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公开(公告)号：US3091556A
公开(公告)日：1963-05-28
申请号：US85545159
申请日：1959-11-25
Applicant: IBM
Inventor： BEHRNDT MARIANNE E , GIEDD GARY R , PERKINS MERLYN H , WEED DONALD S
CPC classification number: H01L39/24 , C23C14/541 , H01B1/00 , Y10S428/93 , Y10S428/938 , Y10S505/815 , Y10S505/819 , Y10T428/12063 , Y10T428/12438 , Y10T428/12715 , Y10T428/12896
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