OPTICAL ALIGNMENT TARGETS
    1.
    发明申请

    公开(公告)号:US20250052565A1

    公开(公告)日:2025-02-13

    申请号:US18799507

    申请日:2024-08-09

    Applicant: ILLUMINA, INC.

    Abstract: An example optical alignment target includes a translucent or transparent substrate having a bottom surface; an opaque material formed over the bottom surface in a pattern; an enclosed channel disposed below the bottom surface; and a fluid suspension contained in the enclosed channel. The pattern has an opaque portion of an opaque material and has a gap portion devoid of the opaque material. The fluid suspension includes a carrier liquid and a light emitting material suspended in the carrier liquid. The light emitting material is selected from the group consisting of quantum dots and cerium powder.

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