Via resistance reduction
    1.
    发明授权

    公开(公告)号:US11271042B2

    公开(公告)日:2022-03-08

    申请号:US16958654

    申请日:2018-03-16

    Abstract: One embodiment provides a method of making a memory device. The method includes forming a via in a bit line, an interlayer and a dielectric region. The bit line is formed on the interlayer. The interlayer is formed partially on the dielectric region and partially on a plurality of memory cells. The via has a first end included in, and in direct contact with, the bit line and a second end to couple to an electrical contact.

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