, method for manufacturing the same and system for inspecting the substrate
    2.
    发明申请
    Thin film transistor array substrate, method for manufacturing the same and system for inspecting the substrate 有权
    薄膜晶体管阵列基板及其制造方法以及检查基板的系统

    公开(公告)号:US20050087770A1

    公开(公告)日:2005-04-28

    申请号:US10986930

    申请日:2004-11-15

    摘要: Disclosed is a thin film transistor substrate and a system for inspecting the same. The thin film transistor substrate comprises gate wiring formed on an insulation substrate and including gate lines, and gate electrodes and gate pads connected to the gate lines; a gate insulation layer covering the gate wiring; a semiconductor layer formed over the gate insulation layer; data wiring formed over the gate insulation layer and including data pads; a protection layer covering the data wiring; auxiliary pads connected to the data pads through contact holes formed in the protection layer; and a pad auxiliary layer formed protruding a predetermined height under the data pads. The inspection system for determining whether a thin film transistor substrate is defective, in which the thin film transistor substrate comprises gate wiring including gate lines, gate electrodes and gate pads, and data wiring including source electrodes and drain electrodes, includes a probe pin for contacting the gate pads or data pads and transmitting a corresponding signal, wherein a contact tip at a distal end of the probe pin for contacting the gate pads or the data pads is rounded, and a radius of the rounded contact tip is 2 μm or less, or the rounded contact tip is coated with gold (Au).

    摘要翻译: 公开了一种薄膜晶体管基板及其检查系统。 薄膜晶体管基板包括形成在绝缘基板上并包括栅极线的栅极布线,以及连接到栅极线的栅电极和栅极焊盘; 覆盖栅极布线的栅极绝缘层; 形成在所述栅绝缘层上的半导体层; 数据布线形成在栅极绝缘层上并包括数据焊盘; 覆盖数据线的保护层; 辅助焊盘通过形成在保护层中的接触孔连接到数据焊盘; 以及在数据焊盘下方突出预定高度形成的焊盘辅助层。 用于确定薄膜晶体管基板是否缺陷的检查系统,其中薄膜晶体管基板包括包括栅极线,栅电极和栅极焊盘的栅极布线,以及包括源电极和漏电极的数据布线,包括用于接触的探针 栅极焊盘或数据焊盘并传输相应的信号,其中用于接触栅极焊盘或数据焊盘的探针的远端处的接触尖端是圆形的,并且圆形接触尖端的半径为2μm或更小, 或圆形接触尖端涂有金(Au)。

    Thin film transistor array substrate, method for manufacturing the same and system for inspecting the substrate

    公开(公告)号:US07626203B2

    公开(公告)日:2009-12-01

    申请号:US11668345

    申请日:2007-01-29

    IPC分类号: H01L29/76 H01L21/00 H01L29/04

    摘要: Disclosed is a thin film transistor substrate and a system for inspecting the same. The thin film transistor substrate comprises gate wiring formed on an insulation substrate and including gate lines, and gate electrodes and gate pads connected to the gate lines; a gate insulation layer covering the gate wiring; a semiconductor layer formed over the gate insulation layer; data wiring formed over the gate insulation layer and including data pads; a protection layer covering the data wiring; auxiliary pads connected to the data pads through contact holes formed in the protection layer; and a pad auxiliary layer formed protruding a predetermined height under the data pads. The inspection system for determining whether a thin film transistor substrate is defective, in which the thin film transistor substrate comprises gate wiring including gate lines, gate electrodes and gate pads, and data wiring including source electrodes and drain electrodes, includes a probe pin for contacting the gate pads or data pads and transmitting a corresponding signal, wherein a contact tip at a distal end of the probe pin for contacting the gate pads or the data pads is rounded, and a radius of the rounded contact tip is 2 μm or less, or the rounded contact tip is coated with gold (Au).

