公开(公告)号：US12087594B2

公开(公告)日：2024-09-10

申请号：US17124730

申请日：2020-12-17

Applicant: INTEL CORPORATION

Inventor： Gurpreet Singh ,  Eungnak Han ,  Manish Chandhok ,  Richard E Schenker ,  Florian Gstrein ,  Paul A. Nyhus ,  Charles Henry Wallace

IPC: H01L21/311 ,  H01L21/768

CPC classification number: H01L21/31144 ,  H01L21/76811 ,  H01L21/76816 ,  H01L21/76831

Abstract: Disclosed herein are colored gratings in microelectronic structures. For example, a microelectronic structure may include first conductive structures alternating with second conductive structures, wherein individual ones of the first conductive structures include a bottom portion and a top portion, individual cap structures are on individual ones of the second conductive structures, the bottom portions of the first conductive structures are laterally spaced apart from and aligned with the second conductive structures, and the top portions of the first conductive structures are laterally spaced apart from and aligned with the cap structures. In some embodiments, a microelectronic structure may include one or more unordered lamellar regions laterally spaced apart from and aligned with the first conductive structures.