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公开(公告)号:US20250112122A1
公开(公告)日:2025-04-03
申请号:US18477906
申请日:2023-09-29
Applicant: INTEL CORPORATION
Inventor: Kevin P. O'Brien , Paul Gutwin , David L. Kencke , Mahmut Sami Kavrik , Daniel Chanemougame , Ashish Verma Penumatcha , Carl Hugo Naylor , Kirby Maxey , Uygar E. Avci , Tristan A. Tronic , Chelsey Dorow , Andrey Vyatskikh , Rachel A. Steinhardt , Chia-Ching Lin , Chi-Yin Cheng , Yu-Jin Chen , Tyrone Wilson
IPC: H01L23/48 , H01L23/528 , H01L27/092 , H01L29/06 , H01L29/18 , H01L29/423 , H01L29/78
Abstract: Integrated circuit (IC) devices and systems with backside power gates, and methods of forming the same, are disclosed herein. In one embodiment, an integrated circuit die includes a device layer with one or more transistors, a first interconnect over the device layer, a second interconnect under the device layer, and one or more power gates under the device layer.