    Thin film transistor array substrate, method for manufacturing the same and system for inspecting the substrate
    4.
    发明授权
    Thin film transistor array substrate, method for manufacturing the same and system for inspecting the substrate 有权
    薄膜晶体管阵列基板及其制造方法以及检查基板的系统

    公开(公告)号:US07187003B2

    公开(公告)日:2007-03-06

    申请号:US10986930

    申请日:2004-11-15

    IPC分类号: H01L31/036 H01L21/00

    摘要: Disclosed is a thin film transistor substrate and a system for inspecting the same. The thin film transistor substrate comprises gate wiring formed on an insulation substrate and including gate lines, and gate electrodes and gate pads connected to the gate lines; a gate insulation layer covering the gate wiring; a semiconductor layer formed over the gate insulation layer; data wiring formed over the gate insulation layer and including data pads; a protection layer covering the data wiring; auxiliary pads connected to the data pads through contact holes formed in the protection layer; and a pad auxiliary layer formed protruding a predetermined height under the data pads. The inspection system for determining whether a thin film transistor substrate is defective, in which the thin film transistor substrate comprises gate wiring including gate lines, gate electrodes and gate pads, and data wiring including source electrodes and drain electrodes, includes a probe pin for contacting the gate pads or data pads and transmitting a corresponding signal, wherein a contact tip at a distal end of the probe pin for contacting the gate pads or the data pads is rounded, and a radius of the rounded contact tip is 2 μm or less, or the rounded contact tip is coated with gold (Au).

    摘要翻译: 公开了一种薄膜晶体管基板及其检查系统。 薄膜晶体管基板包括形成在绝缘基板上并包括栅极线的栅极布线,以及连接到栅极线的栅电极和栅极焊盘; 覆盖栅极布线的栅极绝缘层; 形成在所述栅绝缘层上的半导体层; 数据布线形成在栅极绝缘层上并包括数据焊盘; 覆盖数据线的保护层; 辅助焊盘通过形成在保护层中的接触孔连接到数据焊盘; 以及在数据焊盘下方突出预定高度形成的焊盘辅助层。 用于确定薄膜晶体管基板是否缺陷的检查系统,其中薄膜晶体管基板包括包括栅极线,栅电极和栅极焊盘的栅极布线,以及包括源电极和漏电极的数据布线,包括用于接触的探针 栅极焊盘或数据焊盘并传输相应的信号,其中用于接触栅极焊盘或数据焊盘的探针的远端处的接触尖端是圆形的,并且圆形接触尖端的半径为2μm或更小, 或圆形接触尖端涂有金(Au)。

    Thin film transistor array panel
    5.
    发明授权
    Thin film transistor array panel 有权
    薄膜晶体管阵列面板

    公开(公告)号:US06872976B2

    公开(公告)日:2005-03-29

    申请号:US10602052

    申请日:2003-06-24

    摘要: Disclosed is a thin film transistor substrate and a system for inspecting the same. The thin film transistor substrate comprises gate wiring formed on an insulation substrate and including gate lines, and gate electrodes and gate pads connected to the gate lines; a gate insulation layer covering the gate wiring; a semiconductor layer formed over the gate insulation layer; data wiring formed over the gate insulation layer and including data pads; a protection layer covering the data wiring; auxiliary pads connected to the data pads through contact holes formed in the protection layer; and a pad auxiliary layer formed protruding a predetermined height under the data pads. The inspection system for determining whether a thin film transistor substrate is defective, in which the thin film transistor substrate comprises gate wiring including gate lines, gate electrodes and gate pads, and data wiring including source electrodes and drain electrodes, includes a probe pin for contacting the gate pads or data pads and transmitting a corresponding signal, wherein a contact tip at a distal end of the probe pin for contacting the gate pads or the data pads is rounded, and a radius of the rounded contact tip is 2 μm or less, or the rounded contact tip is coated with gold (Au).

    摘要翻译: 公开了一种薄膜晶体管基板及其检查系统。 薄膜晶体管基板包括形成在绝缘基板上并包括栅极线的栅极布线,以及连接到栅极线的栅电极和栅极焊盘; 覆盖栅极布线的栅极绝缘层; 形成在所述栅绝缘层上的半导体层; 数据布线形成在栅极绝缘层上并包括数据焊盘; 覆盖数据线的保护层; 辅助焊盘通过形成在保护层中的接触孔连接到数据焊盘; 以及在数据焊盘下方突出预定高度形成的焊盘辅助层。 用于确定薄膜晶体管基板是否缺陷的检查系统,其中薄膜晶体管基板包括包括栅极线,栅电极和栅极焊盘的栅极布线,以及包括源电极和漏电极的数据布线,包括用于接触的探针 栅极焊盘或数据焊盘并传输相应的信号,其中用于接触栅极焊盘或数据焊盘的探针的远端处的接触尖端是圆形的,并且圆形接触尖端的半径为2μm或更小, 或圆形接触尖端涂有金(Au)。

