公开(公告)号：US20220065895A1

公开(公告)日：2022-03-03

申请号：US17414207

申请日：2019-09-23

Applicant: IMEC VZW ,  Katholieke Universiteit Leuven, KU LEUVEN R&D

Inventor： Kristof Paredis ,  Jonathan Op de Beeck ,  Claudia Fleischmann ,  Wilfried Vandervorst

IPC: G01Q10/06 ,  G01Q60/54 ,  G01Q20/02

Abstract: Example embodiments relate to methods and apparatuses for aligning a probe for scanning probe microscopy (SPM) to the tip of a pointed sample. One embodiments includes a method for aligning an SPM probe to an apex area of a free-standing tip of a pointed sample. The method includes providing an SPM apparatus that includes the SPM probe; a sample holder; a drive mechanism; and detection, control, and representation tools for acquiring and representing an image of a surface scanned by the SPM probe. The method also includes mounting the sample on the sample holder. Further, the method includes positioning the probe tip of the SPM, determining a 2-dimensional area that includes the pointed sample, performing an SPM acquisition scan, evaluating and acquired image, and placing the SPM probe in a position where it is aligned with an apex area of the free-standing tip of the pointed sample.

公开(公告)号：US10746759B2

公开(公告)日：2020-08-18

申请号：US16296068

申请日：2019-03-07

Applicant: IMEC vzw

Inventor： Kristof Paredis ,  Claudia Fleischmann ,  Wilfried Vandervorst

IPC: G01Q10/04 ,  G01Q10/06 ,  G01Q30/20 ,  G01Q60/24 ,  H01J37/285

Abstract: The disclosed technology relates to a method and apparatus for correctly positioning a probe suitable for scanning probe microscopy (SPM). The probe is positioned relative to the apex region of a needle-shaped sample, such as a sample for atom probe tomography, in order to perform a SPM acquisition of the apex region to obtain an image of the region. In one aspect, the positioning takes place by an iterative process, starting from a position wherein one side plane of the pyramid-shaped SPM probe interacts with the sample tip. By controlled consecutive scans in two orthogonal directions, the SPM probe tip approaches and finally reaches a position wherein a tip area of the probe interacts with the sample tip's apex region.

公开(公告)号：US11549963B2

公开(公告)日：2023-01-10

申请号：US17414207

申请日：2019-09-23

Applicant: IMEC VZW ,  Katholieke Universiteit Leuven, KU LEUVEN R&D

Inventor： Kristof Paredis ,  Jonathan Op de Beeck ,  Claudia Fleischmann ,  Wilfried Vandervorst

IPC: G01Q10/06 ,  G01Q20/02 ,  G01Q60/54

Abstract: Example embodiments relate to methods and apparatuses for aligning a probe for scanning probe microscopy (SPM) to the tip of a pointed sample. One embodiments includes a method for aligning an SPM probe to an apex area of a free-standing tip of a pointed sample. The method includes providing an SPM apparatus that includes the SPM probe; a sample holder; a drive mechanism; and detection, control, and representation tools for acquiring and representing an image of a surface scanned by the SPM probe. The method also includes mounting the sample on the sample holder. Further, the method includes positioning the probe tip of the SPM, determining a 2-dimensional area that includes the pointed sample, performing an SPM acquisition scan, evaluating and acquired image, and placing the SPM probe in a position where it is aligned with an apex area of the free-standing tip of the pointed sample.

公开(公告)号：US20190277881A1

公开(公告)日：2019-09-12

申请号：US16296068

申请日：2019-03-07

Applicant: IMEC vzw

Inventor： Kristof Paredis ,  Claudia Fleischmann ,  Wilfried Vandervorst

IPC: G01Q10/04 ,  G01Q60/24 ,  G01Q30/20

Abstract: The disclosed technology relates to a method and apparatus for correctly positioning a probe suitable for scanning probe microscopy (SPM). The probe is positioned relative to the apex region of a needle-shaped sample, such as a sample for atom probe tomography, in order to perform a SPM acquisition of the apex region to obtain an image of the region. In one aspect, the positioning takes place by an iterative process, starting from a position wherein one side plane of the pyramid-shaped SPM probe interacts with the sample tip. By controlled consecutive scans in two orthogonal directions, the SPM probe tip approaches and finally reaches a position wherein a tip area of the probe interacts with the sample tip's apex region.