公开(公告)号：US11630020B2

公开(公告)日：2023-04-18

申请号：US17371102

申请日：2021-07-09

Applicant: Industrial Technology Research Institute

Inventor： Che-Kai Yeh ,  Tzung-Ching Lee ,  Yu-Wen Hsu ,  Chao-Ta Huang

IPC: G01L27/00 ,  G01L19/14 ,  G01L19/00

Abstract: A pressure sensor with calibration device includes a casing, a diaphragm, a sensing element, a medium, and at least one calibration element. The diaphragm is disposed on the casing, wherein the casing and the diaphragm define an accommodating space. The sensing element is disposed in the casing. The medium is filled in the accommodating space and in contact with the sensing element. The at least one calibration element is adjustably disposed at the casing and extended into the accommodating space to be in contact with the medium, wherein when the at least one calibration element is moved relative to the casing in a direction toward the accommodating space or in a direction away from the accommodating space, the at least one calibration element changes the pressure applied to the medium. The pressure sensor with calibration device adjusts the pressure value sensed by the sensing element via the calibration element.

公开(公告)号：US10730744B2

公开(公告)日：2020-08-04

申请号：US16235054

申请日：2018-12-28

Applicant: INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE

Inventor： Yu-Wen Hsu ,  Che-Kai Yeh ,  Chin-Fu Kuo ,  Chao-Ta Huang

IPC: B81B3/00 ,  B81B7/00 ,  H02N1/00 ,  H04N5/232

Abstract: A MEMS device includes a substrate, at least one anchor disposed on the substrate, a movable stage, a sensing chip disposed on the movable stage, and at least one elastic member connected with the movable stage and the anchor. The movable stage includes at least one electrode and at least one conductive connecting layer. The sensing chip includes at least one electrical interconnection connected with the conductive connecting layer. The elastic member includes at least one first electrical channel, a second electrical channel and an electrical insulation layer disposed between the first electrical channel and the second electrical channel. The first electrical channel is electrically connected with the electrical interconnection, and the second electrical channel is electrically connected with the electrode.

公开(公告)号：US20240218856A1

公开(公告)日：2024-07-04

申请号：US18306999

申请日：2023-04-25

Applicant: Industrial Technology Research Institute

Inventor： Yu-Hsuan Shih ,  Che-Kai Yeh ,  Tzung-Ching Lee ,  Chao-Ta Huang

IPC: F03D17/00 ,  G01M5/00

CPC classification number: F03D17/00 ,  G01M5/0058 ,  G01B7/18

Abstract: A force measurement apparatus adapted to be installed on a pile includes at least one pressing ring and a plurality of force sensors. The pressing ring includes a ring body and at least one pressing part. The ring body has at least one end and an inner surface facing the pile. The pressing part is disposed at the end. The force sensor is disposed between the inner surface of the ring body and the pile so as to sense a radial deformation and the degree of eccentricity of the pile.

公开(公告)号：US20220196505A1

公开(公告)日：2022-06-23

申请号：US17371102

申请日：2021-07-09

Applicant: Industrial Technology Research Institute

Inventor： Che-Kai Yeh ,  Tzung-Ching Lee ,  Yu-Wen Hsu ,  Chao-Ta Huang

IPC: G01L27/00 ,  G01L19/00 ,  G01L19/14

Abstract: A pressure sensor with calibration function includes a casing, a diaphragm, a sensing element, a medium, and at least one calibration element. The diaphragm is disposed on the casing, wherein the casing and the diaphragm define an accommodating space. The sensing element is disposed in the casing. The medium is filled in the accommodating space and in contact with the sensing element. The at least one calibration element is adjustably disposed at the casing and extended into the accommodating space to be in contact with the medium, wherein when the at least one calibration element is moved relative to the casing, the at least one calibration element changes the pressure applied to the medium.