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公开(公告)号：US3369132A
公开(公告)日：1968-02-13
申请号：US23750162
申请日：1962-11-14
Applicant: IBM
Inventor： FANG FRANK F , TSU-HSING YEH , NIEN YU HWA
CPC classification number: H01L31/12 , H01L21/00 , H01L21/185 , H01L27/10 , H01L29/00 , H01L29/74 , H01L31/173 , Y10S148/072
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