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1.Photosensitive glass technique for forming contact holes in protective glass layers 失效
Title translation: 用于在保护玻璃层中形成接触孔的感光玻璃技术公开(公告)号:US3542550A
公开(公告)日:1970-11-24
申请号:US3542550D
申请日:1966-09-30
Applicant: IBM
Inventor: CONRAD ERNEST E , ESCH RONALD P , HALLEN ROBERT L , LEONARD RICHARD A , PLISKIN WILLIAM A
CPC classification number: H01L23/3157 , H01L21/00 , H01L23/291 , H01L23/485 , H01L2924/0002 , Y10S438/95 , H01L2924/00
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公开(公告)号:US3497407A
公开(公告)日:1970-02-24
申请号:US3497407D
申请日:1966-12-28
Applicant: IBM
Inventor: ESCH RONALD P , PLISKIN WILLIAM A
IPC: C23F1/10 , C23F1/14 , H01L21/308 , H01L21/311 , H01L23/29 , H01L23/485 , H01L7/00
CPC classification number: H01L23/291 , H01L21/31111 , H01L23/485 , H01L2924/0002 , Y10S148/043 , Y10S148/051 , Y10S148/173 , H01L2924/00
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