公开(公告)号：US20160025587A1

公开(公告)日：2016-01-28

申请号：US14773250

申请日：2013-07-09

Applicant: INFICON GMBH

Inventor： Bernhard ANDREAUS ,  Rolf ENDERES ,  Martin WUEST ,  Oskar UNTERMARZONER ,  Rudolf STOCKER

IPC: G01L21/34 ,  H01J41/06

CPC classification number: G01L21/34 ,  H01J41/06

Abstract: An ionization vacuum measuring cell comprises an anode (3A) and a cathode (4K) in a measuring chamber (107). The measuring chamber (107) is arranged in a housing (101) which has a vacuum-tight feedthrough (103) for a connection rod (104) of the cathode (4K) towards the outside. The measuring chamber (107) holds the rod (104) in a feedthrough (109) which is electrically insulating only. The measuring chamber (107) in the housing (101) can be exchanged by a releasable plug connection (106).

Abstract translation: 电离真空测量池在测量室（107）中包括阳极（3A）和阴极（4K）。 测量室（107）布置在壳体（101）中，该壳体具有用于阴极（4K）的连接杆（104）朝向外部的真空密封馈通（103）。 测量室（107）将杆（104）保持在仅具有电绝缘性的馈通（109）中。 壳体（101）中的测量室（107）可以通过可释放的插头连接（106）来更换。