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1.Photosensitive glass technique for forming contact holes in protective glass layers 失效
Title translation: 用于在保护玻璃层中形成接触孔的感光玻璃技术公开(公告)号:US3542550A
公开(公告)日:1970-11-24
申请号:US3542550D
申请日:1966-09-30
Applicant: IBM
Inventor: CONRAD ERNEST E , ESCH RONALD P , HALLEN ROBERT L , LEONARD RICHARD A , PLISKIN WILLIAM A
CPC classification number: H01L23/3157 , H01L21/00 , H01L23/291 , H01L23/485 , H01L2924/0002 , Y10S438/95 , H01L2924/00