公开(公告)号：US3585088A

公开(公告)日：1971-06-15

申请号：US3585088D

申请日：1968-10-18

Applicant: IBM

Inventor： SCHWUTTKE GUENTER H ,  HOWARD JAMES K ,  ROSS RUPERT F

IPC: C30B1/02 ,  H01L21/00 ,  H01L21/20 ,  H01L21/268 ,  H01L21/3205 ,  H01L23/52 ,  H01L7/36 ,  H01L7/38 ,  H01L7/54

CPC classification number: H01L21/268 ,  C30B1/02 ,  H01L21/00 ,  H01L21/2026 ,  Y10S117/904 ,  Y10S148/037 ,  Y10S148/071 ,  Y10S148/085 ,  Y10S148/122 ,  Y10S148/152

Abstract: A METHOD OF PRODUCING ORIENTED CRYSTAL OVERGROWTH ON A MONOCRYSTALLINE OR AMORPHOUS SUBSTRATE WHEREIN A FILM OF CRYSTALLINE MATERIAL IS DEPOSITED ON THE SUBSTRATE AND REGIONS OF THE FILM ARE SELECTIVELY BOMBARDED WITH A LASER BEAM PULSE.