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公开(公告)号：US10322481B2
公开(公告)日：2019-06-18
申请号：US14198646
申请日：2014-03-06
Applicant: Infineon Technologies AG
Inventor： Alfons Dehe , Reinhard Gabl , Ulrich Krumbein
Abstract: A structure for fixing a membrane to a carrier including a carrier; a suspended structure; and a holding structure with a rounded concave shape which is configured to fix the suspended structure to the carrier and where a tapered side of the holding structure physically connects to the suspended structure is disclosed. A method of forming the holding structure on a carrier to support a suspended structure is further disclosed. The method may include: forming a holding structure on a carrier; forming a suspended structure on the holding structure; shaping the holding structure such that it has a concave shape; and arranging the holding structure such that a tapered side of the holding structure physically connects to the suspended structure.
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公开(公告)号：US11679461B2
公开(公告)日：2023-06-20
申请号：US17681848
申请日：2022-02-28
Applicant: Infineon Technologies AG
Inventor： Alfons Dehe , Reinhard Gabl , Ulrich Krumbein
CPC classification number: B23Q3/18 , B81B3/0072 , B81C1/00158 , H04R7/18 , H04R17/00 , H04R19/005 , H04R31/003 , B81B2201/0257 , B81B2201/0264 , B81B2203/0127 , H01L2924/1461 , H04R2201/003 , H04R2307/207 , H04R2499/11
Abstract: A structure for fixing a membrane to a carrier including a carrier; a suspended structure; and a holding structure with a rounded concave shape which is configured to fix the suspended structure to the carrier and where a tapered side of the holding structure physically connects to the suspended structure is disclosed. A method of forming the holding structure on a carrier to support a suspended structure is further disclosed. The method may include: forming a holding structure on a carrier; forming a suspended structure on the holding structure; shaping the holding structure such that it has a concave shape; and arranging the holding structure such that a tapered side of the holding structure physically connects to the suspended structure.
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公开(公告)号：US09736590B2
公开(公告)日：2017-08-15
申请号：US14298529
申请日：2014-06-06
Applicant: Infineon Technologies AG
Inventor： Wolfgang Klein , Reinhard Gabl
CPC classification number: H04R7/02 , H04R19/005 , H04R23/00 , H04R2201/003
Abstract: According to an embodiment, a microfabricated structure includes a cavity disposed in a substrate, a first clamping layer overlying the substrate, a deflectable membrane overlying the first clamping layer, and a second clamping layer overlying the deflectable membrane. A portion of the second clamping layer overlaps the cavity.
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Patent Agency Ranking
公开(公告)号：US20150358735A1
公开(公告)日：2015-12-10
申请号：US14298529
申请日：2014-06-06
Applicant: Infineon Technologies AG
Inventor： Wolfgang Klein , Reinhard Gabl
CPC classification number: H04R7/02 , H04R19/005 , H04R23/00 , H04R2201/003
Abstract: According to an embodiment, a microfabricated structure includes a cavity disposed in a substrate, a first clamping layer overlying the substrate, a deflectable membrane overlying the first clamping layer, and a second clamping layer overlying the deflectable membrane. A portion of the second clamping layer overlaps the cavity.
Abstract translation: 根据一个实施例，微加工结构包括设置在基板中的空腔，覆盖基板的第一夹紧层，覆盖第一夹持层的可偏转膜以及覆盖在可偏转膜上的第二夹紧层。 第二夹紧层的一部分与空腔重叠。
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公开(公告)号：US11292097B2
公开(公告)日：2022-04-05
申请号：US16402248
申请日：2019-05-03
Applicant: Infineon Technologies AG
Inventor： Alfons Dehe , Reinhard Gabl , Ulrich Krumbein
Abstract: A structure for fixing a membrane to a carrier including a carrier; a suspended structure; and a holding structure with a rounded concave shape which is configured to fix the suspended structure to the carrier and where a tapered side of the holding structure physically connects to the suspended structure is disclosed. A method of forming the holding structure on a carrier to support a suspended structure is further disclosed. The method may include: forming a holding structure on a carrier; forming a suspended structure on the holding structure; shaping the holding structure such that it has a concave shape; and arranging the holding structure such that a tapered side of the holding structure physically connects to the suspended structure.
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公开(公告)号：US20190255669A1
公开(公告)日：2019-08-22
申请号：US16402248
申请日：2019-05-03
Applicant: Infineon Technologies AG
Inventor： Alfons Dehe , Reinhard Gabl , Ulrich Krumbein
Abstract: A structure for fixing a membrane to a carrier including a carrier; a suspended structure; and a holding structure with a rounded concave shape which is configured to fix the suspended structure to the carrier and where a tapered side of the holding structure physically connects to the suspended structure is disclosed. A method of forming the holding structure on a carrier to support a suspended structure is further disclosed. The method may include: forming a holding structure on a carrier; forming a suspended structure on the holding structure; shaping the holding structure such that it has a concave shape; and arranging the holding structure such that a tapered side of the holding structure physically connects to the suspended structure.
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公开(公告)号：US20170311082A1
公开(公告)日：2017-10-26
申请号：US15643842
申请日：2017-07-07
Applicant: Infineon Technologies AG
Inventor： Wolfgang Klein , Reinhard Gabl
CPC classification number: H04R7/02 , H04R19/005 , H04R23/00 , H04R2201/003
Abstract: According to an embodiment, a microfabricated structure includes a cavity disposed in a substrate, a first clamping layer overlying the substrate, a deflectable membrane overlying the first clamping layer, and a second clamping layer overlying the deflectable membrane. A portion of the second clamping layer overlaps the cavity.
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公开(公告)号：US20150251285A1
公开(公告)日：2015-09-10
申请号：US14198646
申请日：2014-03-06
Applicant: INFINEON TECHNOLOGIES AG
Inventor： Alfons Dehe , Reinhard Gabl , Ulrich Krumbein
IPC: B23Q3/18
CPC classification number: B23Q3/18 , B81B3/0072 , B81B2201/0257 , B81B2201/0264 , B81B2203/0127 , B81C1/00158 , H04R7/18 , H04R17/00 , H04R19/005 , H04R31/003 , H04R2201/003 , H04R2307/207 , H04R2499/11
Abstract: A structure for fixing a membrane to a carrier including a carrier; a suspended structure; and a holding structure with a rounded concave shape which is configured to fix the suspended structure to the carrier and where a tapered side of the holding structure physically connects to the suspended structure is disclosed. A method of forming the holding structure on a carrier to support a suspended structure is further disclosed. The method may include: forming a holding structure on a carrier; forming a suspended structure on the holding structure; shaping the holding structure such that it has a concave shape; and arranging the holding structure such that a tapered side of the holding structure physically connects to the suspended structure.
Abstract translation: 一种用于将膜固定到包括载体的载体的结构; 悬挂式结构; 以及具有圆形凹形的保持结构，其被构造成将悬挂结构固定到托架上，并且其中保持结构的锥形侧物理连接到悬挂结构。 还公开了一种在载体上形成保持结构以支撑悬挂结构的方法。 该方法可以包括：在载体上形成保持结构; 在所述保持结构上形成悬挂结构; 使保持结构成形为具有凹形; 并且将所述保持结构布置成使得所述保持结构的锥形侧物理地连接到所述悬挂结构。
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