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公开(公告)号：US20220365040A1
公开(公告)日：2022-11-17
申请号：US17539686
申请日：2021-12-01
Applicant: INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE
Inventor： Chung-Yuan SU , Chin-Fu KUO , Liang-Ying LIU , Chao-Ta HUANG
Abstract: A microelectromechanical sensing apparatus with calibration function comprises a microelectromechanical sensor and an IC chip. The microelectromechanical sensor comprises a proof mass, a movable driving electrode and a movable sensing electrode disposed on the proof mass, and a stationary driving electrode and stationary sensing electrode disposed on a substrate, wherein the sensing electrodes output a sensing signal when the proof mass vibrates. The IC chip comprises a conversion module electrically connected to the microelectromechanical sensor, wherein the conversion module converts the sensing signal into an input spectrum signal, and a calibration module electrically connected to the conversion module, wherein the calibration module receives the input spectrum signal and transforms the input spectrum signal into an output spectrum signal; wherein, the output spectrum signal is equal amplitude spectrum signal when the microelectromechanical sensor is subjected to an equal amplitude vibration and the input spectrum signal is an unequal amplitude spectrum signal.
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公开(公告)号：US20210199518A1
公开(公告)日：2021-07-01
申请号：US16899475
申请日：2020-06-11
Applicant: INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE
Inventor： Chih-Che LIN , Chih-Yuan CHEN , Chung-Yuan SU , Chao-Ta HUANG
Abstract: The disclosure relates to a force measurement device including central portion, fixing portion, first and second sensing portions, and first and second electromechanical elements. The first sensing portion has first natural frequency. The first sensing portion is connected to the central portion. The second sensing portion has a second natural frequency. The second sensing portion is connected to the first sensing portion and the fixing portion. The first electromechanical element is disposed on the first sensing portion to measure a first vibration amplitude. The second electromechanical element is disposed on the second sensing portion to measure a second vibration amplitude. When the central portion is subjected to a first force, the first vibration amplitude is larger than the second vibration amplitude. When the central portion is subjected to a second force, the first vibration amplitude is smaller than the second vibration amplitude.
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公开(公告)号：US20240192063A1
公开(公告)日：2024-06-13
申请号：US18205258
申请日：2023-06-02
Applicant: INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE
Inventor： Che-Kai YEH , Chih-Che LIN , Chao-Ta HUANG , Shih-Ting LIN
IPC: G01L1/16
CPC classification number: G01L1/16
Abstract: An electric signal reconstruction system includes a signal generator and a computing element. The signal generator has a time constant and is configured to generate a plurality of signal value corresponding to a plurality of time points within a time period, wherein the signal values include a designated value, the time points include a designated time point, and the designated value corresponds to the designated time point. The computing element is electrically connected to the signal generator and is configured to perform operations including: performing a differential calculation or an integral calculation according to the time points and the signal values to generate a fundamental value; calculating a correction constant associated with the time constant; calculating a product of the correction constant and the fundamental value as a correction value; calculating a sum of the correction value and the designated value as a reconstruction value; and outputting the reconstruction value.
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公开(公告)号：US20210198101A1
公开(公告)日：2021-07-01
申请号：US16882039
申请日：2020-05-22
Applicant: INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE
Inventor： Bor-Shiun LEE , Ming-Fa CHEN , Yu-Wen HSU , Chao-Ta HUANG
Abstract: The disclosure relates to a microelectromechanical apparatus including a substrate, a stationary electrode, a movable electrode, and a heater. The substrate includes an upper surface, an inner bottom surface, and an inner side surface. The inner side surface surrounds and connects with the inner bottom surface. The inner side surface and the inner bottom surface define a recess. The stationary electrode is disposed on the inner bottom surface. The movable electrode covers the recess. The movable electrode, the inner bottom surface, and the inner side surface define a hermetic chamber. The heater is disposed on the movable electrode and located above the hermetic chamber.
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公开(公告)号：US20200209175A1
公开(公告)日：2020-07-02
申请号：US16369965
申请日：2019-03-29
Applicant: INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE
Inventor： Peng-Jen CHEN , Bor-Shiun LEE , Chao-Ta HUANG
IPC: G01N27/12
Abstract: A MEMS apparatus with heater includes central part, periphery part, gap and first connecting part. Central part includes center of mass, heater and first joint. Heater is disposed inside central part. First joint is located on boundary of central part. Displacement of first joint is produced when central part is heated by heater. Periphery part surrounds central part. Gap surrounds central part, and is located between central part and periphery part. First connecting part connects central part and periphery part along first reference line and includes first inner connecting portion and first outer connecting portion. First inner connecting portion is connected to first joint. First outer connecting portion is connected to periphery part. First reference line passes through first joint, and first reference line is not parallel to line connecting center of mass and first joint.
