公开(公告)号：US20230202832A1

公开(公告)日：2023-06-29

申请号：US17743331

申请日：2022-05-12

Applicant: INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE

Inventor： Jen-Chieh LI ,  Chao-Ta HUANG ,  Chung-Yuan SU ,  RueiHung KAO

IPC: B81B3/00 ,  H04R17/00 ,  H04R19/02 ,  H01L41/04

CPC classification number: B81B3/0021 ,  H04R17/00 ,  H04R19/02 ,  H01L41/042 ,  B81B2201/0257

Abstract: A microelectromechanical apparatus includes a base and a thin film including a stationary part disposed on the base, a peripheral part, a central part surrounded by the peripheral part, and a first and second elastic part. The first elastic part is connected to the stationary part and the peripheral part. The second elastic part is connected to the peripheral part and the central part. When low frequency signal is input to a first electrode of the first elastic part, the peripheral part and the and the central part respectively vibrate with a first and second low-frequency amplitudes. When high-frequency signal is input to a second electrode of the second elastic part, the peripheral part and the central part respectively vibrate with a first and second high-frequency amplitudes. A difference between the first and second low-frequency amplitudes is smaller than a difference between the first and second high-frequency amplitudes.

公开(公告)号：US20210018041A1

公开(公告)日：2021-01-21

申请号：US16870439

申请日：2020-05-08

Applicant: Industrial Technology Research Institute

Inventor： Chien-Nan YEH ,  Chung-Yuan SU ,  Chao-Ta HUANG

IPC: F16C29/06 ,  G01B7/16 ,  F16C41/00

Abstract: A linear guideway with an embedded sensor includes a track, a slider, a plurality of rolling members, and a sensing module. The track extends in a first direction and has a first recess. The slider can move in the first direction and include a second recess, a channel, at least one hole, and a deforming region. The channel is formed by coupling the first recess and the second recess, and extends in the first direction. The hole extends from the surface of the slider along the insertion axis and into the slider. The rolling members are disposed in the channel. The sensing module is disposed in the hole, and contacts the deforming region to detect the amount of deformation.

公开(公告)号：US20210202822A1

公开(公告)日：2021-07-01

申请号：US16849828

申请日：2020-04-15

Applicant: INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE

Inventor： Chih-Hsiou LIN ,  Shih-Ting LIN ,  Chung-Yuan SU ,  Chao-Ta HUANG

IPC: H01L41/04 ,  H01L41/113 ,  G01L1/16

Abstract: A piezoelectric system comprises a piezoelectric sensor, a voltage stabilizer, a discharger and an operation sensor. The piezoelectric sensor outputs a sensing signal through a sensor output terminal according to a rate of change of pressure. The voltage stabilizer has a positive terminal electrically connecting with the sensor output terminal. The voltage stabilizer receives the sensing signal, stores the energy of the sensing signal, and keeps the voltage of the sensing signal as a constant when the rate of change of pressure is zero. The discharger has a first terminal connecting with the positive terminal, a second terminal coupled to ground, and a control terminal receiving a trigger signal to control the first terminal to conduct with or not conduct with the second terminal. The operation sensor electrically connects to the control terminal for sensing an operation generating the pressure and outputs the trigger signal accordingly.

公开(公告)号：US20150260517A1

公开(公告)日：2015-09-17

申请号：US14553595

申请日：2014-11-25

Applicant: INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE

Inventor： Chung-Yuan SU ,  Chun-Yin TSAI ,  Chao-Ta HUANG

IPC: G01C19/06 ,  B81B3/00

CPC classification number: G01C19/5762 ,  B81B3/0045 ,  B81B2201/0235 ,  B81B2201/0242 ,  B81B2203/0163 ,  Y10T74/12

Abstract: A micro-electromechanical apparatus includes a rotary element, at least one restraint and at least two folded springs. The rotary element is capable of rotating with respect to an axis. The folded springs are symmetrically disposed about the axis. Each folded spring has a moving end and a fixed end, the moving end is connected to the rotary element, and the fixed end is connected to the at least one restraint. The moving end is not located on the axis, and the fixed end is not located on the axis. A moving distance is defined as a distance between the moving end and the axis, a fixed distance is defined as a distance between the fixed end and the axis. A spring length is defined as a distance between the moving end and the fixed end. The spring length is varied according to the rotation of the rotary element.

Abstract translation: 微机电装置包括旋转元件，至少一个约束件和至少两个折叠弹簧。 旋转元件能够相对于轴线旋转。 折叠弹簧围绕轴对称设置。 每个折叠弹簧具有移动端和固定端，移动端连接到旋转元件，并且固定端连接到至少一个约束。 移动端不在轴上，固定端不在轴上。 移动距离被定义为移动端和轴之间的距离，固定距离被定义为固定端与轴之间的距离。 弹簧长度被定义为移动端与固定端之间的距离。 弹簧长度根据旋转元件的旋转而变化。

公开(公告)号：US20220365040A1

公开(公告)日：2022-11-17

申请号：US17539686

申请日：2021-12-01

Applicant: INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE

Inventor： Chung-Yuan SU ,  Chin-Fu KUO ,  Liang-Ying LIU ,  Chao-Ta HUANG

IPC: G01N29/30 ,  G01N29/24

Abstract: A microelectromechanical sensing apparatus with calibration function comprises a microelectromechanical sensor and an IC chip. The microelectromechanical sensor comprises a proof mass, a movable driving electrode and a movable sensing electrode disposed on the proof mass, and a stationary driving electrode and stationary sensing electrode disposed on a substrate, wherein the sensing electrodes output a sensing signal when the proof mass vibrates. The IC chip comprises a conversion module electrically connected to the microelectromechanical sensor, wherein the conversion module converts the sensing signal into an input spectrum signal, and a calibration module electrically connected to the conversion module, wherein the calibration module receives the input spectrum signal and transforms the input spectrum signal into an output spectrum signal; wherein, the output spectrum signal is equal amplitude spectrum signal when the microelectromechanical sensor is subjected to an equal amplitude vibration and the input spectrum signal is an unequal amplitude spectrum signal.

公开(公告)号：US20210199518A1

公开(公告)日：2021-07-01

申请号：US16899475

申请日：2020-06-11

Applicant: INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE

Inventor： Chih-Che LIN ,  Chih-Yuan CHEN ,  Chung-Yuan SU ,  Chao-Ta HUANG

IPC: G01L1/18 ,  G01L1/16

Abstract: The disclosure relates to a force measurement device including central portion, fixing portion, first and second sensing portions, and first and second electromechanical elements. The first sensing portion has first natural frequency. The first sensing portion is connected to the central portion. The second sensing portion has a second natural frequency. The second sensing portion is connected to the first sensing portion and the fixing portion. The first electromechanical element is disposed on the first sensing portion to measure a first vibration amplitude. The second electromechanical element is disposed on the second sensing portion to measure a second vibration amplitude. When the central portion is subjected to a first force, the first vibration amplitude is larger than the second vibration amplitude. When the central portion is subjected to a second force, the first vibration amplitude is smaller than the second vibration amplitude.