    Thin film transistor array substrate, method for manufacturing the same and system for inspecting the substrate

    公开(公告)号:US06590226B2

    公开(公告)日:2003-07-08

    申请号:US09970785

    申请日:2001-10-05

    IPC分类号: H01L2904

    摘要: Disclosed is a thin film transistor substrate and a system for inspecting the same. The thin film transistor substrate comprises gate wiring formed on an insulation substrate and including gate lines, and gate electrodes and gate pads connected to the gate lines; a gate insulation layer covering the gate wiring; a semiconductor layer formed over the gate insulation layer; data wiring formed over the gate insulation layer and including data pads; a protection layer covering the data wiring; auxiliary pads connected to the data pads through contact holes formed in the protection layer; and a pad auxiliary layer formed protruding a predetermined height under the data pads. The inspection system for determining whether a thin film transistor substrate is defective, in which the thin film transistor substrate comprises gate wiring including gate lines, gate electrodes and gate pads, and data wiring including source electrodes and drain electrodes, includes a probe pin for contacting the gate pads or data pads and transmitting a corresponding signal, wherein a contact tip at a distal end of the probe pin for contacting the gate pads or the data pads is rounded, and a radius of the rounded contact tip is 2 &mgr;m or less, or the rounded contact tip is coated with gold (Au).

    Thin film transistor substrate and liquid crystal display including the same
    8.
    发明授权
    Thin film transistor substrate and liquid crystal display including the same 有权
    薄膜晶体管基板和液晶显示器包括相同的

    公开(公告)号:US08253891B2

    公开(公告)日:2012-08-28

    申请号:US12425842

    申请日:2009-04-17

    IPC分类号: G02F1/1335

    摘要: A thin film transistor array panel includes: a substrate, a plurality of gate and data lines, a thin film transistor, a light blocking member, a color filter, and a pixel electrode. The substrate includes a display area having a plurality of pixels and a non-display area. The gate lines and data lines are formed on the substrate. The thin film transistor is connected to a respective gate line and data line of the plurality of gate and data lines. The light blocking member is formed on the non-display area, the gate line, the data line, and the thin film transistor. The color filter is formed on the light blocking member. The pixel electrode is formed on the color filter. The color filter covers the entire light blocking member of the non-display area.

    摘要翻译: 薄膜晶体管阵列面板包括:基板,多个栅极和数据线,薄膜晶体管,遮光部件,滤色器和像素电极。 基板包括具有多个像素和非显示区域的显示区域。 栅极线和数据线形成在衬底上。 薄膜晶体管连接到多个栅极和数据线的相应的栅极线和数据线。 遮光构件形成在非显示区域,栅极线,数据线和薄膜晶体管上。 滤光器形成在遮光部件上。 像素电极形成在滤色器上。 滤色器覆盖非显示区域的整个遮光构件。

    Display substrate and a method of manufacturing the same
    9.
    发明授权
    Display substrate and a method of manufacturing the same 有权
    显示基板及其制造方法

    公开(公告)号:US08077275B2

    公开(公告)日:2011-12-13

    申请号:US12408213

    申请日:2009-03-20

    IPC分类号: G02F1/1339 G02F1/1335

    摘要: A display substrate includes a transistor layer, a plurality of color filters, a first blocking member, a supporting member, a circuit part, a second blocking member and a protruding member. The first blocking member is disposed between different color filters. The supporting member maintains a distance between a base substrate and a substrate facing the base substrate. A circuit part is disposed in a peripheral area surrounding a display area, and the circuit part includes a metal pattern and a contact electrode in contact with the metal pattern. The second blocking member includes substantially the same material as the first blocking member and the second blocking member covers the circuit part. The protruding member includes substantially the same material as the second blocking member, and is integrally formed with the second blocking member.

    摘要翻译: 显示基板包括晶体管层,多个滤色器,第一阻挡构件,支撑构件,电路部分,第二阻挡构件和突出构件。 第一阻挡构件设置在不同的滤色器之间。 支撑构件保持基底基板和面向基底基板的基板之间的距离。 电路部分设置在围绕显示区域的周边区域中,并且电路部分包括与金属图案接触的金属图案和接触电极。 第二阻挡构件包括与第一阻挡构件基本相同的材料,并且第二阻挡构件覆盖电路部分。 突出构件包括与第二阻挡构件基本相同的材料,并且与第二阻挡构件一体地形成。