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    Process for making resist stencils from photographic stripping films and for using same
    1.
    发明授权
    Process for making resist stencils from photographic stripping films and for using same 失效
    从摄影剥离膜制造耐腐蚀性物质和使用它的方法

    公开(公告)号：US3669665A

    公开(公告)日：1972-06-13

    申请号：US3669665D

    申请日：1971-02-18

    Applicant: IBM

    Inventor： FAIGENBAUM MARK A ,  LASKY DANIEL J ,  WEISEL HAROLD C

    IPC: G03C1/74 ,  G03F1/08 ,  G03C5/00

    CPC classification number: G03C1/74

    Abstract: THE SEPARABLE LAYERS OF A PHOTOGRAPHIC STRIPPING FILM. CONSISTING OF A COMPOSITE OF A LAYER OF SENSITIVE UNEXPOSED EMULSION (E.G. SILVER HALIDE) CARRIED UPON A PERMANENT SUPPORT LAYER (E.G. CELLULOSE NITRATE) AND STRIPPED FROM THE TEMPORARY SUPPORT LAYER AND SMOOTHLY ADHERED TO AN OBJECT SURFACE WITH THE PERMANENT SUPPORT LAYER ADJACENT THE SURFACE. THE EMULSION LAYER SUCCESSIVELY RECEIVES IMAGE-WISE EXPOSURE TO LIGHT IN A FAST EXPOSURE PROCESS, PHOTOGRAPHIC DEVELOPMENT AND RELIEF DEVELOPMENT; THE LAST BY AN ETCH-BLEACH PROCESS. THE UNDERLYING SUPPORT LAYER IS DISSOLVED IMAGE-WISE WITH HIGH-FIDELITY THROUGH THE RELIEF STENCIL IN THE EMULSION LAYER. EXPOSED AREAS OF THE OBJECT SURFACE THEN RECEIVE AQUEOUS BASED PROCESS HANDLING (E.G. ETCHING OR PLATING) THROUGH THE AQUEOUS RESISTANT COMPOSITE MASTER STENCIL FORMED BY THE EMULSION AND SUPPORT LAYERS.

    In-situ reclamation of master patterns for printing microcircuit images on reversely sensitized material
    2.
    发明授权
    In-situ reclamation of master patterns for printing microcircuit images on reversely sensitized material 失效
    用于打印敏感材料上的微型图像的主要模式的现场回收

    公开(公告)号：US3666648A

    公开(公告)日：1972-05-30

    申请号：US3666648D

    申请日：1969-11-05

    Applicant: IBM

    Inventor： LASKY DANIEL J ,  WEISEL HAROLD C

    IPC: G03C5/00 ,  G03C5/40 ,  G03C5/48 ,  G03F1/54 ,  H01L21/027 ,  H01L21/30 ,  H05K3/00 ,  B01K5/02

    CPC classification number: G03F1/54 ,  G03C5/40 ,  G03C5/48 ,  H05K3/0002

    Abstract: Master pattern silver emulsion images of microelectronic artwork are altered in situ so that they can be used as master patterns to provide photocopies of the reverse images. The silver is dissolved out and the remaining gelatin relief is dyed to a threshold level of opaqueness by an absorbed dye to produce the reversed master pattern image. Results of unusually fine detail resolution and contrast quality are achieved with substantial cost savings. Costs and risk of damage, due to excessive handling of the hard-to-replace masters in the alteration process, are reduced with undiminished quality of results by employing electrical means to control agitation of the silver dissolving agent. In a preferred exemplification, handling is further reduced by combining dissolution and dyeing phases of the process into one operation. Images on the reversed masters have better edge contrast quality than the original masters. This effect is used to advantage to improve masters which originally have poor edge definition.

    Abstract translation: 微电子艺术品的主图案银乳剂图像原位改变，使得它们可以用作主图案以提供反向图像的复印件。 银被溶出并且剩余的明胶浮雕被吸收的染料染色到不透明的阈值水平以产生反向的主图案图像。 实现了非常精细的细节分辨率和对比度质量的结果，节省了大量成本。 由于使用电气手段来控制银溶解剂的搅动，由于在改造过程中过度处理难以替代的主人的成本和损害风险降低，结果质量降低。 在优选的示例中，通过将该方法的溶出和染色阶段结合到一个操作中进一步降低处理。 反向大师的图像比原始主人具有更好的边缘对比度质量。 这种效果用于改善原来具有差的边缘定义的主人。

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