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Patent Agency Ranking
公开(公告)号：US20220205861A1
公开(公告)日：2022-06-30
申请号：US17234260
申请日：2021-04-19
Applicant: INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE
Inventor： Jen-Chieh LI , Tzung-Ching LEE , Yu-Wen HSU , Chao-Ta HUANG
IPC: G01L27/00
Abstract: A calibration system for calibrating pressure sensor comprises communication pipe, base, inlet valve, outlet valve, pump, inlet pipe, heater and reference pressure sensor. The communication pipe has first and second openings. The base comprises chamber body and outlet being disposed at the chamber body. The inlet valve is disposed at the first opening. The chamber body is connected to the second opening so as to define a space between the inlet valve and the outlet valve. The heater is to heat a fluid in the space. The reference pressure sensor is configured to measure a pressure of the fluid. The at least one target pressure sensor is detachably mounted on the chamber body via the base so as to measure the pressure of the fluid in the space.
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公开(公告)号：US20210202822A1
公开(公告)日：2021-07-01
申请号：US16849828
申请日：2020-04-15
Applicant: INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE
Inventor： Chih-Hsiou LIN , Shih-Ting LIN , Chung-Yuan SU , Chao-Ta HUANG
IPC: H01L41/04 , H01L41/113 , G01L1/16
Abstract: A piezoelectric system comprises a piezoelectric sensor, a voltage stabilizer, a discharger and an operation sensor. The piezoelectric sensor outputs a sensing signal through a sensor output terminal according to a rate of change of pressure. The voltage stabilizer has a positive terminal electrically connecting with the sensor output terminal. The voltage stabilizer receives the sensing signal, stores the energy of the sensing signal, and keeps the voltage of the sensing signal as a constant when the rate of change of pressure is zero. The discharger has a first terminal connecting with the positive terminal, a second terminal coupled to ground, and a control terminal receiving a trigger signal to control the first terminal to conduct with or not conduct with the second terminal. The operation sensor electrically connects to the control terminal for sensing an operation generating the pressure and outputs the trigger signal accordingly.
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8.发明申请公开(公告)号：US20150260517A1
公开(公告)日：2015-09-17
申请号：US14553595
申请日：2014-11-25
Applicant: INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE
Inventor： Chung-Yuan SU , Chun-Yin TSAI , Chao-Ta HUANG
CPC classification number: G01C19/5762 , B81B3/0045 , B81B2201/0235 , B81B2201/0242 , B81B2203/0163 , Y10T74/12
Abstract: A micro-electromechanical apparatus includes a rotary element, at least one restraint and at least two folded springs. The rotary element is capable of rotating with respect to an axis. The folded springs are symmetrically disposed about the axis. Each folded spring has a moving end and a fixed end, the moving end is connected to the rotary element, and the fixed end is connected to the at least one restraint. The moving end is not located on the axis, and the fixed end is not located on the axis. A moving distance is defined as a distance between the moving end and the axis, a fixed distance is defined as a distance between the fixed end and the axis. A spring length is defined as a distance between the moving end and the fixed end. The spring length is varied according to the rotation of the rotary element.
Abstract translation: 微机电装置包括旋转元件，至少一个约束件和至少两个折叠弹簧。 旋转元件能够相对于轴线旋转。 折叠弹簧围绕轴对称设置。 每个折叠弹簧具有移动端和固定端，移动端连接到旋转元件，并且固定端连接到至少一个约束。 移动端不在轴上，固定端不在轴上。 移动距离被定义为移动端和轴之间的距离，固定距离被定义为固定端与轴之间的距离。 弹簧长度被定义为移动端与固定端之间的距离。 弹簧长度根据旋转元件的旋转而变化。
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公开(公告)号：US20240183735A1
公开(公告)日：2024-06-06
申请号：US18140513
申请日：2023-04-27
Applicant: INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE
Inventor： Chien-Nan YEH , Meng-Chiao TSAI , Shih-Ting LIN , Chao-Ta HUANG
CPC classification number: G01L19/143 , G01L1/16
Abstract: A force sensing apparatus with bridge portion comprises a first case, a second case, and a force sensing module. The first case comprises a first annular portion, a first bridge portion, and an inner wall portion. The first bridge portion is connected to an outer periphery of the first annular portion. The inner wall portion is connected to an inner periphery of the first annular portion. The second case comprises a second annular portion, a second bridge portion, and an outer wall portion. The second bridge portion is connected to an inner periphery of the second annular portion. The outer wall portion is connected to an outer periphery of the second annular portion. A stiffness of the second annular portion along an axial direction is greater than a stiffness of the second bridge portion along the axial direction. The second case is disposed on the first case along the axial direction to form a space. The force sensing module is disposed in the space.
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公开(公告)号：US20220187149A1
公开(公告)日：2022-06-16
申请号：US17234263
申请日：2021-04-19
Applicant: INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE
Inventor： Chien-Nan YEH , Pei-Yu CHANG , Shih-Ting LIN , Chao-Ta HUANG
Abstract: A spindle shaft device including a shaft, a first torque sensor, and a second torque sensor. The shaft extends along an axial direction and comprises a first side portion, a second side portion, and a central portion located between the first side portion and the second side portion. The central portion has a central torsional rigidity with respect to the axial direction. The first side portion has a first torsional rigidity with respect to the axial direction. The second side portion has a second torsional rigidity with respect to the axial direction. The first torsional rigidity is smaller than the central torsional rigidity. The second torsional rigidity is smaller than the central torsional rigidity. The first torque sensor is disposed on the first side portion. The second torque sensor is disposed on the second side portion.
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