公开(公告)号：US10267733B2

公开(公告)日：2019-04-23

申请号：US15312116

申请日：2015-05-22

Applicant: IMEC VZW

Inventor： Pol Van Dorpe ,  Liesbet Lagae ,  Peter Peumans ,  Andim Stassen ,  Philippe Helin ,  Bert Du Bois ,  Simone Severi

IPC: G01N21/64 ,  G01N21/77

Abstract: The present disclosure relates to semiconductor devices for detecting fluorescent particles. At least one embodiment relates to an integrated semiconductor device for detecting fluorescent tags. The device includes a first layer, a second layer, a third layer, a fourth layer, and a fifth layer. The first layer includes a detector element. The second layer includes a rejection filter. The third layer is fabricated from dielectric material. The fourth layer is an optical waveguide configured and positioned such that a top surface of the fourth layer is illuminated with an evanescent tail of excitation light guided by the optical waveguide when the fluorescent tags are present. The fifth layer includes a microfluidic channel. The optical waveguide is configured and positioned such that the microfluidic channel is illuminated with the evanescent tail. The detector element is positioned such that light from activated fluorescent tags can be received.

公开(公告)号：US20170082544A1

公开(公告)日：2017-03-23

申请号：US15312116

申请日：2015-05-22

Applicant: IMEC VZW

Inventor： Pol Van Dorpe ,  Liesbet Lagae ,  Peter Peumans ,  Andim Stassen ,  Philippe Helin ,  Bert Du Bois ,  Simone Severi

IPC: G01N21/64

CPC classification number: G01N21/6428 ,  G01N21/6454 ,  G01N21/648 ,  G01N21/7703 ,  G01N2201/0873

Abstract: The present disclosure relates to semiconductor devices for detecting fluorescent particles. At least one embodiment relates to an integrated semiconductor device for detecting fluorescent tags. The device includes a first layer, a second layer, a third layer, a fourth layer, and a fifth layer. The first layer includes a detector element. The second layer includes a rejection filter. The third layer is fabricated from dielectric material. The fourth layer is an optical waveguide configured and positioned such that a top surface of the fourth layer is illuminated with an evanescent tail of excitation light guided by the optical waveguide when the fluorescent tags are present. The fifth layer includes a microfluidic channel. The optical waveguide is configured and positioned such that the microfluidic channel is illuminated with the evanescent tail. The detector element is positioned such that light from activated fluorescent tags can be received.