公开(公告)号：US20230202832A1

公开(公告)日：2023-06-29

申请号：US17743331

申请日：2022-05-12

Applicant: INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE

Inventor： Jen-Chieh LI ,  Chao-Ta HUANG ,  Chung-Yuan SU ,  RueiHung KAO

IPC: B81B3/00 ,  H04R17/00 ,  H04R19/02 ,  H01L41/04

CPC classification number: B81B3/0021 ,  H04R17/00 ,  H04R19/02 ,  H01L41/042 ,  B81B2201/0257

Abstract: A microelectromechanical apparatus includes a base and a thin film including a stationary part disposed on the base, a peripheral part, a central part surrounded by the peripheral part, and a first and second elastic part. The first elastic part is connected to the stationary part and the peripheral part. The second elastic part is connected to the peripheral part and the central part. When low frequency signal is input to a first electrode of the first elastic part, the peripheral part and the and the central part respectively vibrate with a first and second low-frequency amplitudes. When high-frequency signal is input to a second electrode of the second elastic part, the peripheral part and the central part respectively vibrate with a first and second high-frequency amplitudes. A difference between the first and second low-frequency amplitudes is smaller than a difference between the first and second high-frequency amplitudes.

公开(公告)号：US20220205861A1

公开(公告)日：2022-06-30

申请号：US17234260

申请日：2021-04-19

Applicant: INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE

Inventor： Jen-Chieh LI ,  Tzung-Ching LEE ,  Yu-Wen HSU ,  Chao-Ta HUANG

IPC: G01L27/00

Abstract: A calibration system for calibrating pressure sensor comprises communication pipe, base, inlet valve, outlet valve, pump, inlet pipe, heater and reference pressure sensor. The communication pipe has first and second openings. The base comprises chamber body and outlet being disposed at the chamber body. The inlet valve is disposed at the first opening. The chamber body is connected to the second opening so as to define a space between the inlet valve and the outlet valve. The heater is to heat a fluid in the space. The reference pressure sensor is configured to measure a pressure of the fluid. The at least one target pressure sensor is detachably mounted on the chamber body via the base so as to measure the pressure of the fluid in the space.